公开(公告)号：US5199630A

公开(公告)日：1993-04-06

申请号：US824133

申请日：1992-01-22

申请人： Armin Felber ,  Walter Nehls

发明人： Armin Felber ,  Walter Nehls

IPC分类号： G01H9/00 ,  B23K20/10 ,  H01L21/60 ,  H01L21/607

CPC分类号： H01L24/85 ,  B23K20/10 ,  H01L24/78 ,  H01L2224/48245 ,  H01L2224/48247 ,  H01L2224/78301 ,  H01L2224/786 ,  H01L2224/851 ,  H01L2224/85205 ,  H01L2224/85207 ,  H01L2224/859 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01082 ,  H01L2924/19042

摘要： A method, and apparatus for performing the method, for the ultrasonic contacting wired connection of electrical circuits to metallic leadframe strips, which apparatus essentially includes a bonding head with the energy transducer located thereon for feeding to the process point of the leadframe strip and for producing a longitudinal vibration amplitude is supplied with a first voltage, the bonding head is associated a measuring head fixed to a machine base, and the measuring head has an optical/electrical sensor which measures the instantaneous amplitude of the longitudinal vibration of the infeed of the bonding head and determining a correction factor mathematically from the measured quantities obtained, and the first ultrasonic value for the vibration amplitude of the energy transducer is calibrated with the correction factor.

摘要翻译： 一种用于执行该方法的方法和装置，用于超声波接触电路与金属引线框带的有线连接，该装置基本上包括具有位于其上的能量换能器的接合头，用于馈送到引线框带的过程点并用于产生 纵向振动幅度被提供有第一电压，接合头与固定到机器基座的测量头相关联，并且测量头具有光电传感器，其测量接合的进料的纵向振动的瞬时振幅 并从所获得的测量量数学地确定校正因子，并且用校正因子校准能量换能器的振幅的第一超声波值。

公开(公告)号：US5108023A

公开(公告)日：1992-04-28

申请号：US603986

申请日：1990-10-26

申请人： Emanuele Japichino ,  Walter Nehls

发明人： Emanuele Japichino ,  Walter Nehls

IPC分类号： H01L21/607 ,  B23K3/08 ,  H01L21/00 ,  H01L21/48 ,  H01L21/60

CPC分类号： H01L21/67144 ,  B23K3/087 ,  H01L21/4821 ,  Y10S269/903

摘要： The present invention relates to a device for forming electric circuits on a lead frame, which has a plurality of process points in a row, each of which is provided with a semiconductor chip. During bonding, for achieving an optimum ultrasonic power transfer necessary for the electric connection of the semiconductor chip (8) to the connection fingers (5) of the lead frame, the individual lead frame (1) is located between a heated bearing element (19) and a correspondingly constructed holding plate (40). In the case of the device (50) according to the invention, the holding plate (40) provided for a contacting member (transducer) with a correspondingly constructed window-like recess (45) is movably mounted relative to the bearing element (19) about at least one axis (S) oriented in the longitudinal direction of the holding plate (40) on two spaced studs (35, 35'), each of which is arranged on a spring element (34, 34'). The axis (S) passes through the center of the recess (45) and interconnects the two studs (35, 35' ).

摘要翻译： 本发明涉及一种用于在引线框架上形成电路的装置，该装置具有多个处理点，其中每个处理点设置有半导体芯片。 在接合期间，为了实现将半导体芯片（8）电连接到引线框架的连接指（5）所需的最佳超声波功率传递，单个引线框架（1）位于加热的支承元件（19） ）和相应构造的保持板（40）。 在根据本发明的装置（50）的情况下，用于具有相应构造的窗状凹部（45）的接触构件（换能器）设置的保持板（40）相对于轴承元件（19）可移动地安装， 围绕在保持板（40）的纵向方向上定位在两个间隔开的螺柱（35,35'）上的至少一个轴线（S），每个轴线布置在弹簧元件（34,34'）上。 轴线（S）通过凹部（45）的中心并且互连两个螺栓（35,35'）。

公开(公告)号：US5114302A

公开(公告)日：1992-05-19

申请号：US274865

申请日：1988-11-22

申请人： Claudio Meisser ,  Hans Eggenschwiler ,  Walter Nehls

发明人： Claudio Meisser ,  Hans Eggenschwiler ,  Walter Nehls

IPC分类号： B21D43/00 ,  B23K20/00 ,  B23Q1/00 ,  B23Q1/26 ,  B23Q1/38 ,  B23Q1/48 ,  B23Q1/62 ,  B23Q7/08 ,  F16C32/06 ,  G05D3/00 ,  H02K5/16 ,  H02K41/035

CPC分类号： H01L24/78 ,  B23K20/004 ,  B23Q1/38 ,  B23Q1/621 ,  F16C29/025 ,  F16C32/0603 ,  H02K41/0356 ,  H02K5/16 ,  F16C2300/62 ,  H01L2224/78 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01023 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01052 ,  H01L2924/01068 ,  H01L2924/19042 ,  H02K2201/18 ,  Y10T29/53178 ,  Y10T29/53261

摘要： An apparatus for performing an exact in-feed in the X and/or Y direction in the plane of a bond head, e.g. a gripper, to a working station containing a sliding plate, a support element, a first and second drives for performing the in-feeds, a guide mechanism provided with a slide part and a guide part and an integrated measuring device for determining movements of the support element oriented in the X and/or Y direction. The support element is mounted in the horizontal plane with translational and rotational degrees of freedom by a vacuum-pressurizable air bearing on the sliding plate and vertically by a vacuum-pressurizable air bearing on the slide part, the latter additionally being mounted with a vacuum-pressurizable air bearing on the sliding plate and with a counterpressure air bearing between two webs of the guide part.

摘要翻译： 一种用于在键头的平面中的X和/或Y方向上执行精确进给的装置，例如， 夹持器，包括滑动板的工作站，支撑元件，用于执行进给的第一和第二驱动器，设置有滑动部分和引导部分的引导机构，以及用于确定动作的集成测量装置 支撑元件定向在X和/或Y方向。 支撑元件通过滑动板上的真空可加压的空气轴承在垂直方向上安装在具有平移和旋转自由度的水平平面中，并且通过滑动部分上的真空可加压的空气轴承垂直地安装，后者另外安装有真空 - 滑动板上的可加压空气轴承和引导部件的两个腹板之间的反压空气轴承。