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    Method of manufacturing microstructure and manufacturing system for the same
    9.
    发明申请
    Method of manufacturing microstructure and manufacturing system for the same 审中-公开
    制造微结构和制造系统的方法

    公开(公告)号：US20050233064A1

    公开(公告)日：2005-10-20

    申请号：US11060788

    申请日：2005-02-18

    申请人： Takeshi Tsuno ,  Takayuki Goto ,  Satoshi Tawara ,  Masato Kinouchi ,  Shin Asano ,  Osamu Hasegawa ,  Takayuki Yamada ,  Mutsuya Takahashi

    发明人： Takeshi Tsuno ,  Takayuki Goto ,  Satoshi Tawara ,  Masato Kinouchi ,  Shin Asano ,  Osamu Hasegawa ,  Takayuki Yamada ,  Mutsuya Takahashi

    IPC分类号： B81C3/00 ,  B05D1/00 ,  B05D3/12 ,  B81C1/00 ,  B81C99/00 ,  C07C2/02

    CPC分类号： B81C3/008

    摘要： A method of and system for manufacturing a microstructure having high form accuracy and a manufacturing system is disclosed. On a rough motion stage having a predetermined positioning accuracy and a large stroke length, a fine motion stage having a small stroke length and a higher positioning accuracy is placed. First, the rough motion stage is moved to a desired position. By use of a mirror placed on a laser length measuring machine and the fine motion stage, the current position of a thin film member on the fine motion stage is precisely measured. This measurement value is feed-backed to a stage control device, and a difference between the current position and a target position is calculated by an error correcting unit. Thus, an error correcting instruction value is generated to move the fine motion stage to the target position. Thus, an error of the rough motion stage is corrected.

    摘要翻译： 公开了一种用于制造具有高成形精度的微结构和制造系统的方法和系统。 在具有预定定位精度和大行程长度的粗略运动台上，放置行程长度小且定位精度较高的微动平台。 首先，粗动作阶段移动到期望的位置。 通过使用放置在激光长度测量机和精细运动台上的反射镜，精细测量薄膜部件在微动台上的当前位置。 该测量值被馈送到载物台控制装置，并且通过误差校正单元计算当前位置与目标位置之间的差。 因此，产生误差校正指令值以将微动台移动到目标位置。 因此，校正粗略运动阶段的误差。

    Micro-structure and manufacturing method and apparatus
    10.
    发明授权
    Micro-structure and manufacturing method and apparatus 失效
    微结构及制造方法及装置

    公开(公告)号：US06245249B1

    公开(公告)日：2001-06-12

    申请号：US09064056

    申请日：1998-04-22

    申请人： Takayuki Yamada ,  Mutsuya Takahashi ,  Masaki Nagata

    发明人： Takayuki Yamada ,  Mutsuya Takahashi ,  Masaki Nagata

    IPC分类号： B32B3100

    CPC分类号： B81C99/008 ,  B29C64/00 ,  B33Y10/00 ,  B33Y30/00 ,  B81B2201/035 ,  B81C2201/0197 ,  Y10T156/12 ,  Y10T156/13 ,  Y10T156/14 ,  Y10T428/24355

    摘要： A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.

    摘要翻译： 其上形成有多个与微结构的横截面相对应的多个横截面的薄膜的基板被放置在基板支架上。 衬底保持器被升高以将形成在衬底上的薄膜粘合到台的表面上，并且通过降低衬底保持器，将薄膜与衬底分离并转移到平台侧。 重复转印过程以在台上层压多个薄膜并形成微结构。 因此，提供了可以由诸如陶瓷的金属或绝缘体制造的具有高尺寸精度，特别是层压方向上的高分辨率的微结构，并且可以以结构元件的组合形式一起制造，并且 制造方法及其装置。