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公开(公告)号：US06753961B1
公开(公告)日：2004-06-22
申请号：US09956356
申请日：2001-09-18
IPC分类号： G01J400
CPC分类号： G01J3/447 , G01J4/00 , G01N21/211 , G01N21/274 , G01N2021/213
摘要： A spectroscopic ellipsometer having a multiwavelength light source, spectrometer (or wavelength-scanning monochromator and photodetector), a polarizer and polarization analyzer, and one or more objectives in the illumination and collection light paths, further comprises a stationary polarization modulator that modulates the light polarization versus wavelength. Modulator can be an optically active crystal rotating the linear polarization plane by a different angle for each wavelength or a non-achromatic waveplate retarder that varies the relative phase delay of the polarization components periodically over wavelength. The measured spectrum can be used to characterize selected features or parameters of a sample, e.g. by comparison with one or more theoretical spectra.
摘要翻译： 具有多波长光源，光谱仪（或波长扫描单色仪和光电检测器），偏振器和偏振分析器以及照明和采集光路中的一个或多个目标的光谱椭偏仪还包括调制光偏振的固定偏振调制器 对波长。 调制器可以是旋转线性偏振平面对于每个波长旋转不同角度的光学活性晶体，或者是在波长周期性地改变偏振分量的相对相位延迟的非消色差波片延迟器。 测量的光谱可用于表征所选择的特征或样品的参数，例如。 通过与一个或多个理论光谱进行比较。
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公开(公告)号：US07158229B2
公开(公告)日：2007-01-02
申请号：US11399133
申请日：2006-04-06
IPC分类号： G01J3/28
CPC分类号： G01J3/02 , G01J3/0224 , G01J3/0243 , G01J3/28 , G01N21/21 , G01N21/31 , G01N21/956 , G01N2021/213 , G02B5/3083 , G02B27/28 , G02B27/286 , G02B27/288 , G03F7/70625 , G03F7/70991
摘要： A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.
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公开(公告)号：US06667805B2
公开(公告)日：2003-12-23
申请号：US09932548
申请日：2001-08-17
IPC分类号： G01J328
CPC分类号： G01N21/31 , G01J3/02 , G01J3/0224 , G01J3/0243 , G01J3/28 , G01N21/956 , G02B5/3083 , G02B27/28
摘要： A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a Lyot depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The Lyot depolarizer varies polarization with wavelength. Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, may be narrower than the wavelength resolution of the instrument.
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4.发明授权公开(公告)号：US07248362B2
公开(公告)日：2007-07-24
申请号：US11599906
申请日：2006-11-15
IPC分类号： G01J3/28
CPC分类号： G01J3/02 , G01J3/0224 , G01J3/0243 , G01J3/28 , G01N21/21 , G01N21/31 , G01N21/956 , G01N2021/213 , G02B5/3083 , G02B27/28 , G02B27/286 , G02B27/288 , G03F7/70625 , G03F7/70991
摘要： A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.
摘要翻译： 用于测量样品性质的小点成像光谱仪器具有结合在系统的偏振引导部件（例如分束器）之间的偏振加扰元件，例如双折射板去偏振器，以及显微镜物镜 系统。 板去极化器可以使波长偏振，并且可以是具有两个板的Lyot去极化器或具有多于两个板（例如三板去极化器）的去极化器。 可以通过数据处理技术去除所得测量光谱中的正弦扰动，或者如果消偏振器是厚的或高度双折射的，则扰动可能比仪器的波长分辨率窄。
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公开(公告)号：US07099081B2
公开(公告)日：2006-08-29
申请号：US10081078
申请日：2002-02-21
CPC分类号： G01J3/02 , G01J3/0224 , G01J3/0243 , G01J3/28 , G01N21/21 , G01N21/31 , G01N21/956 , G01N2021/213 , G02B5/3083 , G02B27/28 , G02B27/286 , G02B27/288 , G03F7/70625 , G03F7/70991
摘要： A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.
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6.发明授权公开(公告)号：US07289219B2
公开(公告)日：2007-10-30
申请号：US11105099
申请日：2005-04-13
CPC分类号： G01B11/02 , G01J3/02 , G01J3/0294 , G01N21/211 , G01N21/25 , G01N21/474 , G01N21/9501 , G01N21/956 , G01N2021/213
摘要： An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.
摘要翻译： 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。
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公开(公告)号：US06919958B2
公开(公告)日：2005-07-19
申请号：US10397917
申请日：2003-03-26
申请人： Fred E. Stanke , Clinton B. Carlisle , Hung Van Pham , Edric Tong , Douglas E. Ruth , James M. Cahill, Jr. , Michael Weber-Grabau , Elliot Burke , Adam E. Norton
发明人： Fred E. Stanke , Clinton B. Carlisle , Hung Van Pham , Edric Tong , Douglas E. Ruth , James M. Cahill, Jr. , Michael Weber-Grabau , Elliot Burke , Adam E. Norton
IPC分类号： B24B49/12 , G01B11/06 , G01B11/30 , G01N21/21 , G01N21/95 , H01L21/66 , H01L21/67 , G01N21/88
CPC分类号： H01L21/67 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。
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公开(公告)号：US06572456B2
公开(公告)日：2003-06-03
申请号：US09927142
申请日：2001-08-10
申请人： Michael Weber-Grabau , Ivelin A. Anguelov , Edric H. Tong , Adam E. Norton , Fred E. Stanke , Badru D. Hyatt
发明人： Michael Weber-Grabau , Ivelin A. Anguelov , Edric H. Tong , Adam E. Norton , Fred E. Stanke , Badru D. Hyatt
IPC分类号： B24B700
CPC分类号： B24B37/013 , B24B49/02 , B24B49/12
摘要： A wafer measurement apparatus (10, 110) and method for measuring a film thickness property of a wafer (30) that does not require a water bath or complicated wafer handling apparatus. The apparatus includes a chuck (16) having an upper surface (20) for supporting the wafer, and a perimeter (18). Also included is a metrology module (50) for measuring one or more film thickness properties. The metrology module is arranged adjacent the chuck upper surface and has a measurement window (60) with a lower surface (64) arranged substantially parallel to the chuck upper surface, thereby defining an open volume (68). The apparatus includes a water supply system in fluid communication with the open volume via nozzles (70) for flowing water through and back-filling the volume in a manner that does not produce bubbles within the volume. A catchment (40) surrounding the chuck may be used to catch water flowing out of the volume. Methods of performing measurements of one or more wafer film properties are also described.
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9.发明授权公开(公告)号：US07471392B2
公开(公告)日：2008-12-30
申请号：US11903238
申请日：2007-09-21
IPC分类号： G01J3/28
CPC分类号： G01B11/02 , G01J3/02 , G01J3/0294 , G01N21/211 , G01N21/25 , G01N21/474 , G01N21/9501 , G01N21/956 , G01N2021/213
摘要： An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.
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10.发明授权公开(公告)号：US06909507B2
公开(公告)日：2005-06-21
申请号：US10857223
申请日：2004-05-28
IPC分类号： G01N21/21 , G01N21/25 , G01N21/47 , G01N21/956 , G01J4/00
CPC分类号： G01B11/02 , G01J3/02 , G01J3/0294 , G01N21/211 , G01N21/25 , G01N21/474 , G01N21/9501 , G01N21/956 , G01N2021/213
摘要： An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.
摘要翻译： 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中晶片可以以任意取向提供。
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