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1.发明授权Device for shifting frozen specimen, for use in scanning type electron microscope 失效用于移动冷冻样品的装置，用于扫描型电子显微镜
公开(公告)号：US4227080A
公开(公告)日：1980-10-07
申请号：US966040
申请日：1978-12-04
申请人： Akimitsu Okura , Syobu Saito , Motohide Ukiana
发明人： Akimitsu Okura , Syobu Saito , Motohide Ukiana
摘要： A specimen holder holding a frozen specimen is adapted to engage the opened end of a recess in a specimen support, such that the frozen specimen is exposed to the inside of the recess. The mutually engaging specimen holder and the specimen support are shifted to a specimen chamber. In the specimen chamber, the specimen holder is separated from the specimen support and is received by a specimen receiving chamber. The specimen holder received by the specimen receiving member can be moved together with the latter to a specimen treating chamber. Cooling means for cooling the specimen receiving member is unitarily secured to the specimen receiving member, so as to be moved together with the specimen receiving member.
摘要翻译： 保持冷冻样品的样品架适于接合样品支架中的凹部的开口端，使得冷冻样品暴露于凹部内部。 将相互接合的试样架和试样支架移动到试样室。 在样品室中，样品架与样品支架分离，并被样品接收室接收。 由样本接收构件容纳的试样保持架可与后者一起移动到试样处理室。 用于冷却试样接收构件的冷却装置一体地固定到试样接收构件，以便与试样接收构件一起移动。
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2.发明授权Preformed yarn useful in forming composite articles and process of producing same 失效用于成型复合制品的预成型纱线及其制造方法
公开(公告)号：US4772502A
公开(公告)日：1988-09-20
申请号：US078978
申请日：1987-07-29
申请人： Akimitsu Okura , Toshoku Cho , Takao Nakagawa , Shimpei Gomi , Takuya Ueda
发明人： Akimitsu Okura , Toshoku Cho , Takao Nakagawa , Shimpei Gomi , Takuya Ueda
CPC分类号： C04B35/83 , Y10T428/237 , Y10T428/249928 , Y10T428/25 , Y10T428/292 , Y10T428/2929 , Y10T428/2933 , Y10T428/2964 , Y10T428/2978 , Y10T428/30
摘要： A preformed yarn useful in forming fiber-reinforced carbon composite articles is disclosed which includes a core of a multiplicity of inorganic reinforcing fibers, a mixed powder provided in the interstices between the fibers and including a finely divided carbonaceous binder pitch and a finely divided coke, and a flexible sleeve formed of a thermoplastic resin and surrounding the core.
摘要翻译： 公开了一种可用于形成纤维增强碳复合材料制品的预制纱线，其包括多个无机增强纤维的核心，在纤维之间的间隙中提供的混合粉末，并且包括细碎的碳质粘合剂沥青和细碎的焦炭， 以及由热塑性树脂形成并围绕该芯的柔性套管。
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公开(公告)号：US5147588A
公开(公告)日：1992-09-15
申请号：US536471
申请日：1990-06-12
申请人： Akimitsu Okura , Toushoku Chou , Nobuo Kamioka
发明人： Akimitsu Okura , Toushoku Chou , Nobuo Kamioka
CPC分类号： F16D69/023 , C04B35/52 , C04B35/83
摘要： A hybrid carbon/carbon composite and a method of manufacturing a hybrid carbon/carbon composite, wherein a raw material containing carbon fibers with two or more different lengths and meso-phase carbon as a binder are raw materials. The raw materials are kneaded in the presence of adhesives, dried and defibrated, then molded under heat and pressure by hot press, and thereafter subjected to heat treatment.
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公开(公告)号：US4902453A
公开(公告)日：1990-02-20
申请号：US201451
申请日：1988-06-02
申请人： Akimitsu Okura , Toshoku Cho , Takao Nakagawa , Shimpei Gomi , Takuya Ueda
发明人： Akimitsu Okura , Toshoku Cho , Takao Nakagawa , Shimpei Gomi , Takuya Ueda
CPC分类号： C04B35/83 , Y10T428/237 , Y10T428/249928 , Y10T428/25 , Y10T428/292 , Y10T428/2929 , Y10T428/2933 , Y10T428/2964 , Y10T428/2978 , Y10T428/30
摘要： A preformed yarn useful in forming fiber-reinforced carbon composite articles is disclosed which includes a core of a multiplicity of inorganic reinforcing fibers, a mixed powder provided in the interstices between the fibers and including a finely divided carbonaceous binder pitch and a finely divided coke, and a flexible sleeve formed of a thermoplastic resin and surrounding the core.
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公开(公告)号：US07274017B2
公开(公告)日：2007-09-25
申请号：US11137445
申请日：2005-05-26
IPC分类号： H01J37/00
CPC分类号： H01J37/241 , H01J2237/0206
摘要： Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.
摘要翻译： 公开了一种电子束装置和方法，其可以保持使高压电缆和高压引入绝缘体之间的间隙中含有的含水量最小化的状态，从而防止高压放电和电流泄漏的产生。 该装置包括用于向加速电极施加高电压同时消除电子从电子源的释放并且用于检测与此时加速电压的变化相对应的发射电流的变化的装置。 此外，该装置包括当该发射电流的变化超过预定值时发出警告通知或警告的装置。 此外，该装置包括用于使干燥气体在电子枪的高压电缆和高压引入绝缘体之间的间隙部分中流动从而对所述间隙部分进行除湿的装置。 通过这样的布置，可以防止由于间隙部分的水分含量增加引起的高压放电以及由于漏电流引起的电子束的不稳定性。
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公开(公告)号：US06949752B2
公开(公告)日：2005-09-27
申请号：US10295951
申请日：2002-11-18
IPC分类号： H01J37/06 , G09G1/04 , H01J37/065 , H01J37/24 , H01J37/248 , H01L21/027 , H05B39/04
CPC分类号： H01J37/241 , H01J2237/0206
摘要： Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.
摘要翻译： 公开了一种电子束装置和方法，其可以保持使高压电缆和高压引入绝缘体之间的间隙中含有的含水量最小化的状态，从而防止高压放电和电流泄漏的产生。 该装置包括用于向加速电极施加高电压同时消除电子从电子源的释放并且用于检测与此时加速电压的变化相对应的发射电流的变化的装置。 此外，该装置包括当该发射电流的变化超过预定值时发出警告通知或警告的装置。 此外，该装置包括用于使干燥气体在电子枪的高压电缆和高压引入绝缘体之间的间隙部分中流动从而对所述间隙部分进行除湿的装置。 通过这样的布置，可以防止由于间隙部分的水分含量增加引起的高压放电以及由于漏电流引起的电子束的不稳定性。
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公开(公告)号：US5393977A
公开(公告)日：1995-02-28
申请号：US69573
申请日：1993-06-01
申请人： Akimitsu Okura , Mitsugu Sato , Osamu Yamada , Yasushi Nakaizumi , Eiichi Hazaki
发明人： Akimitsu Okura , Mitsugu Sato , Osamu Yamada , Yasushi Nakaizumi , Eiichi Hazaki
CPC分类号： H01J37/265
摘要： A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.
摘要翻译： 用电子束扫描样本，以产生样本的信号特征，从而根据产生的信号产生图像。 提供了一种存储器，用于存储与用于指定样本的识别信息相关联的扫描电子显微镜的操作条件。 指定识别信息，从而从存储器读出与指定的识别信息相对应的至少一个操作条件，并且自动设置读出操作条件，使得扫描电子显微镜在设定的操作条件下操作。
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公开(公告)号：US20050218777A1
公开(公告)日：2005-10-06
申请号：US11137445
申请日：2005-05-26
IPC分类号： H01J37/06 , G09G1/04 , H01J37/065 , H01J37/24 , H01J37/248 , H01L21/027 , H05B39/04
CPC分类号： H01J37/241 , H01J2237/0206
摘要： Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion. With such an arrangement, it is possible to prevent high-voltage discharge due to an increase in water content of the gap portion and also instability of an electron beam due to a leakage current.
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公开(公告)号：US6031235A
公开(公告)日：2000-02-29
申请号：US339300
申请日：1999-06-24
申请人： Yasuhiko Ishida , Minoru Hiroki , Toshiaki Kobari , Osamu Satou , Yasushi Nakaizumi , Akimitsu Okura , Hideiti Kimura
发明人： Yasuhiko Ishida , Minoru Hiroki , Toshiaki Kobari , Osamu Satou , Yasushi Nakaizumi , Akimitsu Okura , Hideiti Kimura
CPC分类号： F16K51/02
摘要： A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.
摘要翻译： 将真空容器抽真空以保持在超高真空度。 提供阀装置用于将真空容器的内部与外部连接和断开，并且包括由具有0.1％以下的吸水率和2×10 -6以下的吸气率的高聚物制成的真空密封 （Torrxl / sec / cm 2：200℃）以下。
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公开(公告)号：US5412209A
公开(公告)日：1995-05-02
申请号：US982768
申请日：1992-11-27
申请人： Tadashi Otaka , Akimitsu Okura , Hiroshi Iwamoto , Hideo Todokoro , Tsutomu Komoda , Issei Tobita
发明人： Tadashi Otaka , Akimitsu Okura , Hiroshi Iwamoto , Hideo Todokoro , Tsutomu Komoda , Issei Tobita
CPC分类号： H01J37/28 , H01J2237/2448 , H01J2237/281
摘要： An electron beam apparatus comprises an electron beam source, a unit for irradiating an electron beam on a specimen, a detector for secondary electrons, an electrode for generating an electric field sufficient to draw out secondary electrons in a recess in the specimen from the recess, and a unit for generating a magnetic field for focusing secondary electrons drawn out of the recess. With this construction, the secondary electrons drawn out of the recess by the electric field reach the detector without being attracted by the electrode. By adopting this construction, a contact hole of high aspect ratio formed in a semiconductor device and having a small diameter and a large depth can be observed.
摘要翻译： 电子束装置包括电子束源，用于在试样上照射电子束的单元，用于二次电子的检测器，用于产生足以从所述凹部在所述试样中的凹陷中抽取二次电子的电场的电极， 以及用于产生用于聚焦从凹部拉出的二次电子的磁场的单元。 利用这种结构，通过电场从凹槽中拉出的二次电子到达检测器而不被电极吸引。 通过采用这种结构，可以观察到形成在半导体器件中并具有小直径和大深度的高纵横比的接触孔。
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