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公开(公告)号：US5592211A
公开(公告)日：1997-01-07
申请号：US396358
申请日：1995-02-28
申请人： Vernon R. Porter , William G. Manns , Anthony B. Wood , Jerry D. Merryman , Don J. Weeks , S. Charles Baber , Thomas C. Penn
发明人： Vernon R. Porter , William G. Manns , Anthony B. Wood , Jerry D. Merryman , Don J. Weeks , S. Charles Baber , Thomas C. Penn
CPC分类号： G03F7/70633 , G02B26/10 , G03F7/704 , G03F7/70641 , G06K15/1204
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译： 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。 缺陷区域可以去放大，以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
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2.发明授权
公开(公告)号：US5322999A
公开(公告)日：1994-06-21
申请号：US960987
申请日：1992-10-13
IPC分类号： B23K26/00 , B23K26/04 , B23K26/06 , G02B5/18 , G02B26/10 , G03F7/20 , H04N1/053 , H04N1/113 , G01D5/30
CPC分类号： G03F7/704 , B23K26/04 , G02B26/105 , G02B5/1876 , H04N1/053 , H04N1/1135 , H04N2201/0471 , H04N2201/04755 , H04N2201/04767 , H04N2201/04791
摘要： A method and apparatus for precise control of a galvanometer patterning system is provided in which a patterning beam (12) is deflected off of a galvanometer mirror (14) toward a work piece (10). The position of the galvanometer mirror (14) is determined by generating a measurement beam (20), transmitting it through a cylinder lens (26) and deflecting it off of the galvanometer mirror (14). The deflected measurement beam (20) is filtered through grating filter (28) having two side-by-side gratings. Light passing through the side-by-side gratings filter (28) is focused on a detector (36) through an anamorphic condenser (32 and 34).
摘要翻译： 提供了一种用于精确控制检流计图案形成系统的方法和装置，其中图案化光束（12）朝向工件（10）偏离电流计反射镜（14）。 电流计反射镜（14）的位置通过产生测量光束（20）来确定，透射通过柱面透镜（26）并将其偏离检流计镜（14）。 偏转的测量光束（20）通过具有两个并排光栅的光栅滤光器（28）进行滤光。 穿过并排光栅滤光器（28）的光通过变形冷凝器（32和34）聚焦在检测器（36）上。
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公开(公告)号：US4912487A
公开(公告)日：1990-03-27
申请号：US173775
申请日：1988-03-25
CPC分类号： G03F7/70633 , B23K26/0853 , G01N21/956 , G03F7/704 , G03F7/70641 , G03F7/70725 , G01N21/9501
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译： 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。 缺陷区域可以去放大，以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
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公开(公告)号：US6140243A
公开(公告)日：2000-10-31
申请号：US988570
申请日：1997-12-11
IPC分类号： H01L21/302 , H01L21/02 , H01L21/027 , H01L21/304 , H01L21/3065 , H01L21/3105 , H01L21/321 , H01L21/3213 , H01L21/768 , H01L21/311
CPC分类号： H01L21/02068 , H01L21/02063 , H01L21/02071 , H01L21/3105 , H01L21/321 , H01L21/32136
摘要： An integrated circuit fabrication process in which residual fluorine contamination on metal surfaces after ashing is removed by exposure to an NH.sub.3 /O.sub.2 plasma.
摘要翻译： 集成电路制造工艺，其中通过暴露于NH 3 / O 2等离子体去除灰化后金属表面上的残留氟污染。
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公开(公告)号：US06437332B1
公开(公告)日：2002-08-20
申请号：US09841772
申请日：2001-04-24
IPC分类号： B29D1100
摘要： A method uses an infrared imaging system to produce an image of a scene. Actual infrared radiation from the scene is detected to form a biased signal representing the radiances of objects wiithin the scene, and the biased signal is diffracted by causing rays of the radiation to pass through an array of lenslets at angles devitated from their normal path. The array includes an infrared transmissive deformable film which retains a pattern stamped into it, the pattern including a plurality of the diffracting lenslets. The diffracted and defocused radiation is detected to form a reference signal, the reference signal is subtracted from the biased signal to obtain an unbiased signal, and an image is generated and displayed in reponse to the unbiased signal.
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公开(公告)号：US06232044B1
公开(公告)日：2001-05-15
申请号：US08159879
申请日：1993-11-30
IPC分类号： B29D1100
CPC分类号： G02B26/04
摘要： A chopper and method of making same, the chopper being fabricated by initially generating a photomask in conjunction with software. The software provides the lens design to be finally stamped onto the chopper element. A silicon wafer is then etched by reactive ion etching using the photomask to provide the pattern and resulting in a silicon wafer master of the chopper pattern with regions in the shape oflenslets to be formed of desired dimension. The chopper pattern on the silicon wafer is then replicated with a hard material which can be easily stripped from the silicon wafer without damaging either the wafer or the hard material, preferably deposited nickel. The separated nickel replication is then used in conjunction with a heavy press to stamp out sheets of an infrared transmissive flexible film, preferably polyethylene, with the lens pattern in the replication The film with the lens pattern thereon is the chopper element. The system is designed to operate in the 8 to 13.5 micron range. While the software is designed for an individual lens, each lens is preferably in the shape of a hexagon with a plurality of such hexagons positioned on the film in a predetermined pattern, preferably that of an involute or spiral. The chopper is designed for rotation about its central axis.
摘要翻译： 一种斩波器及其制造方法，通过最初与软件一起生成光掩模来制造斩波器。 该软件提供镜头设计，最终加盖到斩波器元件上。 然后通过使用光掩模的反应离子蚀刻来蚀刻硅晶片以提供图案，并产生切割器图案的硅晶片母版，其形状为具有期望尺寸的形状的区域。 然后用硬质材料复制硅晶片上的斩波器图案，硬质材料可以容易地从硅晶片剥离，而不损坏晶片或硬质材料，优选沉积的镍。 然后将分离的镍复制物与重型压机结合使用以将复制中的透镜图案的红外透射柔性膜（优选聚乙烯）的片材压印出来，其上具有透镜图案的膜是斩波器元件。系统被设计 在8至13.5微米范围内工作。 虽然软件被设计用于单独的透镜，但是每个透镜优选地是六边形的形状，其中多个这样的六边形以预定图案优选地以渐开线或螺旋形的方式定位在膜上。 斩波器设计用于围绕其中心轴线旋转。
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