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    ETCHING METHOD AND DEVICES PRODUCED USING THE ETCHING METHOD
    5.
    发明申请
    ETCHING METHOD AND DEVICES PRODUCED USING THE ETCHING METHOD 有权
    蚀刻方法和使用蚀刻方法生产的装置

    公开(公告)号：US20140124477A1

    公开(公告)日：2014-05-08

    申请号：US14127277

    申请日：2012-07-13

    Applicant: 3M INNOVATIVE PROPERTIES COMPANY

    Inventor： Muthu Sebastian ,  Fong Liang Tan

    IPC: C23F1/30

    CPC classification number: C23F1/30 ,  C09K13/04 ,  G06F3/044

    Abstract: A double ITO structure, containing sequential layers of indium tin oxide (ITO), silicon dioxide (SiO2) (which may include a dopant material) and ITO, is selectively protected by a patterned photo-resist mask. The sequential layers are etched together in a single etching step using an etchant composition which is an acidic solution containing a transition metal chloride and hydrochloric acid (HCl). Thus, the double ITO structure is etched using a substantially fluoride-free etchant composition.

    Abstract translation: 包含铟锡氧化物（ITO），二氧化硅（SiO 2）（其可以包括掺杂剂材料）和ITO的顺序层的双ITO结构被图案化的光刻胶掩模选择性地保护。 使用蚀刻剂组合物在单个蚀刻步骤中将顺序层蚀刻在一起，该蚀刻剂组合物是含有过渡金属氯化物和盐酸（HCl）的酸性溶液。 因此，使用基本上不含氟化物的蚀刻剂组合物来蚀刻双ITO结构。

    FLEXIBLE TOUCH SENSOR WITH FINE PITCH INTERCONNECT
    9.
    发明申请
    FLEXIBLE TOUCH SENSOR WITH FINE PITCH INTERCONNECT 有权
    柔性触摸传感器与精细互联互连

    公开(公告)号：US20140299365A1

    公开(公告)日：2014-10-09

    申请号：US14240815

    申请日：2012-09-27

    Applicant: 3M INNOVATIVE PROPERTIES COMPANY

    Inventor： Muthu Sebastian ,  Dominic M. Travasso ,  Nancy S. Lennhoff ,  Steven T. Swartz

    IPC: H05K1/02 ,  H05K3/06

    CPC classification number: H05K1/0274 ,  G06F3/044 ,  H05K1/09 ,  H05K3/06 ,  H05K2201/0302 ,  H05K2201/032

    Abstract: An article includes a multilayer structure, such as, e.g., a touch sensor, having two opposing sides and comprising a central polymeric UV transparent substrate, a transparent conductive layer on each of the two major opposing surfaces of the polymeric substrate, a metallic conductive layer on each transparent conductive layer, and a patterned photoimaging mask on each metallic conductive layer.

    Abstract translation: 一种物品包括多层结构，例如触摸传感器，具有两个相对的侧面并且包括中心聚合物UV透明基板，在聚合物基板的两个主要相对表面的每一个上的透明导电层，金属导电层 在每个透明导电层上，以及每个金属导电层上的图案化成像掩模。

    Capacitive touch screen sensor and corresponding method of fabrication
    10.
    发明授权
    Capacitive touch screen sensor and corresponding method of fabrication 有权

    公开(公告)号：US09898151B2

    公开(公告)日：2018-02-20

    申请号：US14760769

    申请日：2013-02-06

    Applicant: 3M INNOVATIVE PROPERTIES COMPANY

    Inventor： Muthu Sebastian ,  Dominic M. Travasso ,  Steven T. Swartz

    IPC: G06F3/045 ,  G06F3/044

    CPC classification number: G06F3/044 ,  G06F2203/04103 ,  G06F2203/04111 ,  G06F2203/04112

    Abstract: A capacitive touch screen sensor 104 is disclosed. The sensor 104 comprises an array of drive electrodes 100, an array of sense electrodes 102 separated from the array of drive electrodes by a dielectric layer 200, each sense electrode 102 being offset from each drive electrode 100 to define respective overlapping regions 112 and first non-overlapping regions 113, and a plurality of non-electrically connected electrodes 402, each non-electrically connected electrode 402 being arranged to correspond to each first non-overlapping region 113 and spaced from adjacent drive 100 or sense electrodes 102 by a perimeter gap 404. The perimeter gap 404 may have a width of about 100 um or less. A related touch panel and method of fabricating the same are also disclosed.

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