Method for producing electronic device
    1.
    发明授权
    Method for producing electronic device 有权
    电子装置的制造方法

    公开(公告)号:US07642145B2

    公开(公告)日:2010-01-05

    申请号:US10523247

    申请日:2002-07-30

    IPC分类号: H01L21/8238

    摘要: There is a problem in that when the demand accuracy with respect to a semiconductor pattern dimension comes close to a resist molecule size with miniaturization, the device performance is deteriorated due to edge roughness of a resist pattern to exert a bad influence on the system performance. The present invention overcomes the problem by the procedure in which super-molecules which are small in dimension as compared with the conventional polymers are used as main components, the reaction number required for the change of molecule solubility is made constant and as large as possible, and an acid generator is made clathrate or combinatory n super molecules to make an acid catalyst concentration large. As a result, it is possible to form a pattern of molecular accuracy with high productivity even with respect to the pattern dimension less than 50 nm, thereby realizing the high performance system.

    摘要翻译: 存在的问题在于,当半导体图案尺寸的需求精度接近于小型化的抗蚀剂分子尺寸时,由于抗蚀剂图案的边缘粗糙度而导致的器件性能劣化,从而对系统性能产生不良影响。 本发明通过使用与常规聚合物相比尺寸小的超分子作为主要成分的方法克服了该问题,使分子溶解度变化所需的反应数量保持恒定且尽可能大, 使酸发生剂成为包合物或组合的超分子,使酸催化剂浓度变大。 结果,即使相对于图案尺寸小于50nm,也可以以高生产率形成分子精度图案,从而实现高性能系统。

    Prober and probe contact method
    2.
    发明授权
    Prober and probe contact method 有权
    探头和探针接触方式

    公开(公告)号:US07405584B2

    公开(公告)日:2008-07-29

    申请号:US11744192

    申请日:2007-05-03

    IPC分类号: G01R31/02

    CPC分类号: G01R31/2891 G01R31/286

    摘要: A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.

    摘要翻译: 公开了一种在不降低吞吐量的情况下提高探测位置精度的探测器。 探测器包括具有探针,晶片台,台温度调节机构,晶片台移动机构,移动控制部分和检测电极和探针之间的相对位置的对准机构的探针卡,其中移动 控制部分控制移动机构,以使得电极基于检测到的相对位置与探针接触,并且探测器还包括多个温度传感器,其检测探测器的多个部分的温度,包括 晶片台和预测变化量计算部,其基于使用多个部分的至少一部分温度的预测模型和晶片台之间的温度差来计算电极和探针之间的相对位置的变化量 其他部分作为变量。

    PROBER AND PROBE CONTACT METHOD
    3.
    发明申请
    PROBER AND PROBE CONTACT METHOD 有权
    探索与探索联系方式

    公开(公告)号:US20070268033A1

    公开(公告)日:2007-11-22

    申请号:US11744192

    申请日:2007-05-03

    IPC分类号: G01R31/02

    CPC分类号: G01R31/2891 G01R31/286

    摘要: A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.

    摘要翻译: 公开了一种在不降低吞吐量的情况下提高探测位置精度的探测器。 探测器包括具有探针,晶片台,台温度调节机构,晶片台移动机构,移动控制部分和检测电极和探针之间的相对位置的对准机构的探针卡,其中移动 控制部分控制移动机构,以使得电极基于检测到的相对位置与探针接触,并且探测器还包括多个温度传感器,其检测探测器的多个部分的温度,包括 晶片台和预测变化量计算部,其基于使用多个部分的至少一部分温度的预测模型和晶片台之间的温度差来计算电极和探针之间的相对位置的变化量 其他部分作为变量。

    External method and apparatus for magnetizing metal pieces in rotary
electric apparatus to a permanent magnetization state
    6.
    发明授权
    External method and apparatus for magnetizing metal pieces in rotary electric apparatus to a permanent magnetization state 失效
    旋转电器中永久磁化状态下金属片的外部方法和装置

    公开(公告)号:US5075814A

    公开(公告)日:1991-12-24

    申请号:US481192

    申请日:1990-02-20

    IPC分类号: H01F13/00 H02K15/03 H02K23/04

    摘要: An external magnetizing method and external magnetizing apparatus for a rotary electric apparatus having internal permanent magnets, which obtains permanent magnetization of metal pieces fixed along the internal circumference of a yoke from the outside of the yoke while the rotor is situated within the yoke. The external magnetizing method includes the steps of creating the permanent magnets by applying a voltage from a capacitor power source to a yoke magnetizing device adjacent the external circumference of the motor yoke, then incrementally rotating the rotor in its normal rotating direction and thereafter reapplying the capacitor power source voltage to the yoke magnetizing means to again magnetize the metal pieces to obtain a more uniform magnetization when using a capacitor power supply . The external apparatus includes a yoke magnetizing device adjacent the external circumference of the yoke, a power source voltage applying device for supplying a voltage from a capacitor power source to the yoke magnetizing device, and a step rotating device controlled by the power source applying device for incrementally rotating the rotor at least one or more times in its normal rotating direction after each application of voltage from the capacitor power source.

    摘要翻译: 一种具有内部永磁体的旋转电器的外部磁化方法和外部磁化装置,其具有在转子位于磁轭内部时从轭的外部获得沿轭的内周固定的金属片的永久磁化。 外部磁化方法包括以下步骤:通过将电容器电源施加的电压施加到与电动机磁轭的外周相邻的磁轭磁化装置,然后沿正常旋转方向逐渐旋转转子,然后重新施加电容器 电源电压到磁轭磁化装置,以再次磁化金属片,以在使用电容器电源时获得更均匀的磁化。 外部装置包括与磁轭的外周相邻的轭磁化装置,将来自电容器电源的电压提供给轭磁化装置的电源电压施加装置,以及由电源施加装置控制的步进旋转装置, 在每次从电容器电源施加电压之后,使转子在其正常旋转方向上至少一次或多次地旋转。

    Microwell Array Chip and Its Manufacturing Method
    7.
    发明申请
    Microwell Array Chip and Its Manufacturing Method 审中-公开
    微孔阵列芯片及其制造方法

    公开(公告)号:US20080014631A1

    公开(公告)日:2008-01-17

    申请号:US10573289

    申请日:2004-09-22

    IPC分类号: C12M1/34

    摘要: A microwell array chip having multiple microwells on a principal surface of a substrate, said microwells being of a shape and size permitting the storage of only a single organic cell in each microwell, wherein microwell markers are present on the same substrate surface as the openings of the microwells. A microwell array chip having multiple microwells on a principal surface of a substrate, said microwells being of a shape and size permitting the storage of only a single organic cell in each microwell, wherein protrusions are present in the openings of said microwells so as to narrow said openings. A method for manufacturing the microwell array chip. The method comprises the steps of: forming a film on at least one principal surface of a substrate; applying a resist coating on the film that has been formed; exposing the resist surface through a mask having a microwell pattern and removing uncured portions of resist; etching the exposed portions of said film and substrate to fabricate wells in the form of a microwell array; and removing the resist. A microwell array chip made of silicon and having multiple microwells, each microwell being used to store a single specimen organic cell, wherein each microwell is of a size and shape holding just one organic cell.

    摘要翻译: 一种微孔阵列芯片,其在基底的主表面上具有多个微孔,所述微孔具有允许在每个微孔中仅存储单个有机细胞的形状和尺寸,其中微孔标记物存在于与基底表面的开口相同的基底表面上 微孔。 一种微孔阵列芯片,其在基底的主表面上具有多个微孔,所述微孔具有允许在每个微孔中仅存储单个有机细胞的形状和尺寸,其中突起存在于所述微孔的开口中以使其变窄 说开口 一种微孔阵列芯片的制造方法。 该方法包括以下步骤:在衬底的至少一个主表面上形成膜; 在已经形成的膜上施加抗蚀剂涂层; 通过具有微孔图案的掩模曝光抗蚀剂表面并除去未固化的抗蚀剂部分; 蚀刻所述膜和基底的暴露部分以制造微孔阵列形式的孔; 并除去抗蚀剂。 由硅制成并具有多个微孔的微孔阵列芯片,每个微孔用于存储单个样品有机电池,其中每个微孔具有仅具有一个有机电池的尺寸和形状。

    Socks
    10.
    发明授权
    Socks 有权
    袜子

    公开(公告)号:US07721575B2

    公开(公告)日:2010-05-25

    申请号:US12094584

    申请日:2006-02-03

    IPC分类号: D04B9/46

    摘要: An object of the present invention is to provide a sock which offers a fit, and does not cause fatigue, blood congestion, or the like if worn for a long period of time. The sock has a length from a toe to at least an ankle, and is knitted from a knitting yarn. The sock has a base knit structure knitted at an inside half region of an arch part of the sole from an upper thread and under thread, and has an auxiliary thread further inserted together with the upper thread, so as to form a knitted part which is contracted and reduced in extensibility.

    摘要翻译: 本发明的目的在于提供一种能够长时间佩戴的袜子,其能够适合,并且不会引起疲劳,血液充血等。 袜子的长度从脚趾到至少踝部,并且由针织纱编织而成。 该袜子具有从鞋面和底线在鞋底的拱形部分的内侧半部区域编织的基底针织结构,并且具有进一步与面线一起插入的辅助纱线,以形成针织部件 承包和减少可扩展性。