公开(公告)号：US5985708A

公开(公告)日：1999-11-16

申请号：US816596

申请日：1997-03-13

申请人： Akio Nakagawa ,  Naoharu Sugiyama ,  Tomoko Matsudai ,  Norio Yasuhara ,  Atsusi Kurobe ,  Hideyuki Funaki ,  Yusuke Kawaguchi ,  Yoshihiro Yamaguchi

发明人： Akio Nakagawa ,  Naoharu Sugiyama ,  Tomoko Matsudai ,  Norio Yasuhara ,  Atsusi Kurobe ,  Hideyuki Funaki ,  Yusuke Kawaguchi ,  Yoshihiro Yamaguchi

IPC分类号： H01L27/12 ,  H01L29/73 ,  H01L29/739 ,  H01L29/786 ,  H01L21/8249

CPC分类号： H01L29/78696 ,  H01L27/1203 ,  H01L29/7317 ,  H01L29/7394 ,  H01L29/78612 ,  H01L29/78624 ,  H01L29/78639 ,  H01L29/78645 ,  H01L29/78687

摘要： A semiconductor apparatus comprising a vertical type semiconductor device having a first conducting type semiconductor substrate, a drain layer formed on the surface of the semiconductor substrate, a drain electrode formed on the surface of the drain layer, a second conducting type base layer selectively formed on the surface of the semiconductor substrate opposite to the drain layer, a first conducting type source layer selectively formed on the surface of the second conducting type base layer, a source electrode formed on the first conducting type source layer and the second conducting type base layer, and a gate electrode formed in contact with the first conducting type source layer, the second conducting type base layer and the semiconductor substrate through a gate insulating film and a lateral semiconductor device having an insulating layer formed in a region of the surface of the semiconductor substrate different from the second conducting type base layer, and a polycrystalline semiconductor layer formed on the insulating layer and having a first conducting type region and a second conducting type region, wherein the first conducting type source layer of the vertical semiconductor device and the first conducting type region of the polycrystalline semiconductor layer are simultaneously formed.

摘要翻译： 一种半导体装置，包括具有第一导电型半导体衬底的垂直型半导体器件，形成在半导体衬底的表面上的漏极层，形成在漏极层的表面上的漏电极，第二导电型基极层， 所述半导体衬底的与所述漏极层相对的表面，选择性地形成在所述第二导电型基极层的表面上的第一导电型源极层，形成在所述第一导电型源极层和所述第二导电型基极层上的源电极， 以及通过栅极绝缘膜与第一导电型源极层，第二导电型基极层和半导体基板接触形成的栅电极，以及在半导体基板的表面的区域中形成有绝缘层的侧面半导体装置 不同于第二导电型基底层，和多晶 半导体层形成在绝缘层上并具有第一导电类型区域和第二导电类型区域，其中垂直半导体器件的第一导电型源极层和多晶半导体层的第一导电类型区域同时形成。

公开(公告)号：US5920087A

公开(公告)日：1999-07-06

申请号：US970103

申请日：1997-11-13

申请人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki

发明人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki

IPC分类号： H01L21/331 ,  H01L29/06 ,  H01L29/739 ,  H01L29/74 ,  H01L27/01 ,  H01L31/111

CPC分类号： H01L29/66325 ,  H01L29/0696 ,  H01L29/7394 ,  H01L29/7398

摘要： A sub-gate electrode is arranged to face, through a gate insulating film, a surface of a first p-type base layer which is interposed between a first n-type source layer and an n-type drift layer, and a surface of a second p-type base layer which is interposed between a second n-type source layer and the n-type drift layer and faces the first p-type base layer. A main gate electrode is arranged to face, through a gate insulating film, a surface of the second p-type base layer which is interposed between the second n-type source layer and the n-type drift layer and does not face the first p-type base layer. Three n-type MOSFETs are constructed such that one n-type channel is to be formed in the first p-type base layer and two n-type channels are to be formed in the second p-type base layer. The three channels are to be formed, so that the channel width is effectively enlarged and the current density is increased. The second p-type base layer has a length of 10 .mu.m or less in the drifting direction.

摘要翻译： 子栅电极配置成通过栅极绝缘膜与介于第一n型源极层和n型漂移层之间的第一p型基极层的表面和 第二p型基极层，其介于第二n型源极层和n型漂移层之间并且面向第一p型基极层。 主栅极布置成通过栅极绝缘膜面对介于第二n型源极层和n型漂移层之间的第二p型基极层的表面，并且不面向第一p 型基层。 构造三个n型MOSFET，使得在第一p型基极层中形成一个n型沟道，并且在第二p型基极层中形成两个n型沟道。 要形成三个通道，从而有效地扩大通道宽度，增加电流密度。 第二p型基层在漂移方向上的长度为10μm以下。

公开(公告)号：US5751022A

公开(公告)日：1998-05-12

申请号：US806153

申请日：1997-02-25

申请人： Norio Yasuhara ,  Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki

发明人： Norio Yasuhara ,  Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki

IPC分类号： H01L29/74 ,  H01L29/745 ,  H01L29/749 ,  H01L31/111

CPC分类号： H01L29/749 ,  H01L29/7412 ,  H01L29/7436 ,  H01L29/7455

摘要： A semiconductor device is disclosed having a thyristor region coupled to a semiconductor switching device and a semiconductor rectifier. During turn-off operation, holes are drained from the p-type base region of the thyristor region through the semiconductor rectifier and to the cathode of the thyristor. During turn-on, electrons are supplied to an n-type emitter region of the thyristor from the cathode electrode through the semiconductor switching device.

摘要翻译： 公开了具有耦合到半导体开关器件和半导体整流器的晶闸管区域的半导体器件。 在关断操作期间，从晶闸管区域的p型基极区域通过半导体整流器和晶闸管的阴极排出孔。 在导通期间，电子通过半导体开关器件从阴极电极提供给晶闸管的n型发射极区域。

公开(公告)号：US5731603A

公开(公告)日：1998-03-24

申请号：US701500

申请日：1996-08-22

申请人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki

发明人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki

IPC分类号： H01L21/331 ,  H01L29/06 ,  H01L29/739 ,  H01L29/74 ,  H01L27/01 ,  H01L31/111

CPC分类号： H01L29/66325 ,  H01L29/0696 ,  H01L29/7394 ,  H01L29/7398

摘要： A sub-gate electrode is arranged to face, through a gate insulating film, a surface of a first p-type base layer which is interposed between a first n-type source layer and an n-type drift layer, and a surface of a second p-type base layer which is interposed between a second n-type source layer and the n-type drift layer and faces the first p-type base layer. A main gate electrode is arranged to face, through a gate insulating film, a surface of the second p-type base layer which is interposed between the second n-type source layer and the n-type drift layer and does not face the first p-type base layer. Three n-type MOSFETs are constructed such that one n-type channel is to be formed in the first p-type base layer and two n-type channels are to be formed in the second p-type base layer. The three channels are to be formed, so that the channel width is effectively enlarged and the current density is increased. The second p-type base layer has a length of 10 .mu.m or less in the drifting direction.

公开(公告)号：US6064086A

公开(公告)日：2000-05-16

申请号：US72460

申请日：1998-05-05

申请人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki ,  Norio Yasuhara

发明人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki ,  Norio Yasuhara

IPC分类号： H01L21/331 ,  H01L29/06 ,  H01L29/739 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： H01L29/66325 ,  H01L29/0696 ,  H01L29/7394 ,  H01L29/7398

摘要： An n-type buffer layer and a p-type base layer are formed in the surface of the n.sup.- -type drift layer. A p.sup.+ -type drain layer is formed in the surface of the n-type buffer layer. An n.sup.+ -type source layer and a p.sup.+ -type contact layer are formed in the surface of the p-type base layer. A main gate electrode is arranged to face, through a gate oxide film, a surface of the p-type base layer which is interposed between the n.sup.+ -type source layer and the n.sup.- -type drift layer. An n-type relay layer is formed in the surface of the n.sup.- -type drift layer to face the n.sup.+ -type source layer through the p-type base layer under the main gate electrode. The n-type relay layer extends from the n.sup.- -type drift layer into the p-type base layer. The n-type relay layer decreases the channel resistance.

摘要翻译： 在n型漂移层的表面形成n型缓冲层和p型基底层。 在n型缓冲层的表面形成p +型漏极层。 在p型基底层的表面形成n +型源极层和p +型接触层。 主栅极布置成通过栅极氧化膜面对介于n +型源极层和n型漂移层之间的p型基极层的表面。 在n型漂移层的表面形成n型继电器层，通过主栅电极下方的p型基极层面对n +型源极层。 n型继电器层从n型漂移层延伸到p型基极层。 n型继电器层降低了通道电阻。

公开(公告)号：US5640040A

公开(公告)日：1997-06-17

申请号：US481097

申请日：1995-06-07

申请人： Akio Nakagawa ,  Norio Yasuhara ,  Tomoko Matsudai ,  Yoshihiro Yamaguchi ,  Ichiro Omura ,  Hideyuki Funaki

发明人： Akio Nakagawa ,  Norio Yasuhara ,  Tomoko Matsudai ,  Yoshihiro Yamaguchi ,  Ichiro Omura ,  Hideyuki Funaki

IPC分类号： H01L21/336 ,  H01L21/74 ,  H01L21/762 ,  H01L27/06 ,  H01L27/092 ,  H01L27/12 ,  H01L29/06 ,  H01L29/08 ,  H01L29/40 ,  H01L29/739 ,  H01L29/74 ,  H01L29/745 ,  H01L29/749 ,  H01L29/78 ,  H01L29/786 ,  H01L29/861 ,  H01L23/58

CPC分类号： H01L29/404 ,  H01L21/74 ,  H01L21/76264 ,  H01L21/76297 ,  H01L27/0623 ,  H01L27/0922 ,  H01L27/1203 ,  H01L29/0834 ,  H01L29/402 ,  H01L29/405 ,  H01L29/407 ,  H01L29/408 ,  H01L29/66772 ,  H01L29/7394 ,  H01L29/7436 ,  H01L29/7455 ,  H01L29/749 ,  H01L29/7824 ,  H01L29/7835 ,  H01L29/78624 ,  H01L29/8611 ,  H01L21/76275 ,  H01L21/76286 ,  H01L29/78603 ,  H01L2924/0002

摘要： A high breakdown voltage semiconductor device comprising a semiconductor substrate, an insulating layer formed on the semiconductor substrate, an active layer formed on the insulating layer and made of a high resistance semiconductor of a first conductivity type, a first impurity region of the first conductivity type formed in the active layer, and a second impurity region of a second conductivity type formed in the active layer and spaced apart from the first impurity region by a predetermined distance. The first impurity region is formed of diffusion layers. The diffusion layers are superimposed one upon another and differ in diffusion depth or diffusion window width, or both.

摘要翻译： 一种高耐压电压半导体器件，包括半导体衬底，形成在半导体衬底上的绝缘层，形成在绝缘层上并由第一导电类型的高电阻半导体形成的有源层，第一导电类型的第一杂质区 形成在有源层中的第二杂质区和形成在有源层中并与第一杂质区隔开预定距离的第二导电类型的第二杂质区。 第一杂质区由扩散层形成。 扩散层彼此叠加并且扩散深度或扩散窗宽度不同，或两者均不同。

公开(公告)号：US5592014A

公开(公告)日：1997-01-07

申请号：US484864

申请日：1995-06-07

申请人： Hideyuki Funaki ,  Akio Nakagawa ,  Norio Yasuhara ,  Tomoko Matsudai ,  Yoshihiro Yamaguchi ,  Ichiro Omura

发明人： Hideyuki Funaki ,  Akio Nakagawa ,  Norio Yasuhara ,  Tomoko Matsudai ,  Yoshihiro Yamaguchi ,  Ichiro Omura

IPC分类号： H01L21/336 ,  H01L21/762 ,  H01L27/06 ,  H01L27/092 ,  H01L27/12 ,  H01L29/06 ,  H01L29/40 ,  H01L29/739 ,  H01L29/74 ,  H01L29/745 ,  H01L29/749 ,  H01L29/78 ,  H01L29/786 ,  H01L29/861 ,  H01L23/58

CPC分类号： H01L29/404 ,  H01L21/76264 ,  H01L27/0623 ,  H01L27/0922 ,  H01L27/1203 ,  H01L29/402 ,  H01L29/405 ,  H01L29/407 ,  H01L29/408 ,  H01L29/66772 ,  H01L29/7394 ,  H01L29/7436 ,  H01L29/7455 ,  H01L29/749 ,  H01L29/7824 ,  H01L29/7835 ,  H01L29/78624 ,  H01L29/8611 ,  H01L21/76275 ,  H01L21/76286 ,  H01L2924/0002

摘要： A high breakdown voltage semiconductor apparatus comprises a substrate having an insulating layer formed thereon, a high resistance semiconductor layer of a first conductivity type formed on said insulating layer, a base region of the first conductivity type formed selectively in a surface region of the high resistance semiconductor layer, a drift region of a second conductivity type formed selectively in the surface region of the high resistance semiconductor layer so as not to reach the insulating layer, a source region of the second conductivity type formed in the base region, a drain region formed in the drift region, a gate electrode formed on a region between the source region and the drift region, with a gate insulating film interposed between the gate electrode and the region between the source region and the drift region, a source electrode provided in contact with the base region and the source region, a drain electrode provided in contact with the drain region. The dosage of impurities in the high resistance semiconductor layer is 2.times.10.sup.12 cm.sup.-2 to 3.times.10.sup.12 cm.sup.-2 and the dosage of impurities in the drift layer is 1.times.10.sup.12 cm.sup.-2 to 2.times.10.sup.12 cm.sup.-2.

摘要翻译： 一种高耐压电压半导体装置，包括：在其上形成有绝缘层的基板，形成在所述绝缘层上的第一导电类型的高电阻半导体层，所述第一导电类型的基极区选择性地形成在所述高电阻的表面区域中 半导体层，选择性地形成在高电阻半导体层的表面区域中以便不到达绝缘层的第二导电类型的漂移区域，形成在基极区域中的第二导电类型的源极区域，形成的漏极区域 在漂移区域中，形成在源极区域和漂移区域之间的区域上的栅电极，栅极绝缘膜插入在栅极电极和源极区域与漂移区域之间的区域中，源极电极与 所述基极区域和所述源极区域，设置成与所述漏极区域接触的漏极电极。 高电阻半导体层中的杂质用量为2×10 12 cm -2至3×10 12 cm -2，漂移层中的杂质用量为1×10 12 cm -2至2×10 12 cm -2。

公开(公告)号：US6163051A

公开(公告)日：2000-12-19

申请号：US154041

申请日：1998-09-16

申请人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki ,  Norio Yasuhara

发明人： Akio Nakagawa ,  Tomoko Matsudai ,  Hideyuki Funaki ,  Norio Yasuhara

IPC分类号： H01L21/331 ,  H01L29/06 ,  H01L29/739 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： H01L29/66325 ,  H01L29/0696 ,  H01L29/7394 ,  H01L29/7398

摘要： A high breakdown voltage semiconductor device comprising a first base region of a first conductivity type, a second base region of a second conductivity type, which is formed in a surface region of the first base region, a first gate insulation film formed on an inner wall of a first LOCOS groove formed passing through the second base region to reach the first base region, a first gate electrode formed on the first gate insulation film, a first source region of a first conductivity type, which is formed in a surface region of the second base region around the first LOCOS groove in such a manner as to contact with the first gate insulating film, a first drain region formed in a surface region of the first base region in such a manner as to be spaced apart from the second base region, a source electrode formed on the first source region and on the second base region, and a drain electrode formed on the first drain region.

摘要翻译： 一种高耐压电压半导体器件，包括第一导电类型的第一基极区域和形成在第一基极区域的表面区域中的第二导电类型的第二基极区域，形成在内壁上的第一栅极绝缘膜 形成为穿过第二基极区域以到达第一基极区域的第一LOCOS沟槽，形成在第一栅极绝缘膜上的第一栅极电极，形成在第一栅极绝缘膜的表面区域中的第一导电类型的第一源极区域， 第二基区，以与第一栅极绝缘膜接触的方式围绕第一LOCOS沟槽;第一漏极区，形成在第一基极区域的表面区域中，以与第二基极区域隔开; 形成在第一源极区域和第二基极区域上的源电极以及形成在第一漏极区域上的漏电极。

公开(公告)号：US5438220A

公开(公告)日：1995-08-01

申请号：US085056

申请日：1993-07-02

申请人： Akio Nakagawa ,  Norio Yasuhara ,  Tomoko Matsudai ,  Yoshihiro Yamaguchi ,  Ichiro Omura ,  Hideyuki Funaki

发明人： Akio Nakagawa ,  Norio Yasuhara ,  Tomoko Matsudai ,  Yoshihiro Yamaguchi ,  Ichiro Omura ,  Hideyuki Funaki

IPC分类号： H01L21/336 ,  H01L21/74 ,  H01L21/762 ,  H01L27/06 ,  H01L27/092 ,  H01L27/12 ,  H01L29/06 ,  H01L29/08 ,  H01L29/40 ,  H01L29/739 ,  H01L29/74 ,  H01L29/745 ,  H01L29/749 ,  H01L29/78 ,  H01L29/786 ,  H01L29/861

CPC分类号： H01L29/404 ,  H01L21/74 ,  H01L21/76264 ,  H01L21/76297 ,  H01L27/0623 ,  H01L27/0922 ,  H01L27/1203 ,  H01L29/0834 ,  H01L29/402 ,  H01L29/405 ,  H01L29/407 ,  H01L29/408 ,  H01L29/66772 ,  H01L29/7394 ,  H01L29/7436 ,  H01L29/7455 ,  H01L29/749 ,  H01L29/7824 ,  H01L29/7835 ,  H01L29/78624 ,  H01L29/8611 ,  H01L21/76275 ,  H01L21/76286 ,  H01L29/78603 ,  H01L2924/0002

摘要： A high breakdown voltage semiconductor device includes a semiconductor substrate, an insulating layer formed on the semiconductor substrate, an active layer formed on the insulating layer and made of a high resistance semiconductor of a first conductivity type, a first impurity region of the first conductivity type formed in the active layer, and a second impurity region of a second conductivity type formed in the active layer and spaced apart from the first impurity region by a predetermined distance. The first impurity region is formed of diffusion layers. The diffusion layers are superimposed one upon another and differ in diffusion depth or diffusion window width, or both.

摘要翻译： 高耐压半导体器件包括半导体衬底，形成在半导体衬底上的绝缘层，形成在绝缘层上并由第一导电类型的高电阻半导体形成的有源层，第一导电类型的第一杂质区 形成在有源层中的第二杂质区和形成在有源层中并与第一杂质区隔开预定距离的第二导电类型的第二杂质区。 第一杂质区由扩散层形成。 扩散层彼此叠加并且扩散深度或扩散窗宽度不同，或两者均不同。

公开(公告)号：US07432579B2

公开(公告)日：2008-10-07

申请号：US10959201

申请日：2004-10-07

申请人： Tomoko Matsudai ,  Kazutoshi Nakamura ,  Akio Nakagawa

发明人： Tomoko Matsudai ,  Kazutoshi Nakamura ,  Akio Nakagawa

IPC分类号： H01L29/47 ,  H01L29/872

CPC分类号： H01L27/0727

摘要： A MOS field-effect transistor includes a semiconductor substrate of a first-conductivity type, a semiconductor layer of the first-conductivity type, a source region of a second-conductivity type, a first drain region of the second-conductivity type, a resurf layer of the second-conductivity type provided in the surface of the semiconductor layer between the source region and the first drain region in contact with the first drain region, and having a lower impurity concentration than the first drain region, a gate insulation film, and a gate electrode provided on the gate insulation film between the source region and resurf layer. A Schottky barrier diode includes a second drain region of the second-conductivity type provided in the surface of the semiconductor layer separate from the first drain region in a direction away from the gate electrode, and a Schottky electrode provided on the semiconductor layer between the first and second drain regions.

摘要翻译： MOS场效应晶体管包括第一导电类型的半导体衬底，第一导电类型的半导体层，第二导电类型的源极区域，第二导电类型的第一漏极区域，第二导电类型的半导体层， 所述第二导电型层设置在与所述第一漏极区域接触的所述源极区域和所述第一漏极区域之间的所述半导体层的表面中，并且具有比所述第一漏极区域低的杂质浓度，栅极绝缘膜和 栅电极，设置在源极区域和复合层之间的栅极绝缘膜上。 肖特基势垒二极管包括设置在半导体层的表面上的第二导电类型的第二漏极区域，该第二漏极区域在远离栅极电极的方向上与第一漏极区域分开，以及肖特基电极，设置在第一 和第二漏区。