公开(公告)号：US20180212397A1

公开(公告)日：2018-07-26

申请号：US15746730

申请日：2015-07-22

Applicant: Academy of Opto-Electronics, Chinese Academy of Sciences

Inventor： Yu WANG ,  Yi ZHOU ,  Xingliang SONG ,  Pengfei SHA ,  Yuanyuan FAN ,  Jiangshan ZHAO ,  Haiyan SHI ,  Hui LI ,  Jinbin DING ,  Yaoying SHAN ,  Qian WANG ,  Qianwei CAI ,  Zhuojun PENG

IPC: H01S3/23 ,  H01S3/11 ,  H01S3/034 ,  H01S3/038 ,  H01S3/083 ,  H01S3/081

CPC classification number: H01S3/2308 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/034 ,  H01S3/038 ,  H01S3/076 ,  H01S3/0816 ,  H01S3/0835 ,  H01S3/1127 ,  H01S3/225 ,  H01S3/23 ,  H01S3/235

Abstract: The present disclosure provides an excimer laser system. A master oscillator chamber may generate laser pulses with a narrowed line width and a small energy by means of a line width narrowing module, as a seed light. The seed light is refracted by a master oscillator wavefront engineering box and then incident into a power amplifier chamber through a beam splitting system. The beam splitting system, a first high reflectance mirror, a second high reflectance mirror and a third high reflectance mirror may constitute a quadrilateral annular optical path, The power amplifier chamber may have a first pair of Brewster windows and a second pair of Brewster windows, wherein the first pair of Brewster windows is located in a first optical path of the annular optical path along with a discharging electrode of the power amplifier chamber, and the second pair of Brewster windows is located in a second optical path of annular optical path which is parallel to a first amplification optical path. The present disclosure reduces the length of a ring cavity of an excimer laser system with a ring cavity structure, increasing the amplification times and achieving a deeper gain saturation amplification than a traditional structure, thereby improving the output characteristic of the excimer laser system.

公开(公告)号：US20150333468A1

公开(公告)日：2015-11-19

申请号：US14646176

申请日：2013-02-07

Applicant: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES

Inventor： Bin LIU ,  Jinbin DING ,  Kuibo WANG ,  Yu WANG ,  Yi ZHOU ,  Jiangshan ZHAO

IPC: H01S3/036 ,  H01S3/038 ,  H01S3/225

CPC classification number: H01S3/036 ,  H01S3/03 ,  H01S3/038 ,  H01S3/076 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2308

Abstract: The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.

Abstract translation: 本公开提出了一种具有对称构造并包括两对电极的排放腔的流动引导装置; 流动引导装置包括分别对应于一对两对电极的两个转子，其安装位置分别关于放电腔的对称平面对称，并且在电极的下方，其旋转轴线平行于 电极的轴向方向平行于排出腔的底面，并且两个转子具有相反的旋转方向和相同的转速。 导流装置还包括扰流板和导流板，使得当流过放电区域时，排出气体流以高速和均匀的循环方式通过排出腔。 因此，保证放电质量，以提高激光器的能量和可靠性。