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公开(公告)号:US20210318418A1
公开(公告)日:2021-10-14
申请号:US17214960
申请日:2021-03-29
Applicant: Apple Inc.
Inventor: Arnaud Laflaquiere
IPC: G01S7/4865 , G02B3/00 , G01S7/4861
Abstract: An optoelectronic device includes a display, including a first substrate, which is transparent to optical radiation at a given wavelength, and a first array of display cells including pixel circuit elements disposed on the first substrate at a first pitch, with gaps of a predefined size between the pixel circuit elements. An emitter array includes a second substrate, parallel and in proximity to the first substrate, and a second array of emitters, which are disposed on the second substrate at a second pitch that is different from the first pitch, and which are configured to emit optical radiation at the given wavelength toward the first substrate. Control circuitry is configured to identify the emitters that are aligned with the gaps between the pixel circuit elements and to selectively drive the identified emitters to emit the optical radiation through the gaps.
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公开(公告)号:US20180090536A1
公开(公告)日:2018-03-29
申请号:US15713477
申请日:2017-09-22
Applicant: Apple Inc.
Inventor: Shingo Mandai , Cristiano L. Niclass , Nobuhiro Karasawa , Xiaofeng Fan , Arnaud Laflaquiere , Gennadiy A. Agranov
IPC: H01L27/146 , H04N5/355 , H04N5/3745 , H04N5/378 , H04N5/357 , H04N5/376
CPC classification number: H01L27/14665 , G01S7/4861 , G01S7/4863 , H01L27/14603 , H01L27/14609 , H01L27/1461 , H01L27/14616 , H01L27/14623 , H01L27/14627 , H01L27/14629 , H01L27/1463 , H01L27/14632 , H01L27/14634 , H01L27/1464 , H01L27/14643 , H01L31/02027 , H01L31/03529 , H01L31/107 , H04N5/35572 , H04N5/3577 , H04N5/3698 , H04N5/37452 , H04N5/3765 , H04N5/378
Abstract: A back-illuminated single-photon avalanche diode (SPAD) image sensor includes a sensor wafer stacked vertically over a circuit wafer. The sensor wafer includes one or more SPAD regions, with each SPAD region including an anode gradient layer, a cathode region positioned adjacent to a front surface of the SPAD region, and an anode avalanche layer positioned over the cathode region. Each SPAD region is connected to a voltage supply and an output circuit in the circuit wafer through inter-wafer connectors. Deep trench isolation elements are used to provide electrical and optical isolation between SPAD regions.
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公开(公告)号:US20250102631A1
公开(公告)日:2025-03-27
申请号:US18673072
申请日:2024-05-23
Applicant: Apple Inc.
Inventor: Siddharth Joshi , Arnaud Laflaquiere , Nicolas Hotellier , Cristiano L. Niclass , Keith Lyon
Abstract: Disclosed are electronic devices that include an array of light emitting diodes and photosensors formed in a single semiconductor chip. The light emitting diodes may be structured as vertical exterior cavity surface-emitting laser diodes (VECSELs). The photosensors may be formed as resonant cavity photosensors (RCPDs). The VECSELs and the RCPDs of the array may be formed in a common set of semiconductor layers of the single semiconductor chip and separated by isolation regions formed in the common set of semiconductor layers. Also disclosed are dual chip transmitter-receiver systems including a first semiconductor chip having an array of both VECSELs and RCPDs formed in common set of semiconductor layers, and a second semiconductor chip electrically connected to the first semiconductor chip and including control circuitry to enable laser emission from the VECSELs and light reception by the RCPDs.
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公开(公告)号:US12158546B2
公开(公告)日:2024-12-03
申请号:US17214960
申请日:2021-03-29
Applicant: Apple Inc.
Inventor: Arnaud Laflaquiere
IPC: G01S7/4865 , G01S7/4861 , G02B3/00
Abstract: An optoelectronic device includes a display, including a first substrate, which is transparent to optical radiation at a given wavelength, and a first array of display cells including pixel circuit elements disposed on the first substrate at a first pitch, with gaps of a predefined size between the pixel circuit elements. An emitter array includes a second substrate, parallel and in proximity to the first substrate, and a second array of emitters, which are disposed on the second substrate at a second pitch that is different from the first pitch, and which are configured to emit optical radiation at the given wavelength toward the first substrate. Control circuitry is configured to identify the emitters that are aligned with the gaps between the pixel circuit elements and to selectively drive the identified emitters to emit the optical radiation through the gaps.
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公开(公告)号:US10825952B2
公开(公告)日:2020-11-03
申请号:US16477205
申请日:2018-01-11
Applicant: APPLE INC.
Inventor: Arnaud Laflaquiere , Marc Drader
Abstract: An optoelectronic device includes a semiconductor substrate and a monolithic array of light-emitting elements formed on the substrate. The light-emitting elements include a first plurality of first emitters, configured to emit respective first beams of light with a first angular divergence, at respective first positions in the array, and a second plurality of second emitters, configured to emit respective second beams of light with a second angular divergence that is at least 50% greater than the first angular divergence, at respective second positions in the array.
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公开(公告)号:US20200286946A1
公开(公告)日:2020-09-10
申请号:US16876511
申请日:2020-05-18
Applicant: Apple Inc.
Inventor: Shingo Mandai , Cristiano L. Niclass , Nobuhiro Karasawa , Xiaofeng Fan , Arnaud Laflaquiere , Gennadiy A. Agranov
IPC: H01L27/146 , G01S7/4863 , H04N5/355 , H04N5/357 , H04N5/3745 , H04N5/376 , H04N5/378 , H01L31/107 , H04N5/369
Abstract: A back-illuminated single-photon avalanche diode (SPAD) image sensor includes a sensor wafer stacked vertically over a circuit wafer. The sensor wafer includes one or more SPAD regions, with each SPAD region including an anode gradient layer, a cathode region positioned adjacent to a front surface of the SPAD region, and an anode avalanche layer positioned over the cathode region. Each SPAD region is connected to a voltage supply and an output circuit in the circuit wafer through inter-wafer connectors. Deep trench isolation elements are used to provide electrical and optical isolation between SPAD regions.
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公开(公告)号:US20200251882A1
公开(公告)日:2020-08-06
申请号:US16779609
申请日:2020-02-02
Applicant: Apple Inc.
Inventor: Keith Lyon , Arnaud Laflaquiere
Abstract: An optoelectronic device includes a semiconductor substrate having first and second faces. A first array of emitters are formed on the first face of the semiconductor substrate and are configured to emit respective beams of radiation through the substrate. Electrical connections are coupled to actuate selectively first and second sets of the emitters in the first array. A second array of microlenses are formed on the second face of the semiconductor substrate in respective alignment with the emitters in at least one of the first and second sets and are configured to focus the beams emitted from the emitters in the at least one of the first and second sets so that the beams are transmitted from the second face with different, respective first and second focal properties.
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公开(公告)号:US20240106192A1
公开(公告)日:2024-03-28
申请号:US17951410
申请日:2022-09-23
Applicant: Apple Inc.
Inventor: Fei Tan , Keith Lyon , Tong Chen , Chin Han Lin , Xiaofeng Fan , Arnaud Laflaquiere
CPC classification number: H01S5/0262 , G01S7/4812 , G02B7/287 , G03B13/20 , G03B13/36 , H01L31/125 , H01S5/042 , H01S5/423
Abstract: Disclosed herein are electronic devices that include arrays of dual function light transmit and receive pixels. The pixels of such arrays include a photodetector (PD) structure and a vertical-cavity, surface-emitting laser (VCSEL) diode, both formed in a common stack of epitaxial semiconductor layers. The pixels of the array may be configured by a controller or processor to function either as a light emitter by biasing the VCSEL diode, or as a light detector or receiver by a different bias applied to the PD structure, and this functionality may be altered in time. The array of dual function pixels may be positioned interior to an optical display of an electronic device, in some cases to provide depth sensing or autofocus. The array of pixels may be registered with a camera of an electronic device, such as to provide depth sensing or autofocus.
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公开(公告)号:US20210003385A1
公开(公告)日:2021-01-07
申请号:US16913645
申请日:2020-06-26
Applicant: Apple Inc.
Inventor: Fei Tan , Arnaud Laflaquiere , Chin Han Lin , Keith Lyon , Marc A. Drader , Weiping Li
Abstract: Disclosed herein are self-mixing interferometry (SMI) sensors, such as may include vertical cavity surface emitting laser (VCSEL) diodes and resonance cavity photodetectors (RCPDs). Structures for the VCSEL diodes and RCPDs are disclosed. In some embodiments, a VCSEL diode and an RCPD are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate. In some embodiments, a first and a second VCSEL diode are laterally adjacent and formed from a common set of semiconductor layers epitaxially formed on a common substrate, and an RCPD is formed on the second VCSEL diode. In some embodiments, a VCSEL diode may include two quantum well layers, with a tunnel junction layer between them. In some embodiments, an RCPD may be vertically integrated with a VCSEL diode.
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公开(公告)号:US10438987B2
公开(公告)日:2019-10-08
申请号:US15713477
申请日:2017-09-22
Applicant: Apple Inc.
Inventor: Shingo Mandai , Cristiano L. Niclass , Nobuhiro Karasawa , Xiaofeng Fan , Arnaud Laflaquiere , Gennadiy A. Agranov
IPC: H01L27/146 , H04N5/355 , H04N5/3745 , G01S7/486 , H04N5/357 , H04N5/376 , H04N5/378 , H01L31/107 , H04N5/369 , H01L31/02 , H01L31/0352
Abstract: A back-illuminated single-photon avalanche diode (SPAD) image sensor includes a sensor wafer stacked vertically over a circuit wafer. The sensor wafer includes one or more SPAD regions, with each SPAD region including an anode gradient layer, a cathode region positioned adjacent to a front surface of the SPAD region, and an anode avalanche layer positioned over the cathode region. Each SPAD region is connected to a voltage supply and an output circuit in the circuit wafer through inter-wafer connectors. Deep trench isolation elements are used to provide electrical and optical isolation between SPAD regions.
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