公开(公告)号：US20110095683A1

公开(公告)日：2011-04-28

申请号：US12926067

申请日：2010-10-25

申请人： Toshio Yokota ,  Yukio Yasuda ,  Hiroyuki Daido ,  Hiromitsu Kiriyama ,  Hajime Okada ,  Masayuki Suzuki ,  Izuru Daito

发明人： Toshio Yokota ,  Yukio Yasuda ,  Hiroyuki Daido ,  Hiromitsu Kiriyama ,  Hajime Okada ,  Masayuki Suzuki ,  Izuru Daito

IPC分类号： H01J61/36 ,  H01J9/26

CPC分类号： H01J61/368 ,  H01J9/326 ,  H01J61/86

摘要： A high pressure discharge lamp has a sealing portion that is made of glass and a sealing metal piece. In a method of manufacturing the high pressure discharge lamp, the sealing metal piece is irradiated with laser beam whose pulse width is 1×10−9 seconds or less, so as to carry out a surface treatment of the sealing metal piece. The sealing metal piece may have a groove that is 120 to 600 nm in depth and 450 to 1,200 nm in width.

摘要翻译： 高压放电灯具有由玻璃和密封金属片制成的密封部分。 在制造高压放电灯的方法中，用脉冲宽度为1×10-9秒以下的激光束照射密封金属片，以进行密封金属片的表面处理。 密封金属片可以具有深度为120至600nm且宽度为450至1,200nm的凹槽。

公开(公告)号：US20110085337A1

公开(公告)日：2011-04-14

申请号：US12903713

申请日：2010-10-13

申请人： Toshio YOKOTA ,  Taku SUMITOMO ,  Yukio YASUDA

发明人： Toshio YOKOTA ,  Taku SUMITOMO ,  Yukio YASUDA

IPC分类号： G02B27/20

CPC分类号： H01J65/04 ,  H01J61/025

摘要： In a light source device provided with a light emission tube in which a light emitting element is enclosed and at least one laser oscillator part for radiating a laser beam towards said light emission tube, for focusing a beam within a light emission tube with a large solid angle and for preventing that the beam with a high energy density impinges upon the wall of the light emission tube, the light emission tube has a tube wall, part of which is made to function as a focusing means, or the light emission tube has a focusing means at the inner surface thereof.

摘要翻译： 在设置有发光元件被封闭的发光管的光源装置中，以及至少一个用于向所述发光管照射激光束的激光振荡器部分，用于将光束聚焦在具有大固体的发光管内 角度并且为了防止具有高能量密度的光束照射在发光管的壁上，发光管具有管壁，其一部分被用作聚焦装置，或者发光管具有 聚焦装置在其内表面。

公开(公告)号：US20100264820A1

公开(公告)日：2010-10-21

申请号：US12662352

申请日：2010-04-13

申请人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

发明人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

IPC分类号： H01J61/20 ,  H01J61/00

CPC分类号： H01J65/04 ,  H01J61/025 ,  H01J61/18

摘要： An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.

摘要翻译： 激光驱动光源包括封装放电介质的灯泡，用于发射激光束的激光束单元，其中激光束聚焦在用于产生放电的灯泡中，以及设置在灯泡中的光束屏蔽元件 屏蔽通过在灯泡中产生的放电的激光束的外围设备。

公开(公告)号：US20100085549A1

公开(公告)日：2010-04-08

申请号：US12565881

申请日：2009-09-24

申请人： Taku SUMITOMO ,  Kiyoyuki KABUKI ,  Toshio YOKOTA

发明人： Taku SUMITOMO ,  Kiyoyuki KABUKI ,  Toshio YOKOTA

IPC分类号： G03B27/54

CPC分类号： G03F7/70575 ,  G03F7/70033

摘要： An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.

摘要翻译： 用于生产半导体和液晶的曝光装置具有一种光学系统，当将高能量激光照射到紫外光等发光时，能够有效地利用在灯放电容器内不产生孔而产生的光。 曝光装置具有用于发射紫外光的光源，用于发射激光的激光装置，用于反射从光源发射的紫外光的椭圆反射器和用于将由椭圆形反射器反射的光引导到物品的光学系统 通过包括准直透镜和积分透镜的光学元件进行处理，以及在由光学反射器反射的光的光路中提供的具有波长选择能力的分束器，以允许激光入射到来自光源的光源 椭圆形反射镜。

公开(公告)号：US08358069B2

公开(公告)日：2013-01-22

申请号：US12659323

申请日：2010-03-04

申请人： Taku Sumitomo ,  Toshio Yokota

发明人： Taku Sumitomo ,  Toshio Yokota

IPC分类号： H01J17/16 ,  H05G2/00 ,  H05B37/02

CPC分类号： H01J65/04 ,  G03F7/70016 ,  G03F7/70925

摘要： A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.

摘要翻译： 一种点亮具有放电灯的光源装置，用于反射从放电灯发出的光的反射镜，用于用光照射工件的发光光学系统，用于发射激光的一个或多个激光振荡器的方法 放电灯和用于开始放电的放电启动单元。 该方法包括通过用来自第一激光振荡器的激光束照射放电容器来去除附着在放电灯内表面的沉积物，通过放电启动单元在放电容器中开始放电，并将来自第二激光器的激光束 振荡器，进入放电容器。

公开(公告)号：US08288947B2

公开(公告)日：2012-10-16

申请号：US12903713

申请日：2010-10-13

申请人： Toshio Yokota ,  Taku Sumitomo ,  Yukio Yasuda

发明人： Toshio Yokota ,  Taku Sumitomo ,  Yukio Yasuda

IPC分类号： H01J61/00 ,  G01J1/00 ,  G02B27/20

CPC分类号： H01J65/04 ,  H01J61/025

摘要： In a light source device provided with a light emission tube in which a light emitting element is enclosed and at least one laser oscillator part for radiating a laser beam towards said light emission tube, for focusing a beam within a light emission tube with a large solid angle and for preventing that the beam with a high energy density impinges upon the wall of the light emission tube, the light emission tube has a tube wall, part of which is made to function as a focusing means, or the light emission tube has a focusing means at the inner surface thereof.

摘要翻译： 在设置有发光元件被封闭的发光管的光源装置中，以及至少一个用于向所述发光管照射激光束的激光振荡器部分，用于将光束聚焦在具有大固体的发光管内 角度并且为了防止具有高能量密度的光束照射在发光管的壁上，发光管具有管壁，其一部分被用作聚焦装置，或者发光管具有 聚焦装置在其内表面。

公开(公告)号：US08253926B2

公开(公告)日：2012-08-28

申请号：US12565881

申请日：2009-09-24

申请人： Taku Sumitomo ,  Kiyoyuki Kabuki ,  Toshio Yokota

发明人： Taku Sumitomo ,  Kiyoyuki Kabuki ,  Toshio Yokota

IPC分类号： G03B27/72 ,  G03B27/54

CPC分类号： G03F7/70575 ,  G03F7/70033

摘要： An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.

摘要翻译： 用于生产半导体和液晶的曝光装置具有一种光学系统，当将高能量激光照射到紫外光等发光时，能够有效地利用在灯放电容器内不产生孔而产生的光。 曝光装置具有用于发射紫外光的光源，用于发射激光的激光装置，用于反射从光源发射的紫外光的椭圆反射器和用于将由椭圆形反射器反射的光引导到物品的光学系统 通过包括准直透镜和积分透镜的光学元件进行处理，以及在由光学反射器反射的光的光路中提供的具有波长选择能力的分束器，以允许激光入射到来自光源的光源 椭圆形反射镜。

公开(公告)号：US08242695B2

公开(公告)日：2012-08-14

申请号：US12662352

申请日：2010-04-13

申请人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

发明人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

IPC分类号： H01J17/20 ,  H01J17/30 ,  H05G2/00

CPC分类号： H01J65/04 ,  H01J61/025 ,  H01J61/18

摘要： An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.

摘要翻译： 激光驱动光源包括封装放电介质的灯泡，用于发射激光束的激光束单元，其中激光束聚焦在用于产生放电的灯泡中，以及设置在灯泡中的光束屏蔽元件 屏蔽通过在灯泡中产生的放电的激光束的外围设备。

公开(公告)号：US20110026547A1

公开(公告)日：2011-02-03

申请号：US12844028

申请日：2010-07-27

申请人： Toshio YOKOTA

发明人： Toshio YOKOTA

IPC分类号： H01S3/098

CPC分类号： H01J65/042 ,  G03F7/70008

摘要： A light source device wherein the high-temperature plasma state after the start of the lighting is maintained stably and the light emission can be maintained stably and a decrease of the lighting life cycle by means of a heating of the light emission tube is suppressed comprises a light emission tube, in which a light emitting means is enclosed, and a pulsed laser oscillator part emitting a pulsed laser beam towards said light emission tube, wherein a continuous-wave laser oscillator part is provided emitting a continuous-wave laser beam towards said light emission tube.

摘要翻译： 一种光源装置，其中，在开始照明之后的高温等离子体状态被稳定地维持并且可以稳定地保持发光并且通过发光管的加热来降低照明寿命周期包括： 封闭有发光装置的发光管和朝向所述发光管发射脉冲激光束的脉冲激光振荡部，其中，向所述发光管发射连续波激光束的连续波激光振荡部， 排放管。

公开(公告)号：US5239172A

公开(公告)日：1993-08-24

申请号：US689878

申请日：1991-05-17

申请人： Toshio Yokota ,  Hajime Mori

发明人： Toshio Yokota ,  Hajime Mori

IPC分类号： G02B5/20 ,  G02B3/00 ,  H01L31/0216 ,  H01L31/0232 ,  H04N5/225

CPC分类号： G02B3/0056 ,  H01L31/02162 ,  H01L31/0232 ,  H04N5/2253 ,  G02B3/0018

摘要： In a color filter or a monochromatic filter (4) to be used by bonding to imaging sensor (1), at least two resin layers (A) and (B) adjacent to each other on transparent substrate and having different refractive indices are furnished, and the boundary surface of these resin layers (A) and (B) is formed in such curved surface that incident light (7) is converged on each of the light receiving units (2) of imaging sensor. Therefore, light converging effect can be obtained even on a solid-state imaging device of bonding type, and the sensitivity can be increased.To prepare light converging curved surface from the boundary surface where two resin layers (A) and (B) contact each other, there is a method, by which the desired curved surface is formed by selective exposure and hardening of light curing resin, and there is another method, by which a convex graded element is formed at first, and the surface thereof is formed in the desired convex form on the above convex graded element by selecting the coating condition in coating resin on it.

摘要翻译： PCT No.PCT / JP90 / 01197 Sec。 371日期1991年5月17日 102（e）日期1991年5月17日PCT 1990年9月19日PCT PCT。 公开号WO91 / 04504 日期：1991年4月4日。在通过粘合到成像传感器（1）使用的滤色器或单色滤光片（4）中，在透明基板上彼此相邻的至少两个树脂层（A）和（B） 具有不同的折射率，并且这些树脂层（A）和（B）的边界表面形成在入射光（7）会聚在成像传感器的每个受光单元（2）上的弯曲表面中。 因此，即使在接合型的固态成像装置上也可以获得光会聚效果，并且可以提高灵敏度。 为了从两个树脂层（A）和（B）彼此接触的边界表面制备聚光弯曲表面，存在通过光固化树脂的选择性曝光和硬化形成所需曲面的方法，并且在那里 是通过选择在其上涂布树脂的涂布条件，首先在其上形成凸起的渐变元件并且其表面以上述凸形梯度元件的所需凸形形式形成的另一种方法。