摘要:
A method of manufacturing an MRAM device includes sequentially forming a first insulating interlayer and an etch-stop layer on a substrate. A lower electrode is formed through the etch-stop layer and the first insulating interlayer. An MTJ structure layer and an upper electrode are sequentially formed on the lower electrode and the etch-stop layer. The MTJ structure layer is patterned by a physical etching process using the upper electrode as an etching mask to form an MTJ structure at least partially contacting the lower electrode. The first insulating interlayer is protected by the etch-stop layer so not to be etched by the physical etching process.
摘要:
The inventive concepts provide a method for forming a hard mask pattern. The method includes forming a hard mask layer on an etch target layer disposed on a substrate, forming a photoresist pattern having an opening exposing one region of the hard mask layer, performing an oxygen ion implantation process on the one region using the photoresist pattern as a mask to form an oxidized portion in the one region, and patterning the hard mask layer using the oxidized portion as an etch mask.
摘要:
A polymerase chain reaction (“PCR”) apparatus includes a PCR chip holder which accommodates and supports a PCR chip, a housing which supports ends of the PCR chip holder, a temperature control element which moves perpendicularly with respect to the PCR chip holder in a space between the housing and the PCR chip holder in the housing, and an elastic unit which elastically biases the temperature control element toward the PCR chip holder, between the temperature control element and the housing. The temperature control element includes a top surface which is selectively contacted to a bottom surface of the PCR chip.
摘要:
Provided herein are microfluidic devices that can be used as a 3D bioassay, e.g., for drug screening, personalized medicine, tissue engineering, wound healing, and other applications. The device has a series of channels {e.g., small fluid channels) in a small polymer block wherein one or more of the channels can be filled with a biologically relevant gel, such as collagen, which is held in place by posts. As shown herein, when the device is plated with cells such as endothelial cells, new blood vessels grow in the gel, which is thick enough for the cells to grow in three dimensions. Other channels, e.g., fluid channels, allow drugs or biological material to be exposed to the 3D cell growth. Cells, such as endothelial cells, can be cultured and observed as they grow on the surface of a 3D gel scaffold, where e.g., rates of angiogenesis can be measured, as well as intervascularization and extravascularization of cancerous cells.
摘要:
A method of manufacturing an active matrix electrochromic device includes preparing a first substrate including a thin film transistor including a gate electrode, a source electrode, and a drain electrode, and a pixel electrode electrically connected to the drain electrode. An electrochromic layer is formed on the pixel electrode by an electrophoretic process which includes immersing the first substrate and a mesh spaced apart from each other in a solution. While the first substrate is immersed in the solution so that the pixel electrode is soaked therein, a channel of the thin film transistor is opened by applying a voltage to the gate electrode, a potential difference between the pixel electrode and the mesh is generated by connecting a voltage source between a terminal electrically connected to the source electrode and the mesh, and materials in the solution are deposited on the pixel electrode, thereby forming the electrochromic semiconductor layer.
摘要:
An apparatus for receiving optical signals in DQPSK and method of controlling a phase offset in receiving optical signals for DQPSK is provided. An original optical signal modulated in DQPSK is received. The original optical signal is delayed by one bit to make a delay optical signal such that an interference on the original optical signal and the delay optical signal is performed. A control signal is generated by use of an interference result between the original optical signal and the delay optical signal. A phase offset for the interference between the original optical signal and the delay optical signal is controlled by use of the generated control signal. In receiving optical signals, the phase offset between the delay optical signal and the original optical signal is precisely controlled, thereby optimizing the transfer characteristics of an optical delay interferometer.
摘要:
A gene analysis device including an illumination optical system radiating exciting light onto a sample solution; a microfluidic device for forming a bio-reaction space of the sample solution and including at least one micro-chamber in which a reflection pattern is formed; and a detection optical system for detecting a fluorescence signal generated by a bio-reaction in the micro-chamber and comprising a photodetector.
摘要:
Provided is an optical network in which a wavelength division multiplexing-based optical transmission scheme is implemented. An apparatus for cross-connecting an optical path includes a path switch including a plurality of input terminals receiving optical signals from other nodes, and a plurality of output terminals sending the optical signals to the other nodes, the path switch switching the path of the optical signal so that the optical signal input via one of the input terminals is output to one of the output terminals; and a wavelength converter converting a wavelength of the optical signal input via the input terminal and outputting the wavelength-converted optical signal to the output terminal according to a switching result of the path switch. Thus, inefficient use of a network resource due to wavelength collision can be prevented, the path can be automatically cross-connected and thus quickly established, path switching and branch combination can be performed irrespective of wavelength, and switching can be performed irrespective of direction.
摘要:
Disclosed is a routing method and apparatus for providing a different path by service. The routing method includes determining a service identification (ID) indicating a service requested by a packet by using a header in the packet; and searching for a service forwarding table corresponding to the service ID from a plurality of service forwarding tables storing different next hops by service and determining the packet's next hop.
摘要:
Disclosed are a digital equalization apparatus for a coherent optical receiver and a digital equalization method for a coherent optical receiver, capable of compensating for chromatic dispersion and polarization impairment through a digital signal processing, and capable of performing a clock recovery and a data recovery through a digital symbol synchronization. The digital equalization apparatus and the method compensate for various impairments occurring on an optical path in a digital manner and achieve synchronization through a simple structure.