公开(公告)号：US20210072088A1

公开(公告)日：2021-03-11

申请号：US16965753

申请日：2019-01-15

Applicant: ASML Netherlands B.V.

Inventor： Engelbertus Antonius Fransiscus VAN DER PASCH ,  Maarten Jozef JANSEN ,  Suzanne Johanna Antonetta Geertruda COSIJNS ,  Koen Govert Olivier VAN DE MEERAKKER ,  Ivo WIDDERSHOVEN

IPC: G01J9/02 ,  G01B11/00 ,  G03F7/00 ,  G03F7/20

Abstract: The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length. The interferometer system comprises: a beam splitter to split a light beam in a first measurement beam and a second measurement beam; at least one optic element to guide the first measurement beam, at least partially, along the first reflection path and the second measurement beam, at least partially, along the second reflection path; a first light sensor arranged at an end of the first reflection path to receive the first measurement beam and to provide a first sensor signal on the basis of the first measurement beam; a second light sensor arranged at an end of the second reflection path to receive the second measurement beam and to provide a second sensor signal on the basis of the second measurement beam; and a processing unit to determine a wavelength or change in wavelength on the basis of the first sensor signal and the second sensor signal.

公开(公告)号：US20230408933A1

公开(公告)日：2023-12-21

申请号：US18037641

申请日：2021-10-25

Applicant: ASML Netherlands B.V.

Inventor： Maarten Jozef JANSEN

IPC: G03F7/00 ,  G01B9/02001

CPC classification number: G03F7/706845 ,  G01B9/02007

Abstract: The invention provides a positioning system to determine an absolute position of a moveable target relative to a reference, comprising an interferometer system with a first light source to emit light at a fixed frequency and a second light source to emit light at at least two different frequencies. The positioning system is configured to determine, based on movement of the target, a phase difference curve associated with a first frequency of the second light source and a phase difference curve associated with a second frequency of the second light source as a function of a phase difference associated with the fixed frequency of the first light source and to determine a cross-point to determine the absolute position of the moveable target. The invention also relates to a lithographic apparatus and corresponding method.

公开(公告)号：US20230168077A1

公开(公告)日：2023-06-01

申请号：US17920751

申请日：2021-03-22

Applicant: ASML Netherlands B.V.

Inventor： Maarten Jozef JANSEN ,  Ping LIU

IPC: G01B9/02055 ,  G01B9/02056 ,  G01B9/02001 ,  G03F7/20

CPC classification number: G01B9/02072 ,  G01B9/02059 ,  G01B9/02007 ,  G03F7/70516

Abstract: The invention provides a method for calibration of an optical measurement system, which may be a heterodyne interferometer system, wherein a first optical axis and a second optical axis have a different optical path length, the method comprises: ∘measuring a first measurement value along the first optical axis using a first measurement beam, ∘measuring a second measurement value along the second optical axis using a second measurement beam, ∘changing a wavelength of the first measurement beam and the second measurement beam, ∘measuring a further first measurement value along the first optical axis using the first measurement beam with changed wavelength, measuring a further second measurement value along the second optical axis using the second measurement beam with changed wavelength, ∘determining a cyclic error of the optical measurement system on the basis of the measured values, and ∘storing a corrective value based on the cyclic error.

公开(公告)号：US20230332880A1

公开(公告)日：2023-10-19

申请号：US18027851

申请日：2021-08-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Jozef JANSEN

IPC: G01B9/02015 ,  G01B9/02091

CPC classification number: G01B9/02028 ,  G01B9/02091 ,  G01B2290/45

Abstract: Interferometer system including a first detector for receiving a first measurement beam travelling to a reference surface; a second detector for receiving a second measurement beam travelling to the target surface; a reference variable delay path and/or measurement variable delay path and a delay path controller for adapting a delay length. A reference spectral coherence pulse occurs at the first detector, at a reference coherence arrangement and a measurement spectral coherence pulse at the second detector at a measurement coherence arrangement. A control unit receives a reference coherence signal from the first detector, and a measurement coherence signal from the second detector, and determines a zero-position of the target surface based on the reference coherence signal and the measurement coherence signal, and based on the reference coherence arrangement and the measurement coherence arrangement and/or a delay path difference between the reference coherence arrangement and the measurement coherence arrangement.

公开(公告)号：US20220137517A1

公开(公告)日：2022-05-05

申请号：US17434309

申请日：2020-01-30

Applicant: ASML Netherlands B.V.

Inventor： Maarten Jozef JANSEN ,  Frank AUER

IPC: G03F7/20

Abstract: The invention provides a stage system comprising a stage (ST) which is movable in respect of a reference structure. One of the stage and the reference structure comprises a reflective surface (REFS). An optical position sensor (IF1) is arranged at the other one of the stage and the reference structure and is configured to determine a position of the reflective surface relative to the optical position sensor. An optical shape sensor (IF2) is configured to determine a shape of the reflective surface. The stage system further comprises a position measurement controller configured to derive a stage position of the stage from the position of the reflective surface relative to the optical position sensor and from the shape of the reflective surface as determined by the optical shape sensor.

公开(公告)号：US20190265019A1

公开(公告)日：2019-08-29

申请号：US16311193

申请日：2017-06-29

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Jozef JANSEN ,  Engelbertus Antonius Fransiscus VAN DER PASCH ,  Suzanne Johanna Antonetta Geertruda COSIJNS

IPC: G01B9/02 ,  G03F7/20

Abstract: An interferometer system, including a heterodyne interferometer and a processing system. The heterodyne interferometer is arranged to provide a reference signal and a measurement signal. The reference signal has a reference phase. The measurement signal has a measurement phase and an amplitude. The processing system is arranged to determine a cyclic error of the heterodyne interferometer based on the reference phase, the measurement phase and the amplitude.

公开(公告)号：US20240061351A1

公开(公告)日：2024-02-22

申请号：US18269547

申请日：2021-12-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Jozef JANSEN

IPC: G03F7/00 ,  G01B9/02003 ,  G01B9/02055

CPC classification number: G03F7/70775 ,  G01B9/02003 ,  G01B9/0207

Abstract: An interferometer system includes an optics system configured to allow a first light beam to travel along a measurement path including a target, and a second light beam to travel along a fixed reference path excluding the target; and a signal generator configured to introduce a power-modulated optical signal in the measurement path or the reference path to determine jitter caused by components of the interferometer system downstream of the signal generator.

公开(公告)号：US20240011762A1

公开(公告)日：2024-01-11

申请号：US18023482

申请日：2021-07-20

Applicant: ASML Netherlands B.V.

Inventor： Maarten Jozef JANSEN

IPC: G01B9/02018 ,  G02B3/00 ,  G02B26/00

CPC classification number: G01B9/02018 ,  G02B3/0087 ,  G02B26/001

Abstract: A compact dual pass interferometer for a plane mirror interferometer configured to receive an input radiation beam from a light source. An optical component has a partially reflective surface arranged to reflect a first portion of the input radiation beam to follow a first optical path directed towards an output terminal and further arranged to transmit a second portion of the input radiation beam to follow a second optical path, directed towards a first location on a reflective target surface and back to the partially reflective surface, then to a second location on the reflective target surface and back to the partially reflective surface, whereupon the second optical path is directed through the partially reflective surface to be recombined with the first optical path to provide a recombined optical path configured to provide an output radiation beam. The output terminal configured to deliver the output radiation beam to a detector.

公开(公告)号：US20230324164A1

公开(公告)日：2023-10-12

申请号：US18203172

申请日：2023-05-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Jozef JANSEN ,  Manoj Kumar MRIDHA ,  Engelbertus Antonius Fransiscus VAN DER PASCH

IPC: G01B9/02055 ,  G01B9/02002 ,  G01J9/02 ,  G03F7/20

CPC classification number: G01B9/02002 ,  G01B9/0207 ,  G01J9/02 ,  G03F7/70775 ,  G01B2290/60

Abstract: An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.

公开(公告)号：US20220205775A1

公开(公告)日：2022-06-30

申请号：US17613124

申请日：2020-05-11

Applicant: ASML NETHERLANDS B.V.

Inventor： Maarten Jozef JANSEN ,  Manoj Kumar MRIDHA ,  Engelbertus Antonius Fransiscus VAN DER PASCH

IPC: G01B9/02002 ,  G01B9/02055 ,  G01J9/02 ,  G03F7/20

Abstract: An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.