Method of determining movement sequence, alignment apparatus, method and apparatus of designing optical system, and medium in which program realizing the designing method
    3.
    发明申请
    Method of determining movement sequence, alignment apparatus, method and apparatus of designing optical system, and medium in which program realizing the designing method 审中-公开
    确定移动顺序的方法,对准装置,设计光学系统的方法和装置以及实现设计方法的程序的介质

    公开(公告)号:US20070011112A1

    公开(公告)日:2007-01-11

    申请号:US11386707

    申请日:2006-03-23

    IPC分类号: G06N3/12

    摘要: A determining method of movement sequence and a positioning apparatus of the invention are arranged in such a manner that, in order to measure positions of plural marks as being measurement targets provided on a wafer within a shorter time, a group including executable movement sequences is generated out of a group of movement sequence candidates, each indicating a measurement order of these marks, and a movement sequence that accomplishes a movement operation between the marks within the shortest time is obtained from the group thus generated. For efficiently searching an optical system as a globally optimal solution within a shorter computation time, independently of an initial solution given, a designing method of optical system of the invention obtains the optimal solution of the optical system to be designed, using an evolutionary computation method (genetic algorithm) having a genetic operator for handling continuous values explicitly.

    摘要翻译: 本发明的移动顺序的确定方法和定位装置被布置成为了在短时间内测量作为设置在晶片上的测量对象的多个标记的位置,生成包括可执行移动序列的组 从指示这些标记的测量顺序的运动序列候选组中,从由此生成的组获得在最短时间内完成标记之间的移动操作的移动顺序。 为了在更短的计算时间内有效地将光学系统搜索为全局最优解,独立于给定的初始解决方案,本发明的光学系统的设计方法使用进化计算方法获得要设计的光学系统的最优解 (遗传算法)具有明确处理连续值的遗传算子。

    Method of determining movement sequence, alignment apparatus, method and apparatus of designing optical system, and medium in which program realizing the designing method
    4.
    发明授权
    Method of determining movement sequence, alignment apparatus, method and apparatus of designing optical system, and medium in which program realizing the designing method 失效
    确定移动顺序的方法,对准装置,设计光学系统的方法和装置以及实现设计方法的程序的介质

    公开(公告)号:US06885908B2

    公开(公告)日:2005-04-26

    申请号:US09900016

    申请日:2001-07-09

    IPC分类号: G03F7/20 G03F9/00 G06F19/00

    摘要: A determining method of movement sequence and a positioning apparatus of the invention are arranged in such a manner that, in order to measure positions of plural marks as being measurement targets provided on a wafer within a shorter time, a group including executable movement sequences is generated out of a group of movement sequence candidates, each indicating a measurement order of these marks, and a movement sequence that accomplishes a movement operation between the marks within the shortest time is obtained from the group thus generated.For efficiently searching an optical system as a globally optimal solution within a shorter computation time, independently of an initial solution given, a designing method of optical system of the invention obtains the optimal solution of the optical system to be designed, using an evolutionary computation method (genetic algorithm) having a genetic operator for handling continues values explicitly. Particularly, from a partial space defined by a predetermined continuous occurrence probability distribution of occurrence probabilities set based on parent individuals, child individuals to be candidates in the next generation population are generated according to the occurrence probabilities.

    摘要翻译: 本发明的移动顺序的确定方法和定位装置被布置成为了在短时间内测量作为设置在晶片上的测量对象的多个标记的位置,生成包括可执行移动序列的组 从指示这些标记的测量顺序的运动序列候选组中,从由此生成的组获得在最短时间内完成标记之间的移动操作的移动顺序。 为了在更短的计算时间内有效地将光学系统搜索为全局最优解,独立于给定的初始解决方案,本发明的光学系统的设计方法使用进化计算方法获得要设计的光学系统的最优解 (遗传算法)具有用于处理的遗传算子继续显着地显示值。 特别地,根据基于父母个体设定的发生概率的预定连续发生概率分布定义的部分空间,根据发生概率生成下一代群体中候选人的子个体。

    Pile fabric with non-mushroom shaped cut ends
    5.
    发明授权
    Pile fabric with non-mushroom shaped cut ends 失效
    具有非蘑菇形切割端的绒面料

    公开(公告)号:US4539242A

    公开(公告)日:1985-09-03

    申请号:US617593

    申请日:1984-06-05

    IPC分类号: D03D27/00 D04B1/02 B32B3/02

    摘要: A cut pile fabric such as a velvet composed of a synthetic fiber pile having deep color shade and smooth touch on its pile surface, the piles thereof having non-mushroom shaped cut ends at their tip portions, defined by the equation d.sub.1 /d.sub.2 .ltoreq.1.3, where d.sub.1 is the maximum diameter of the tip portion and d.sub.2 is a diameter of the remaining portion of the piles. The pile fabric is obtained by utilizing, as a pile yarn, a synthetic yarn having a breakage strength of less than 2.8 g/De, a primary yielding strength of more than 1.2 g/De, a breakage elongation of less than 50%, and a primary yielding elongation of less than 10%. Such synthetic yarn can advantageously be prepared by a crystallization drawing process.

    摘要翻译: 一种切绒绒织物,例如由绒毛表面深色和平滑接触的合成纤维绒绒构成的绒布,其绒头在其尖端处具有非蘑菇形的切割端,由等式d1 / d2 < = 1.3,其中d1是尖端部分的最大直径,d2是桩的剩余部分的直径。 绒头织物通过利用断裂强度小于2.8g / De,初级屈服强度大于1.2g / De,断裂伸长率小于50%的合成纱线作为绒头纱线获得,以及 初级屈服伸长率小于10%。 这种合成纱可以有利地通过结晶拉伸法制备。

    Hollow fiber fabric and process for producing the same
    6.
    发明授权
    Hollow fiber fabric and process for producing the same 失效
    中空纤维织物及其制造方法

    公开(公告)号:US5604012A

    公开(公告)日:1997-02-18

    申请号:US505356

    申请日:1995-08-30

    摘要: A hollow fiber fabric comprising hollow fibers having a high hollowness ratio of at least 20% and composed of a polymer of a single composition, and the hollow fibers having slits as traces of a removed polymer and the slits being formed in the longitudinal direction of the fibers in such a state that the slits communicate to hollow portions. The fabric is produced by treating a fabric comprising hollow fibers having a high hollowness ratio of at least 20% and composed of a polymer of a single composition with a solvent or solution which dissolves the polymer, to partially dissolve the polymer at low orientation and/or deformation strain concentrated portions, to form slits as traces of a removed polymer in such a state that the slits communicate to hollow portions, along the longitudinal direction of the hollow fibers.

    摘要翻译: PCT No.PCT / JP95 / 00009 Sec。 371日期:1995年8月30日 102(e)1995年8月30日PCT PCT 1995年1月9日PCT公布。 WO95 / 19461 PCT出版物 日期1995年7月20日一种中空纤维织物,其中空纤维具有至少20%的高中空比,由单一组合物的聚合物组成,中空纤维具有狭缝作为除去聚合物的痕迹,并且狭缝形成于 在狭缝与中空部分连通的状态下的纤维的纵向方向。 该织物是通过将含有至少20%的高中空纤维的中空纤维和由单一组合物的聚合物与溶解聚合物的溶剂组成的织物,以低取向部分溶解和/ 或变形应变集中部分,以沿着中空纤维的纵向方向在狭缝与中空部分连通的状态下形成狭缝作为去除的聚合物的痕迹。

    Stainproof polyester fiber
    7.
    发明授权
    Stainproof polyester fiber 失效
    防水涤纶纤维

    公开(公告)号:US4745142A

    公开(公告)日:1988-05-17

    申请号:US918008

    申请日:1986-10-10

    摘要: A polyester fiber having a superior stainproof property comprises at least one fiber-forming polyester copolymer comprising a backbone polyester polymer and at least one type of terminal substituent which blocks at least some of the terminals of the molecules of the backbone polyester polymer and which substituent consists of a polyoxyalkyleneglycol monoether group of the formula (I):R.sup.1 -O--R.sup.2 -O.sub.n (I)wherein R.sup.1 is a monovalent organic radical free from active hydrogen atom, R.sup.2 is an alkylene radical, and n is an integer of 2 or more.

    摘要翻译: 具有优异防污性能的聚酯纤维包括至少一种纤维形成聚酯共聚物,其包含主链聚酯聚合物和至少一种类型的末端取代基,其阻断主链聚酯聚合物分子的至少一些末端,并且该取代基组成 的式(I)的聚氧亚烷基二醇单醚:R1-O-R2-On(Ⅰ)其中R1是不含活性氢原子的一价有机基团,R2是亚烷基,_n是2以上的整数 。

    Process for the preparation of woven fabrics of low air permeability
    8.
    发明授权
    Process for the preparation of woven fabrics of low air permeability 失效
    制备低透气性织造织物的方法

    公开(公告)号:US4445903A

    公开(公告)日:1984-05-01

    申请号:US488855

    申请日:1983-04-26

    CPC分类号: D06P3/8214

    摘要: A process for the preparation of a woven fabric of low air permeability which comprises preparing a woven fabric by use of a composite fiber of a splitting and severing type, which consists of polyester and polyamide and produces extremely fine fibers of 0.001 to 0.8 denier size, as a warp and/or a weft; treating thus obtained woven fabric by use of an aqueous emulsion of a swelling agent for polyester and nylon under the conditions where nylon is mainly allowed to swell and then shrink; scouring and dyeing the woven fabric; and after calendering the woven fabric with the use of heated rollers rotated under pressure.

    摘要翻译: 一种制备低透气性的织物的方法,其包括使用由聚酯和聚酰胺组成的分离和切断型复合纤维制备机织物,并产生0.001至0.8旦尼尔尺寸的极细纤维, 作为经纱和/或纬纱; 在尼龙主要膨胀然后收缩的条件下,使用聚酯和尼龙的溶胀剂的水性乳液处理如此得到的织物; 洗涤和染色织物; 并且在使用在压力下旋转的加热辊压光机织物之后。