公开(公告)号：US5159513A

公开(公告)日：1992-10-27

申请号：US652852

申请日：1991-02-08

申请人： Bernard Dieny ,  Bruce A. Gurney ,  Serhat Metin ,  Stuart S. P. Parkin ,  Virgil S. Speriosu

发明人： Bernard Dieny ,  Bruce A. Gurney ,  Serhat Metin ,  Stuart S. P. Parkin ,  Virgil S. Speriosu

IPC分类号： G01R33/09 ,  G11B5/39 ,  H01F10/08 ,  H01F10/16 ,  H01F10/32 ,  H01L43/10

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/3903 ,  H01F10/3268 ,  H01F10/3281 ,  H01L43/10 ,  G11B2005/3996

摘要： A magnetoresistive (MR) sensor comprising a layered structure formed on a substrate includes a first and a second thin film layer of magnetic material separated by a thin film layer of non-magnetic metallic material such as Cu, Au, or Ag, with at least one of the layers of ferromagnetic material formed of either cobalt or a cobalt alloy. The magnetization direction of the first ferromagnetic layer, at zero applied field, is set substantially perpendicular to the magnetization direction of the second ferromagnetic layer which is fixed in position. A current flow is produced through the sensor, and the variations in voltage across the MR sensor are sensed due to the changes in resistance produced by rotation of the magnetization in the front layer of ferromagnetic material as a function of the magnetic field being sensed.

公开(公告)号：US5705287A

公开(公告)日：1998-01-06

申请号：US309274

申请日：1994-09-20

申请人： Mary Frances Doerner ,  James Harvey Kaufman ,  Serhat Metin ,  Seyyed Mohammad Taghi Mirzamaani ,  Anthony Wai Wu

发明人： Mary Frances Doerner ,  James Harvey Kaufman ,  Serhat Metin ,  Seyyed Mohammad Taghi Mirzamaani ,  Anthony Wai Wu

IPC分类号： G11B5/66 ,  G11B5/64 ,  G11B5/72 ,  G11B5/73 ,  G11B5/738 ,  G11B5/84 ,  G11B5/70

CPC分类号： G11B5/7325 ,  G11B5/72 ,  G11B5/8404

摘要： A thin film cobalt alloy magnetic recording disk has a metal nitride layer located between the disk substrate and the top surface of the disk to provide texturing of the disk at the head-disk interface. The texturing layer is made up of generally contiguous clusters of aluminum nitride (AlN) with rounded upper surfaces that are formed on top of the substrate and under the conventional Cr underlayer. The AlN texturing layer is formed by sputtering an Al target in the presence of N.sub.2 gas. The subsequently sputter-deposited Cr underlayer, cobalt alloy magnetic layer and protective amorphous carbon overcoat replicate the upper surface of the contiguous AlN clusters, resulting in a textured surface at the head-disk interface. The AlN texturing layer may also be sputter deposited above the magnetic layer in the middle of the protective carbon overcoat. The density and size of the AlN clusters in the texturing layer, and thus the texture of the completed disk at the head-disk interface, are controlled by the amount of N.sub.2, the sputtering power and pressure, and the substrate temperature.

摘要翻译： 薄膜钴合金磁记录盘具有位于盘基板和盘顶部之间的金属氮化物层，以在磁头 - 磁盘接口处提供盘的纹理化。 纹理层由通常连续的氮化铝（AlN）簇组成，其具有圆形的上表面，其形成在衬底的顶部和在常规Cr底层下方。 AlN纹理层通过在N 2气体存在下溅射Al靶而形成。 随后溅射沉积的Cr底层，钴合金磁性层和保护性无定形碳外涂层复制邻接的AlN簇的上表面，导致在磁头 - 磁盘界面处的纹理表面。 AlN纹理层也可以在保护性碳覆盖层中间的磁性层上方溅射沉积。 纹理层中的AlN簇的密度和尺寸以及由此在磁头 - 磁盘接口处完成的磁盘的纹理受到N2的量，溅射功率和压力以及衬底温度的控制。

公开(公告)号：US06662432B2

公开(公告)日：2003-12-16

申请号：US09753823

申请日：2001-01-02

申请人： Hamid Balamane ,  Dwight Cornwell, Jr. ,  Hardayal Singh Gill ,  Serhat Metin ,  Mustafa Pinarbasi

发明人： Hamid Balamane ,  Dwight Cornwell, Jr. ,  Hardayal Singh Gill ,  Serhat Metin ,  Mustafa Pinarbasi

IPC分类号： G11B5127

CPC分类号： B82Y10/00 ,  G11B5/3903 ,  G11B5/3967 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49067

摘要： A free layer for a spin valve sensor includes a cobalt iron (CoFe) film which has an easy axis oriented perpendicular to an air bearing surface (ABS) of a read head and a nickel iron (NiFe) film which has an easy axis oriented parallel to the ABS and parallel to the major planes of the thin film layers. In a further embodiment the free layer is annealed at a high temperature in the presence of a field which is oriented perpendicular to the ABS.

摘要翻译： 用于自旋阀传感器的自由层包括钴铁（CoFe）膜，其具有垂直于读取头的空气轴承表面（ABS）和镍铁（NiFe）膜垂直取向的易磁化轴，其易于轴取向平行 并且平行于薄膜层的主平面。 在另一个实施方案中，自由层在垂直于ABS的场的存在下在高温下退火。

公开(公告)号：US06306266B1

公开(公告)日：2001-10-23

申请号：US09574682

申请日：2000-05-17

申请人： Serhat Metin ,  Mustafa Pinarbasi ,  Patrick Rush Webb

发明人： Serhat Metin ,  Mustafa Pinarbasi ,  Patrick Rush Webb

IPC分类号： C23C1434

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3903 ,  G11B5/3967 ,  G11B2005/3996

摘要： A method constructs first and second seed layers of a seed layer structure in-situ for a top spin valve sensor for increasing magnetoresistive coefficient dr/R of the sensor, reducing a ferromagnetic coupling field HFC between pinned and free layers of the sensor and reducing coercivity HC of the free layer. The first layer, which is aluminum oxide (Al2O3), is ion beam sputter deposited on a first shield layer in a sputtering chamber under a specified pressure. The second seed layer, which is nickel oxide based, is deposited on the first seed layer by ion beam sputter deposition without breaking the vacuum of the chamber. The free layer is then directly deposited on the second seed layer followed by formation of the remainder of the layers of the spin valve sensor. In one embodiment of the invention a read gap layer and the first seed layer are located between a first shield layer and the second seed layer while in the second embodiment of the invention the first seed layer is the only layer between the first shield layer and the second seed layer.

摘要翻译： 一种方法为顶部自旋阀传感器原位构建种子层结构的第一种子层和第二种子层，用于增加传感器的磁阻系数dr / R，从而减小传感器的固定层和自由层之间的铁磁耦合场HFC，并降低矫顽力 HC的自由层。 作为氧化铝（Al 2 O 3）的第一层是在特定压力下溅射沉积在溅射室中的第一屏蔽层上的离子束。 基于氧化镍的第二种子层通过离子束溅射沉积而沉积在第一籽晶层上，而不破坏室的真空。 然后将自由层直接沉积在第二种子层上，随后形成自旋阀传感器的其余层。 在本发明的一个实施例中，读间隙层和第一种子层位于第一屏蔽层和第二种子层之间，而在本发明的第二实施例中，第一种子层是第一屏蔽层和第二屏蔽层之间的唯一层 第二种子层。

公开(公告)号：US5569506A

公开(公告)日：1996-10-29

申请号：US132543

申请日：1993-10-06

申请人： Christopher V. Jahnes ,  James H. Kaufman ,  Serhat Metin ,  Mohammad T. Mirzamaani ,  Anthony W. Wu

发明人： Christopher V. Jahnes ,  James H. Kaufman ,  Serhat Metin ,  Mohammad T. Mirzamaani ,  Anthony W. Wu

IPC分类号： C23C14/16 ,  C23C14/54 ,  C23C16/00 ,  C23C16/26 ,  G11B5/72 ,  G11B5/73 ,  B32B3/02 ,  B32B9/00 ,  G11B5/66

CPC分类号： G11B5/7325 ,  C23C14/165 ,  C23C14/541 ,  C23C16/003 ,  C23C16/26 ,  G11B5/72 ,  Y10S360/90 ,  Y10S428/90 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30

摘要： A thin film metal alloy magnetic recording disk has an improved protective overcoat that creates a low level of static friction in a contact start/stop disk drive. The disk has an amorphous carbon overcoat containing a transition liquid metal interlayer (TLMI). The carbon overcoat is formed by depositing an initial amorphous carbon layer to a first thickness, then depositing an interlayer material of a low-melting point metal or metal alloy (such as In or In--Nb) while maintaining the temperature of the disk substrate above the melting point of the interlayer material, and then depositing a top additional layer of amorphous carbon. Because the initial carbon layer presents a nonwetting surface, the interlayer material "balls up" on the carbon and forms discontinuous spheres of the interlayer material. The additional top layer of carbon bonds to the initial carbon layer and to the metal or metal alloy spheres. The completed disk protective overcoat presents a continuous but textured surface of amorphous carbon for the head-disk interface in the disk drive.

摘要翻译： 薄膜金属合金磁记录盘具有改进的保护外涂层，在接触启动/停止磁盘驱动器中产生低水平的静摩擦力。 盘具有含有过渡液态金属中间层（TLMI）的无定形碳外涂层。 通过将初始无定形碳层沉积到第一厚度，然后沉积低熔点金属或金属合金（例如In或In-Nb）的中间层材料，同时将盘基底的温度保持在上方而形成碳覆盖层 中间层材料的熔点，然后沉积顶层附加的无定形碳层。 由于初始碳层呈现不润湿表面，所以中间层材料在碳上“起球”并形成中间层材料的不连续球体。 附加的顶层碳键到初始碳层和金属或金属合金球体。 完成的磁盘保护外套为磁盘驱动器中的磁头 - 磁盘接口呈现无定形碳的连续但有纹理的表面。