METHOD OF CALIBRATING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED DATA PROCESSING APPARATUS AND COMPUTER PROGRAM PRODUCT
    1.
    发明申请
    METHOD OF CALIBRATING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED DATA PROCESSING APPARATUS AND COMPUTER PROGRAM PRODUCT 有权
    校正光刻设备的方法,设备制造方法和相关数据处理设备和计算机程序产品

    公开(公告)号:US20140168620A1

    公开(公告)日:2014-06-19

    申请号:US14103486

    申请日:2013-12-11

    IPC分类号: G03F7/20

    CPC分类号: G03F7/70516

    摘要: A lithography tool is calibrated using a calibration substrate having a set of first marks distributed across its surface in a known pattern. The tool is operated to apply a pattern comprising a plurality of second marks at various positions on the substrate, each second mark overlying one of the first marks and being subject to an overlay error dependent on an apparatus-specific deviation. The second marks are applied by multiple exposures while the substrate remains loaded in the tool. An operating parameter of the apparatus is varied between the exposures. An overlay error is measured and used to calculate parameter-specific, apparatus-specific calibration data based on knowledge of the parameter variation used for each exposure.

    摘要翻译: 使用具有以已知图案分布在其表面上的一组第一标记的校准基板校准光刻工具。 操作该工具以在衬底上的各个位置上施加包括多个第二标记的图案,每个第二标记覆盖第一标记中的一个并且受到依赖于设备特异性偏差的覆盖误差。 当衬底保持加载在工具中时,通过多次曝光施加第二标记。 该装置的操作参数在曝光之间变化。 测量覆盖误差,并用于根据每次曝光所用参数变化的知识来计算特定于设备的校准数据。

    Rail system and vehicle seat
    2.
    发明授权
    Rail system and vehicle seat 有权
    轨道系统和车辆座椅

    公开(公告)号:US08459605B2

    公开(公告)日:2013-06-11

    申请号:US12514892

    申请日:2007-10-16

    IPC分类号: F16M13/00

    摘要: A rail system for a vehicle seat comprises at least one profiled fitting part and at least one cross member. The cross member is arranged perpendicular to a main direction of travel. The at least one fitting part completely surrounds the cross member. The cross member is able to be moved in relation to the fitting part perpendicular to the main direction of travel. Rolling bodies guide the cross member in the interior of the fitting part, and are arranged between the cross member and the fitting part.

    摘要翻译: 一种用于车辆座椅的轨道系统包括至少一个成形配件部件和至少一个横梁。 横向构件垂直于主要行进方向布置。 至少一个配件部分完全围绕横梁。 横向构件能够相对于垂直于主要行进方向的装配部分移动。 滚动体引导装配部件内部的横向构件,并且布置在横向构件和装配部件之间。

    Antioxidant Test Device
    7.
    发明申请
    Antioxidant Test Device 审中-公开
    抗氧化试验装置

    公开(公告)号:US20120077281A1

    公开(公告)日:2012-03-29

    申请号:US13241158

    申请日:2011-09-22

    IPC分类号: G01N21/78

    摘要: The invention relates to a device for estimating total antioxidant capacity (TAC) of a range of fluids and extracts. More particularly the invention relates to a device where the TAC is measured using lateral flow technology on a solid support. For example, the device may be a test strip.

    摘要翻译: 本发明涉及一种用于估计一系列流体和提取物的总抗氧化能力(TAC)的装置。 更具体地说,本发明涉及一种在固体支持物上使用横向流技术测量TAC的装置。 例如,设备可以是测试条。

    Providing low-level hardware access to in-band and out-of-band firmware
    8.
    发明授权
    Providing low-level hardware access to in-band and out-of-band firmware 失效
    提供对带内和带外固件的低级硬件访问

    公开(公告)号:US08090823B2

    公开(公告)日:2012-01-03

    申请号:US12259942

    申请日:2008-10-28

    IPC分类号: G06F15/173 G06F15/167

    CPC分类号: G06F15/161

    摘要: Illustrative embodiments disclose a data processing system providing low-level hardware access to in-band and out-of-band firmware. The data processing system includes a plurality of chips that includes at least one processor chip and a plurality of support chips. At least one processor chip includes a field replaceable unit support interface master that uses a field replaceable unit support interface serial transmission protocol to communicate with the plurality of support chips. Each one of the plurality of support chips includes a field replaceable unit support interface slave in, with ones of the plurality of chips that include a processor also include the field replaceable unit support interface master, and ones of the plurality of chips that do not include the processor include only the field replaceable unit support interface slave. Only the field replaceable unit support interface master possesses conversion logic.

    摘要翻译: 说明性实施例公开了提供对带内和带外固件的低级硬件访问的数据处理系统。 数据处理系统包括多个芯片,其包括至少一个处理器芯片和多个支持芯片。 至少一个处理器芯片包括使用现场可更换单元支持接口串行传输协议与多个支持芯片进行通信的现场可更换单元支持接口主机。 多个支持芯片中的每一个包括现场可更换单元支持接口从机,其中包括处理器的多个芯片中的一个包括现场可更换单元支持接口主机,以及不包括的多个芯片中的一个 处理器仅包括现场可更换单元支持接口从站。 只有现场可更换单元支持接口主机具有转换逻辑。