摘要:
There is a problem in that when the demand accuracy with respect to a semiconductor pattern dimension comes close to a resist molecule size with miniaturization, the device performance is deteriorated due to edge roughness of a resist pattern to exert a bad influence on the system performance. The present invention overcomes the problem by the procedure in which super-molecules which are small in dimension as compared with the conventional polymers are used as main components, the reaction number required for the change of molecule solubility is made constant and as large as possible, and an acid generator is made clathrate or combinatory n super molecules to make an acid catalyst concentration large. As a result, it is possible to form a pattern of molecular accuracy with high productivity even with respect to the pattern dimension less than 50 nm, thereby realizing the high performance system.
摘要:
A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.
摘要:
A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.
摘要:
A microwell array chip made of silicon and having multiple microwells where each microwell is used to store a single specimen organic cell. The microwell of the array chip is of a size and shape to hold just one organic cell and the interior surface of the microwells are coated with a fluorocarbon film.
摘要:
A chip useful for treating cells and the like which has a mechanism and a structure wherein the size of a hole pattern is arbitrarily changed so that cells can easily move in and get out from the hole in scattering or collecting cells but can hardly get out from the hole during washing or antigen-stimulation. The chip comprises a crosslinked product of a temperature-responsive polymer as a constituting member and being provided with a film having a hole pattern on the surface of a baseboard. A method of producing the chip comprises applying a composition containing a crosslinkable temperature-responsive polymer on the surface of a baseboard to thereby form a coating film, crosslinking the coating film to thereby form the crosslinked product as described above and then forming a hole pattern on the coating film of the crosslinked product.
摘要:
An external magnetizing method and external magnetizing apparatus for a rotary electric apparatus having internal permanent magnets, which obtains permanent magnetization of metal pieces fixed along the internal circumference of a yoke from the outside of the yoke while the rotor is situated within the yoke. The external magnetizing method includes the steps of creating the permanent magnets by applying a voltage from a capacitor power source to a yoke magnetizing device adjacent the external circumference of the motor yoke, then incrementally rotating the rotor in its normal rotating direction and thereafter reapplying the capacitor power source voltage to the yoke magnetizing means to again magnetize the metal pieces to obtain a more uniform magnetization when using a capacitor power supply . The external apparatus includes a yoke magnetizing device adjacent the external circumference of the yoke, a power source voltage applying device for supplying a voltage from a capacitor power source to the yoke magnetizing device, and a step rotating device controlled by the power source applying device for incrementally rotating the rotor at least one or more times in its normal rotating direction after each application of voltage from the capacitor power source.
摘要:
A microwell array chip having multiple microwells on a principal surface of a substrate, said microwells being of a shape and size permitting the storage of only a single organic cell in each microwell, wherein microwell markers are present on the same substrate surface as the openings of the microwells. A microwell array chip having multiple microwells on a principal surface of a substrate, said microwells being of a shape and size permitting the storage of only a single organic cell in each microwell, wherein protrusions are present in the openings of said microwells so as to narrow said openings. A method for manufacturing the microwell array chip. The method comprises the steps of: forming a film on at least one principal surface of a substrate; applying a resist coating on the film that has been formed; exposing the resist surface through a mask having a microwell pattern and removing uncured portions of resist; etching the exposed portions of said film and substrate to fabricate wells in the form of a microwell array; and removing the resist. A microwell array chip made of silicon and having multiple microwells, each microwell being used to store a single specimen organic cell, wherein each microwell is of a size and shape holding just one organic cell.
摘要:
A chip useful for treating cells and the like which has a mechanism and a structure wherein the size of a hole pattern is arbitrarily changed so that cells can easily move in and get out from the hole in scattering or collecting cells but can hardly get out from the hole during washing or antigen-stimulation. The chip comprises a crosslinked product of a temperature-responsive polymer as a constituting member and being provided with a film having a hole pattern on the surface of a baseboard. A method of producing the chip comprises applying a composition containing a crosslinkable temperature-responsive polymer on the surface of a baseboard to thereby form a coating film, crosslinking the coating film to thereby form the crosslinked product as described above and then forming a hole pattern on the coating film of the crosslinked product.
摘要:
The present invention is directed to a microwell array chip made of silicon and having multiple microwells. Each microwell is used to store a single specimen organic cell. Each microwell is of a size and shape holding just one organic cell, and the interior surface of the microwells are coated with a fluorocarbon film.
摘要:
An object of the present invention is to provide a sock which offers a fit, and does not cause fatigue, blood congestion, or the like if worn for a long period of time. The sock has a length from a toe to at least an ankle, and is knitted from a knitting yarn. The sock has a base knit structure knitted at an inside half region of an arch part of the sole from an upper thread and under thread, and has an auxiliary thread further inserted together with the upper thread, so as to form a knitted part which is contracted and reduced in extensibility.