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公开(公告)号：US4855637A
公开(公告)日：1989-08-08
申请号：US155813
申请日：1988-02-16
摘要： An impregnated cathode comprising a cathode obtained by impregnating pore portions of a refractory porous substrate with an electron emissive material containing Ba and formed thereon a plurality of thin films made of a high melting metal and Sc, or a high melting metal and a Sc oxide, or a high melting metal, Sc and a Sc oxide, or a high melting metal and a compound of Sc, W and O, said thin films having the same composition but different densities can maintain good emission characteristics even after the sealing off step of tube production because the thin films formed on the cathode surface are oxidation-resistant.
摘要翻译： 一种浸渍阴极，其包括通过用含有Ba的电子发射材料浸渍耐火多孔基材的孔部分并在其上形成多个由高熔点金属和Sc或高熔点金属和Sc氧化物制成的薄膜而得到的阴极， 或高熔点金属Sc和Sc氧化物，或高熔点金属和Sc，W和O的化合物，所述具有相同组成但密度不同的薄膜即使在管的密封步骤之后仍能保持良好的发射特性 因为在阴极表面上形成的薄膜是抗氧化的。
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公开(公告)号：US4193013A
公开(公告)日：1980-03-11
申请号：US897406
申请日：1978-04-18
摘要： A cathode for an electron source according to this invention comprises an emitter tip made of an electron emissive material, a filament for holding the emitter tip, and a binder for binding the emitter tip and the filament, the filament and the binder being made of glassy carbon. The binder can have a carbide or boride powder incorporated therein. The cathode according to this invention can be produced by using a thermosetting resin of predetermined shape as the starting material of the filament, fixing the emitter tip to a predetermined position of the thermosetting resin with the adhesive agent made of the raw thermosetting resin, and heating the resultant assembly in a non-oxidizing atmosphere to carbonize the resinous portions. This cathode is structurally very simple. Moreover, the adhesion between the filament and the emitter tip is excellent, and the emitter tip can be heated to high temperatures above 2,000.degree. C. by causing current to flow through the cathode.
摘要翻译： 根据本发明的用于电子源的阴极包括由电子发射材料制成的发射极尖端，用于保持发射极尖端的灯丝和用于结合发射极尖端和灯丝的粘合剂，灯丝和粘合剂由玻璃状 碳。 粘合剂可以具有并入其中的碳化物或硼化物粉末。 根据本发明的阴极可以通过使用预定形状的热固性树脂作为丝的起始材料，使用由原始热固性树脂制成的粘合剂将发射极尖端固定到热固性树脂的预定位置，并加热 所得组合物在非氧化气氛中以使树脂部分碳化。 该阴极在结构上非常简单。 此外，灯丝和发射极尖端之间的粘附性优异，并且通过使电流流过阴极，可以将发射极尖端加热到高于2000℃的高温。
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公开(公告)号：US4291252A
公开(公告)日：1981-09-22
申请号：US95933
申请日：1979-11-20
申请人： Toshiyuki Aida , Shigehiko Yamamoto , Sadanori Taguchi , Isamu Yuito , Yukio Honda , Ushio Kawabe , Akira Misumi , Takao Kawamura , Hiroshi Fukushima , Yoshio Degawa
发明人： Toshiyuki Aida , Shigehiko Yamamoto , Sadanori Taguchi , Isamu Yuito , Yukio Honda , Ushio Kawabe , Akira Misumi , Takao Kawamura , Hiroshi Fukushima , Yoshio Degawa
CPC分类号： H01J1/14
摘要： An electron tube cathode has a composite suppression layer structure interposed between the base metal and the electron-emitting material to suppress an interface layer formed through the reaction of the base metal with the electron emissive material. The composite layer structure includes a thin layer of Pt or Re and a layer of oxide of Zr and/or Hf. As a result, the formation of the interface layer is prevented so that the useful life of the electron tube cathode is prolonged.
摘要翻译： 电子管阴极具有插入在基底金属和电子发射材料之间的复合抑制层结构，以抑制通过贱金属与电子发射材料的反应形成的界面层。 复合层结构包括Pt或Re的薄层和Zr和/或Hf的氧化物层。 结果，防止了界面层的形成，延长了电子管阴极的使用寿命。
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公开(公告)号：US4783613A
公开(公告)日：1988-11-08
申请号：US55035
申请日：1987-05-28
CPC分类号： H01J1/28
摘要： An impregnated cathode comprising a refractory porous body whose pore parts are impregnated with an electron emissive material including barium and a thin film layer comprising tungsten, scandium and/or an oxide of scandium, deposited on the surface of the refractory porous body, characterized in that the thin film layer contains an oxide of tungsten, and/or an oxide of tungsten and scandium, has a distinguished electron emission property and a long life.
摘要翻译： 一种浸渍阴极，其包含耐火多孔体，其孔部分浸渍有包含钡的电子发射材料和沉积在耐火多孔体表面上的包含钨，钪和/或钪氧化物的薄膜层，其特征在于： 薄膜层含有钨的氧化物和/或钨和钪的氧化物，具有显着的电子发射性能和长寿命。
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公开(公告)号：US4737679A
公开(公告)日：1988-04-12
申请号：US826339
申请日：1986-02-05
CPC分类号： H01J1/28 , Y10T428/265
摘要： The present invention relates to an impregnated cathode produced by attaching at least two layered thin films, the thin films comprising an under layer consisting of a high melting point metal thin film composed of, for example, Os, Ru, Rh, Pd, Ir, Pt, Re, Mo, W, Ta, etc., and an over layer consisting of a high melting point metal layer which contains Sc.sub.2 O.sub.3 and which is placed over the layer, on the surface of the impregnated cathode pellet generated by impregnating a refractory porous base body with electron emissive materials. The invention relates also to an electron tube having this cathode. This cathode maintains a low work functional mono-layer stably for a long period of time on its surface.
摘要翻译： 本发明涉及通过附着至少两层薄膜而制造的浸渍阴极，该薄膜包括由例如由Os，Ru，Rh，Pd，Ir组成的高熔点金属薄膜构成的底层， Pt，Re，Mo，W，Ta等，以及由含有Sc 2 O 3的高熔点金属层构成的覆层，该层由放置在该层上的浸渍的阴极粒子的表面上， 基体与电子发射材料。 本发明还涉及具有该阴极的电子管。 该阴极在其表面上长时间稳定地保持低功函数单层。
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公开(公告)号：US4687930A
公开(公告)日：1987-08-18
申请号：US736123
申请日：1985-05-20
IPC分类号： H01J37/08 , G01Q30/10 , G01Q30/12 , H01J37/02 , H01J37/20 , H01J37/252 , H01J37/30 , H01J49/14 , G01N23/00
CPC分类号： H01J37/3002 , H01J37/02 , H01J49/142
摘要： The surface of a specimen such as a semiconductor wafer is processed and analyzed by the irradiator of the surface with an ion beam. The zone of the specimen to be processed and analyzed is kept by heating at a temperature higher than the melting point of an element or compound forming the ion species used for the irradiation. The means used for this heating may be an electron beam source, a light source, a resistance heating source, or a high-frequency heating source.
摘要翻译： 通过离子束的表面的照射器对诸如半导体晶片的样品的表面进行处理和分析。 通过在高于形成用于照射的离子种的元素或化合物的熔点的温度下加热来保持待处理和分析的样品的区域。 用于该加热的装置可以是电子束源，光源，电阻加热源或高频加热源。
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公开(公告)号：US4639377A
公开(公告)日：1987-01-27
申请号：US725793
申请日：1985-04-22
申请人： Shigehiko Yamamoto
发明人： Shigehiko Yamamoto
IPC分类号： H01L21/268 , C23C14/54 , C30B23/08 , H01L21/203 , B05D3/06
CPC分类号： C23C14/544
摘要： A thin film formation technique and apparatus therefor which comprises converting a molecular beam effusing from a molecular beam source equipment to a pulsed molecular beam; introducing the pulsed molecular beam into an ionization chamber in such a fashion that the most of the pulsed molecular beam is caused to be incident to a substrate while a part is ionized by the ionization chamber; amplifying the ion or the electron converted from the ion and converting it to an electrical signal; calculating the flux and speed of the molecular beam; controlling the molecular beam effusing from the molecular beam source equipment on the basis of the calculation information; and forming the thin film on the substrate.
摘要翻译： 一种薄膜形成技术及其设备，包括将分子束源从分子束源设备转变为脉冲分子束; 将脉冲分子束以使大部分脉冲分子束入射到衬底同时部分被电离室电离的方式引入电离室; 放大从离子转换的离子或电子，并将其转换为电信号; 计算分子束的通量和速度; 根据计算信息控制分子束源设备的分子束流出; 并在衬底上形成薄膜。
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公开(公告)号：US4379250A
公开(公告)日：1983-04-05
申请号：US198176
申请日：1980-10-17
CPC分类号： H01J1/304 , H01J37/073 , H01J2237/06316
摘要： A field emission cathode of the present invention is characterized by the possession of a special layer which is adsorbed onto the surfaces of a tip that is joined to the top of a hairpin-shaped filament.This layer is formed by adsorbing a selected metal via oxygen to a thickness which does not exceed the thickness of the monolayer of atoms.The metal will be selected from chromium, aluminum, cerium, magnesium, titanium, silicon, zirconium or hafnium.The field emission cathode features that the electrons are emitted in a concentrated manner from a particular crystal plane among the crystal planes of the tip.Therefore, it is possible to obtain a field emission cathode having very small emission angle of electrons.
摘要翻译： 本发明的场致发射阴极的特征在于具有吸附在与发夹状丝的顶部接合的尖端的表面上的特殊层。 该层通过将氧选择的金属吸附至不超过原子单层厚度的厚度而形成。 金属将选自铬，铝，铈，镁，钛，硅，锆或铪。 场发射阴极的特征在于电子以尖端的晶面中的特定晶面以集中的方式发射。 因此，可以获得具有非常小的电子发射角的场致发射阴极。
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公开(公告)号：US4260665A
公开(公告)日：1981-04-07
申请号：US946194
申请日：1978-09-27
申请人： Toshiyuki Aida , Sadanori Taguchi , Isamu Yuito , Ushio Kawabe , Shigehiko Yamamoto , Yukio Honda , Norio Shibata , Hiroshi Okano
发明人： Toshiyuki Aida , Sadanori Taguchi , Isamu Yuito , Ushio Kawabe , Shigehiko Yamamoto , Yukio Honda , Norio Shibata , Hiroshi Okano
CPC分类号： H01J9/04 , H01J1/14 , Y10T428/12028 , Y10T428/12618 , Y10T428/12875 , Y10T428/12944
摘要： An electron tube cathode in such a structure comprising a Ni-W-Zr alloy (W content: 20-28 wt. %) having a grain size of 4-10 .mu.m as a base metal, a 1,000-2,000 A-thick Pt film provided on the surface of the base metal, and an electron emitting material layer consisting of alkaline earth metal oxide provided on the Pt film has less emission lowering and less peeling of the electron emitting material layer, even if placed in a long time service. The electron tube cathode can be produced according to a method comprising (i) a step of annealing a base metal of Ni-W-Zr alloy (W content: 20-28 wt. %) at 1,000.degree.-1,200.degree. C., (ii) a step of providing a 1,000-2,000 A thick Pt film on the surface of the base metal, and (iii) a step of providing an electron emitting material layer consisting of alkaline earth metal oxide on the Pt film.
摘要翻译： 这种结构中的电子管阴极，其特征在于：以贱金属为基准的粒径为4-10μm的Ni-W-Zr合金（W含量：20〜28重量％），1000〜 并且由于设置在Pt膜上的由碱土类金属氧化物构成的电子发射材料层即使放置在长时间的服务中也具有较少的发射降低和较少的电子发射材料层的剥离。 电子管阴极可以根据以下方法制造：（i）在1000-1200℃下退火Ni-W-Zr合金的母材（W含量：20-28重量％）的步骤，（ ii）在母材表面上提供1,000-2,000A厚的Pt膜的步骤，和（iii）在Pt膜上提供由碱土金属氧化物构成的电子发射材料层的步骤。
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公开(公告)号：US4518890A
公开(公告)日：1985-05-21
申请号：US456247
申请日：1983-01-06
摘要： An impregnated cathode comprises a porous refractory substrate of refractory material such as tungsten containing at least one of scandium oxide particles and oxide particles containing scandium such as (Al, Sc).sub.2 O.sub.3, and an electron emissive material impregnated into pores of the substrate, and has an operating temperature lower by about 300.degree. C. than that of the conventional impregnated cathode containing no scandium oxide particles, or scandium.
摘要翻译： 浸渍阴极包括耐火材料的多孔耐火基材，例如含有氧化钪颗粒和含有钪的氧化物颗粒如（Al，Sc）2 O 3中的至少一种的钨和浸渍在基材的孔中的电子发射材料，并且具有 操作温度比不含氧化钪颗粒或钪的常规浸渍阴极低约300℃。
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