公开(公告)号：US5322999A

公开(公告)日：1994-06-21

申请号：US960987

申请日：1992-10-13

Applicant: Jerry D. Merryman ,  S. Charles Baber

Inventor： Jerry D. Merryman ,  S. Charles Baber

IPC: B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  G02B5/18 ,  G02B26/10 ,  G03F7/20 ,  H04N1/053 ,  H04N1/113 ,  G01D5/30

CPC classification number: G03F7/704 ,  B23K26/04 ,  G02B26/105 ,  G02B5/1876 ,  H04N1/053 ,  H04N1/1135 ,  H04N2201/0471 ,  H04N2201/04755 ,  H04N2201/04767 ,  H04N2201/04791

Abstract: A method and apparatus for precise control of a galvanometer patterning system is provided in which a patterning beam (12) is deflected off of a galvanometer mirror (14) toward a work piece (10). The position of the galvanometer mirror (14) is determined by generating a measurement beam (20), transmitting it through a cylinder lens (26) and deflecting it off of the galvanometer mirror (14). The deflected measurement beam (20) is filtered through grating filter (28) having two side-by-side gratings. Light passing through the side-by-side gratings filter (28) is focused on a detector (36) through an anamorphic condenser (32 and 34).

Abstract translation: 提供了一种用于精确控制检流计图案形成系统的方法和装置，其中图案化光束（12）朝向工件（10）偏离电流计反射镜（14）。 电流计反射镜（14）的位置通过产生测量光束（20）来确定，透射通过柱面透镜（26）并将其偏离检流计镜（14）。 偏转的测量光束（20）通过具有两个并排光栅的光栅滤光器（28）进行滤光。 穿过并排光栅滤光器（28）的光通过变形冷凝器（32和34）聚焦在检测器（36）上。

公开(公告)号：US5592211A

公开(公告)日：1997-01-07

申请号：US396358

申请日：1995-02-28

Applicant: Vernon R. Porter ,  William G. Manns ,  Anthony B. Wood ,  Jerry D. Merryman ,  Don J. Weeks ,  S. Charles Baber ,  Thomas C. Penn

Inventor： Vernon R. Porter ,  William G. Manns ,  Anthony B. Wood ,  Jerry D. Merryman ,  Don J. Weeks ,  S. Charles Baber ,  Thomas C. Penn

IPC: G02B26/10 ,  G03F7/20 ,  G06K15/12 ,  B41J15/16

CPC classification number: G03F7/70633 ,  G02B26/10 ,  G03F7/704 ,  G03F7/70641 ,  G06K15/1204

Abstract: A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.

Abstract translation: 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。 缺陷区域可以去放大，以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。

公开(公告)号：US4145656A

公开(公告)日：1979-03-20

申请号：US791253

申请日：1977-04-27

Applicant: Jerry D. Merryman ,  Michael J. Cochran ,  Edward R. Caudel

Inventor： Jerry D. Merryman ,  Michael J. Cochran ,  Edward R. Caudel

IPC: H03D1/24 ,  H03D7/00 ,  H03H15/02 ,  H03H17/00 ,  H03L7/091 ,  H03L7/18 ,  H03L7/183 ,  H04B1/40 ,  H04W84/00 ,  H04B1/38

CPC classification number: H04W84/00 ,  H03D1/24 ,  H03D7/00 ,  H03H15/02 ,  H03L7/091 ,  H03L7/183 ,  H04B1/40

Abstract: A transceiver receives electronic input signals comprised of a plurality of frequency bands lying within a plurality of non-overlapping frequency channels. A mixer frequency shifts a selected band to a predetermined center frequency in response to a first clocking signal of a first selectable frequency. A charge transfer device filter is coupled to the mixer output to filter the band of the predetermined center frequency in response to a second selectable frequency clocking signal. The clocking signals are generated by clocking means which receive digital microcommands identifying the selectable frequencies. Signal level measuring means are coupled to the output of the charge transfer device filter and generate digital level signals indicating the signal level present in the filtered band. Microprocessor means are coupled to send microcommands to the clocking means for sequentially filtering various channels from the plurality, and for monitoring the resulting digital level signals.

Abstract translation: 收发机接收由位于多个非重叠频率信道内的多个频带组成的电子输入信号。 混频器响应于第一可选择频率的第一时钟信号将所选频带移位到预定的中心频率。 电荷转移装置滤波器耦合到混频器输出端，以响应于第二可选频率时钟信号对预定中心频率的频带进行滤波。 时钟信号由接收识别可选择频率的数字微型命令的计时装置产生。 信号电平测量装置耦合到电荷转移装置滤波器的输出，并产生指示滤波频带中存在的信号电平的数字电平信号。 微处理器装置被耦合以将微指令发送到时钟装置，用于顺序地从多个通道中滤除各种通道，并用于监视所得到的数字电平信号。

公开(公告)号：US5018210A

公开(公告)日：1991-05-21

申请号：US173778

申请日：1988-03-25

Applicant: Jerry D. Merryman ,  Thomas C. Penn ,  William G. Manns ,  Don J. Weeks ,  Anthony B. Wood

Inventor： Jerry D. Merryman ,  Thomas C. Penn ,  William G. Manns ,  Don J. Weeks ,  Anthony B. Wood

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G03F7/70616 ,  G06T2207/20021 ,  G06T2207/30141 ,  G06T2207/30148

Abstract: A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.

Abstract translation: 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。 缺陷区域可以去放大，以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。

公开(公告)号：US5027132A

公开(公告)日：1991-06-25

申请号：US401586

申请日：1989-08-31

Applicant: William G. Manns ,  Don J. Weeks ,  Jerry D. Merryman ,  Chyi N. Sheng

Inventor： William G. Manns ,  Don J. Weeks ,  Jerry D. Merryman ,  Chyi N. Sheng

IPC: G03F7/20 ,  H04N1/047 ,  H04N1/10

CPC classification number: G03F7/70633 ,  G03F7/704 ,  G03F7/70641 ,  G03F7/70725 ,  H04N1/047 ,  H04N1/10 ,  H04N2201/0426 ,  H04N2201/0436 ,  H04N2201/04729 ,  H04N2201/04786

Abstract: A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data decription is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.

Abstract translation: 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。 缺陷区域可以去放大，以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。

公开(公告)号：US4886958A

公开(公告)日：1989-12-12

申请号：US173707

申请日：1988-03-25

Applicant: Jerry D. Merryman ,  Vernon R. Porter

Inventor： Jerry D. Merryman ,  Vernon R. Porter

IPC: G02B26/10 ,  G03F1/84 ,  G03F7/20 ,  G03F7/207

CPC classification number: G03F1/84 ,  G02B26/10 ,  G03F7/704 ,  G03F7/70641 ,  G03F7/70725

Abstract: A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. An autofocus keeps the scanning laser beam in focus on the target. The autofocus system includes an objective lens assembly through which a first laser beam is directed onto a writing surface, an autofocus laser which is detected by a photodetector after it is reflected from the surface of a target, and a linear magnetic motor for moving a lens in the objective lens assembly to keep the first laser beam focused on the writing surface.

Abstract translation: 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 自动对焦将扫描激光束保持在目标上。 自动对焦系统包括物镜组件，第一激光束通过该物镜组件被引导到书写表面上;自动对焦激光器，由光电检测器在从靶表面反射之后检测;以及线性磁电机，用于移动透镜 在物镜组件中保持第一激光束聚焦在书写表面上。