Integrated inspection system and defect correction method
    8.
    发明授权
    Integrated inspection system and defect correction method 失效
    综合检测系统和缺陷校正方法

    公开(公告)号:US07371590B2

    公开(公告)日:2008-05-13

    申请号:US11285331

    申请日:2005-11-21

    IPC分类号: H01L21/66

    摘要: A system for the inspection of and a process for the correction of defects in a microreplicated optical display film manufacturing process. The process steps of manufacturing a master, a plurality of shims from the master, and a multiplicity of display films from each shim are integrated with a systemic defect identification and correction process. Each primary manufacturing step has its own inspection system and correction process where defect information for that step of the process is fed back and analyzed; and from that analysis the subprocess is adjusted to eliminate or reduce the detected defect. The systemic defect is identified as to its source and then fed back and analyzed in the correction step of the respective subprocess in order to cure the root of the defect.

    摘要翻译: 用于微复制光学显示膜制造工艺中的缺陷校正的检查系统和校正处理。 制造主机,来自主机的多个垫片以及来自每个垫片的多个显示胶片的工艺步骤与系统缺陷识别和校正处理相结合。 每个主要制造步骤都有自己的检测系统和校正过程,其中反馈和分析该过程的缺陷信息; 并从该分析中调整子过程以消除或减少检测到的缺陷。 将系统缺陷确定为其源,然后在相应子过程的校正步骤中反馈并分析,以固化缺陷的根部。

    Integrated inspection system and defect correction method
    10.
    发明申请
    Integrated inspection system and defect correction method 失效
    综合检测系统和缺陷校正方法

    公开(公告)号:US20070117225A1

    公开(公告)日:2007-05-24

    申请号:US11285331

    申请日:2005-11-21

    IPC分类号: H01L21/66

    摘要: A system for the inspection of and a process for the correction of defects in a microreplicated optical display film manufacturing process. The process steps of manufacturing a master, a plurality of shims from the master, and a multiplicity of display films from each shim are integrated with a systemic defect identification and correction process. Each primary manufacturing step has its own inspection system and correction process where defect information for that step of the process is fed back and analyzed; and from that analysis the subprocess is adjusted to eliminate or reduce the detected defect. The systemic defect is identified as to its source and then fed back and analyzed in the correction step of the respective subprocess in order to cure the root of the defect.

    摘要翻译: 用于微复制光学显示膜制造工艺中的缺陷校正的检查系统和校正处理。 制造主机,来自主机的多个垫片以及来自每个垫片的多个显示胶片的工艺步骤与系统缺陷识别和校正处理相结合。 每个主要制造步骤都有自己的检测系统和校正过程,其中反馈和分析该过程的缺陷信息; 并从该分析中调整子过程以消除或减少检测到的缺陷。 将系统缺陷确定为其源,然后在相应子过程的校正步骤中反馈并分析,以固化缺陷的根部。