摘要:
A lithography tool is calibrated using a calibration substrate having a set of first marks distributed across its surface in a known pattern. The tool is operated to apply a pattern comprising a plurality of second marks at various positions on the substrate, each second mark overlying one of the first marks and being subject to an overlay error dependent on an apparatus-specific deviation. The second marks are applied by multiple exposures while the substrate remains loaded in the tool. An operating parameter of the apparatus is varied between the exposures. An overlay error is measured and used to calculate parameter-specific, apparatus-specific calibration data based on knowledge of the parameter variation used for each exposure.
摘要:
A rail system for a vehicle seat comprises at least one profiled fitting part and at least one cross member. The cross member is arranged perpendicular to a main direction of travel. The at least one fitting part completely surrounds the cross member. The cross member is able to be moved in relation to the fitting part perpendicular to the main direction of travel. Rolling bodies guide the cross member in the interior of the fitting part, and are arranged between the cross member and the fitting part.
摘要:
An analyzer for detecting or quantitating an analyte comprising a temporary storage unit for storing a reagent cassette and a method for presenting a reagent cassette present in a temporary storage unit to a pipetting device are described.
摘要:
In a multiprocessor environment, by executing cache-inhibited reads or writes to registers, a scan communication is used to rapidly access registers inside and outside a chip originating the command. Cumbersome locking of the memory location may be thus avoided. Setting of busy latches at the outset virtually eliminates the chance of collisions, and status bits are set to inform the requesting core processor that a command is done and free of error, if that is the case.
摘要:
The invention relates to a device for estimating total antioxidant capacity (TAC) of a range of fluids and extracts. More particularly the invention relates to a device where the TAC is measured using lateral flow technology on a solid support. For example, the device may be a test strip.
摘要:
Illustrative embodiments disclose a data processing system providing low-level hardware access to in-band and out-of-band firmware. The data processing system includes a plurality of chips that includes at least one processor chip and a plurality of support chips. At least one processor chip includes a field replaceable unit support interface master that uses a field replaceable unit support interface serial transmission protocol to communicate with the plurality of support chips. Each one of the plurality of support chips includes a field replaceable unit support interface slave in, with ones of the plurality of chips that include a processor also include the field replaceable unit support interface master, and ones of the plurality of chips that do not include the processor include only the field replaceable unit support interface slave. Only the field replaceable unit support interface master possesses conversion logic.
摘要:
An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference.