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1.发明申请公开(公告)号：US20160107877A1
公开(公告)日：2016-04-21
申请号：US14928591
申请日：2015-10-30
Applicant: Advanced Technology Materials, Inc.
Inventor： Glenn M. TOM , Joseph Patrick MENNING , Matthew KUSZ , Amy KOLAND , Donald D. WARE , Richard D. CHISM
IPC: B67D7/02
CPC classification number: B67D7/0261 , C02F1/001 , C02F1/20 , C02F2209/40 , F17C1/00 , F17C2201/0104 , F17C2201/0157 , F17C2201/054 , F17C2201/056 , F17C2201/058 , F17C2203/0604 , F17C2203/0617 , F17C2203/0624 , F17C2203/0629 , F17C2203/0636 , F17C2203/066 , F17C2203/0685 , F17C2205/0142 , F17C2205/0165 , F17C2205/0169 , F17C2205/0323 , F17C2205/0326 , F17C2205/0335 , F17C2205/0338 , F17C2205/0341 , F17C2205/0373 , F17C2205/0382 , F17C2205/0385 , F17C2205/0391 , F17C2209/219 , F17C2209/221 , F17C2221/03 , F17C2223/0123 , F17C2223/0153 , F17C2223/033 , F17C2223/043 , F17C2223/047 , F17C2227/0135 , F17C2227/0157 , F17C2227/0192 , F17C2227/0304 , F17C2227/0379 , F17C2227/041 , F17C2250/032 , F17C2250/0408 , F17C2250/043 , F17C2250/0439 , F17C2250/0443 , F17C2250/0452 , F17C2250/0478 , F17C2250/0491 , F17C2250/0495 , F17C2250/072 , F17C2260/016 , F17C2260/024 , F17C2265/012 , F17C2265/017 , F17C2265/022 , F17C2270/05 , F17C2270/0518 , Y10T137/2708
Abstract: A fluid dispensing system for delivering a gas free chemical. The fluid dispensing system includes a gas separation device that separates a liquid from bubbles entrained in the liquid and accumulating the gas from the bubbles in a reservoir. A level sensor detects if the liquid in the reservoir drops too low, triggering the gas separation device to vent the gas from the reservoir. An empty detect apparatus that detects pressure droop of the liquid may also be implemented for taking appropriate action.
Abstract translation: 用于输送无气体化学品的流体分配系统。 流体分配系统包括气体分离装置，其将液体与夹在液体中的气泡分离，并将气体从储存器中的气泡积聚。 液位传感器检测储液器中的液体是否下降得太低，触发气体分离装置从储存器排出气体。 还可以实施检测液体的压降的空的检测装置，以采取适当的动作。
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公开(公告)号：US20160039659A1
公开(公告)日：2016-02-11
申请号：US14814155
申请日：2015-07-30
Applicant: Advanced Technology Materials, Inc.
Inventor： Donald D. WARE , Glenn M. TOM , Paul DATHE , Amy KOLAND , Jason GEROLD , Kirk MIKKELSEN , Kevin T. O'DOUGHERTY , Michael A. CISEWSKI
CPC classification number: B67D7/763 , B65D83/62 , B67D7/0261 , Y10T137/313
Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
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公开(公告)号：US20150298891A1
公开(公告)日：2015-10-22
申请号：US14688778
申请日：2015-04-16
Applicant: Advanced Technology Materials, Inc.
Inventor： Minna HOVINEN , John R. KINGERY , Glenn M. TOM , Kevin T. O'DOUGHERTY , Kirk MIKKELSEN , Donald D. WARE , Peter C. VAN BUSKIRK
CPC classification number: B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
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Patent Agency Ranking
公开(公告)号：US20150284236A1
公开(公告)日：2015-10-08
申请号：US14744202
申请日：2015-06-19
Applicant: Advanced Technology Materials. Inc
Inventor： Kevin T. O'DOUGHERTY , Glenn M. TOM
CPC classification number: B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
Abstract: Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
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5.发明申请公开(公告)号：US20160229679A1
公开(公告)日：2016-08-11
申请号：US15023231
申请日：2014-09-17
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
Inventor： Donald D. WARE , Glenn M. TOM , Amy KOLAND , Dale Gene MOWREY , Bruce MUSOLF
CPC classification number: B67D7/0261 , B65D25/14 , B65D77/06 , B65D81/3233 , B67D7/06
Abstract: A liner-based pressure dispensing container includes a connector-mounted probe arranged to seat a dip tube against an inner surface of a liner fitment for sealing utility. A dip tube and probe may include increased and/or matched flow area. A reverse flow prevention element can be arranged proximate to a liquid extraction opening to inhibit reverse flow of liquid from a dip tube into a container. A liner-less container may include a reduce diameter lower portion arranged to receive a dip tube, with at least one associated sensor to sense a condition indicative of depletion of liquid from the lower portion. A shipping cap can be included for removing headspace gas from the liner. In one embodiment, the shipping cap is suitable for direct connection to a dispensing process.
Abstract translation: 基于衬管的压力分配容器包括连接器安装的探针，其布置成将汲取管抵靠在衬垫配件的内表面上以便密封效用。 汲取管和探针可以包括增加和/或匹配的流动面积。 反流防止元件可以布置在液体提取开口附近，以防止液体从浸入管反向流入容器。 无衬套容器可以包括布置成接收汲取管的减小直径下部，其中至少一个相关联的传感器感测指示来自下部的液体的耗尽的状态。 可以包括一个运输帽，用于从衬里上取下顶空。 在一个实施例中，运输盖适合于直接连接到分配过程。
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公开(公告)号：US20150360929A1
公开(公告)日：2015-12-17
申请号：US14812651
申请日：2015-07-29
Applicant: Advanced Technology Materials. Inc
Inventor： Kevin T. O'DOUGHERTY , Glenn M. TOM
CPC classification number: B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
Abstract: Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
Abstract translation: 流体储存和分配系统和流程涉及用于流体储存和分配的各种结构方法，包括预先连接的验证联接件，其有效地用于流体储存和分配包装以确保适当的联接并避免流体污染问题，空的检测系统（例如， 监测分配的液体介质的压力以检测压力下降条件）可用于流体储存和分配包装，其包括在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，以便于从加盖的容器移除分配连接器， 用于防止容器盖的误用的系统，以及用于确保适当的分配组件和容器的联接的键盘系统。 流体储存和分配系统实现了零或接近零的顶空特性，并且防止或改善了液体从液体分配到外包装容器内的作用。
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公开(公告)号：US20150328819A1
公开(公告)日：2015-11-19
申请号：US14811420
申请日：2015-07-28
Applicant: Advanced Technology Materials, Inc.
Inventor： Glenn M. TOM , Greg NELSON , Wei LIU , Amy KOLAND , Donald D. WARE , Alfredo D. BOTET , Jordon H. HODGES , Eric J. BRUNELLA , Chantel ORTEGA , Daniel J. DURHAM , Tracy M. MOMANY , Thomas J. Carros
IPC: B29C49/20
Abstract: The present disclosure, in one embodiment, relates to a liner-based assembly having an overpack and a liner disposed within the overpack. The liner may be formed by blow molding a liner preform within the overpack to form a blow molded liner substantially conforming to the interior of the overpack and generally forming an interface with an interior of the overpack. The present disclosure, in another embodiment, relates to a liner-based assembly including a blow-molded overpack comprised of polyethylene terephthalate, a blow-molded liner disposed within the overpack, the liner comprised of a polymer material, wherein the overpack and liner have a combined wall thickness of about 0.3 mm or less, and a base cup configured to at least partially surround an exterior of the overpack. In some embodiments, the liner has a volume of up to about 4.7 liters and an empty weight of between about 260-265 grams.
Abstract translation: 在一个实施例中，本公开涉及一种基于衬套的组件，其具有设置在外包装内的外包装和衬里。 衬里可以通过在衬套内吹塑成型衬里预成型件而形成，以形成基本上符合外包装内部的吹塑成型衬里，并且通常形成与外包装内部的界面。 在另一个实施方案中，本公开涉及一种基于衬垫的组件，其包括由聚对苯二甲酸乙二醇酯构成的吹塑成型外包装，设置在外包装内的吹塑成型的衬垫，由聚合物材料构成的衬里，其中外包装和衬里具有 约0.3mm或更小的组合壁厚，以及被配置为至少部分地围绕外包装外部的基杯。 在一些实施例中，衬垫具有高达约4.7升的体积和约260-265克之间的空重量。
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公开(公告)号：US20150078685A1
公开(公告)日：2015-03-19
申请号：US14550401
申请日：2014-11-21
Applicant: Advanced Technology Materials, Inc.
Inventor： Glenn M. TOM , John R. KINGERY , Kevin T. O'DOUGHERTY , Kirk MIKKELSEN , Michele J. ALBERG , Patrick M. OLSON , Timothy HOYT
CPC classification number: B65D33/00 , B65B31/003 , B65D83/0061 , B65D83/62 , Y10T428/249981 , Y10T428/31757
Abstract: Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.
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