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    Real-Time Reticle Curvature Sensing
    1.
    发明申请
    Real-Time Reticle Curvature Sensing 有权
    实时光栅曲率感应

    公开(公告)号：US20150220005A1

    公开(公告)日：2015-08-06

    申请号：US14423082

    申请日：2013-08-01

    申请人： ASML Holding N.V. ,  ASML Netherlands N.V.

    发明人： Christopher Charles Ward ,  Martinus Hendrikus Antonius Leenders ,  Mark Josef Schuster ,  Christiaan Louis Valentin

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70616 ,  G03F1/14 ,  G03F7/24 ,  G03F7/703 ,  G03F7/70783 ,  G03F7/7085 ,  G03F9/7026

    摘要： A system and method that bends a reticle and senses a curvature of a bent reticle in real-time. The system includes movable reticle stage, reticle vacuum clamps, sensor systems, and reticle bender. The reticle bender comprises piezo actuators. The sensor systems comprises measurement targets and corresponding sensors. The sensors are attached to the movable reticle stage and the measurement targets are attached to the reticle clamps, the reticle bender, or on reticle surfaces. The system is configured to determine a width of the reticle or distance between measurement targets at opposing ends of the reticle, measure a first rotational angle at a first end of the reticle, and measure a second local rotational angle at a second end of the reticle that is opposite to the first end. Based on the width or distance and the first and second angles, a field curvature of the reticle is determined.

    摘要翻译： 弯曲掩模版并实时感测弯曲掩模版的曲率的系统和方法。 该系统包括可动标线台，光罩真空夹，传感器系统和光罩弯曲机。 光罩弯曲机包括压电致动器。 传感器系统包括测量目标和相应的传感器。 传感器连接到可动标线片台上，并且测量目标附着到标线夹，标线弯曲器或掩模版表面上。 该系统被配置为确定掩模版的宽度或掩模版的相对端处的测量目标之间的距离，测量在光罩的第一端处的第一旋转角度，并且在光罩的第二端处测量第二局部旋转角度 这与第一端相反。 基于宽度或距离以及第一和第二角度，确定掩模版的场曲率。