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    Focusing in instruments, such as SEMs and CRTs
    1.
    发明授权
    Focusing in instruments, such as SEMs and CRTs 失效
    专注于仪器仪表，如SEM和CRT

    公开(公告)号：US4929836A

    公开(公告)日：1990-05-29

    申请号：US333059

    申请日：1989-04-03

    申请人： Albert Sicignano ,  Mehdi Vaez-Iravani

    发明人： Albert Sicignano ,  Mehdi Vaez-Iravani

    IPC分类号： G01Q30/02 ,  H01J37/28

    CPC分类号： H01J37/28

    摘要： A significantly improved focusing technique is set forth for use with electron beams, particularly in scanning electron microscopes and/or CRTs. This technique utilizes an in-situ differential signal measurement of an object surface to form a signal which is particularly sensitive to edges in the sample at a superimposed frequency. Perfect focus is obtained when the signal strength at the superimposed frequency is a maximum thereby resulting in a minimum spot size.

    摘要翻译： 阐述了与电子束一起使用的显着改进的聚焦技术，特别是在扫描电子显微镜和/或CRT中。 该技术利用物体表面的原位差分信号测量来形成对叠加频率对样本中边缘特别敏感的信号。 当叠加频率处的信号强度最大时，可获得完美的聚焦，从而导致最小光斑尺寸。

    Method of diagnosing magnification, linearity and stability of scanning electron microscope
    3.
    发明授权
    Method of diagnosing magnification, linearity and stability of scanning electron microscope 失效
    诊断扫描电子显微镜放大倍数，线性和稳定性的方法

    公开(公告)号：US06661007B1

    公开(公告)日：2003-12-09

    申请号：US09696255

    申请日：2000-10-26

    申请人： Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

    发明人： Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

    IPC分类号： H01J3726

    CPC分类号： H01J37/28 ,  H01J2237/282

    摘要： A method of diagnosing a parameter of a scanning electron microscope such as magnification, linearity and stability, includes loading a reference material into a microscope, setting a permissible limit of a value of the parameters, inputting a pitch of the reference material, inputting a magnification of the microscope, acquiring a set of digital images on the reference material, analyzing the digital image line after line with determination of a pitch of features of the image in each line, in mutually orthogonal directions, checking if all lines of the digital image has been analyzed, determining a mean value of the pitch of the features in each orthogonal direction, comparing the obtained value of the pitch of the image with a known value of the pitch of the reference material to determine a ratio indicative of a modification, and determining a precision of the measurements of the pitch by statistical analysis of the pitch measurements.

    摘要翻译： 诊断扫描电子显微镜参数如放大率，线性和稳定性的方法包括将参考物质加载到显微镜中，设定参数值的允许极限，输入参考物料的间距，输入放大倍率 在参考材料上获取一组数字图像，在相互正交的方向上确定每行中的图像的特征的间距之后对数字图像行进行分析，检查数字图像的所有行是否具有 进行分析，确定每个正交方向上的特征的间距的平均值，将所获得的图像的间距的值与参考材料的间距的已知值进行比较，以确定表示修改的比率，并确定 通过间距测量的统计分析来测量音高的精度。

    Method of calibration of magnification of optical devices
    5.
    发明授权
    Method of calibration of magnification of optical devices 失效
    光学器件放大倍数的校准方法

    公开(公告)号：US06753963B1

    公开(公告)日：2004-06-22

    申请号：US09696257

    申请日：2000-10-26

    申请人： Albert Sicignano ,  Tim Goldburt

    发明人： Albert Sicignano ,  Tim Goldburt

    IPC分类号： G01B1100

    CPC分类号： G03F7/70516 ,  G03F7/70616

    摘要： A method of calibrating magnification of optical devices includes providing a mask with a predetermined pattern, projecting radiation through the mask so as to form a pattern image, and comparing a pattern of the image with a pattern of the mask to determine deviations of the image of the projected image from the image of the mask.

    摘要翻译： 校准光学装置的倍率的方法包括：提供具有预定图案的掩模，通过掩模投影辐射以形成图案图像，并将图像的图案与掩模的图案进行比较，以确定图像的偏差 来自掩模图像的投影图像。

    Method of automatically correcting magnification and non-linearity of scanning electron microscope
    6.
    发明授权
    Method of automatically correcting magnification and non-linearity of scanning electron microscope 失效
    自动校正扫描电子显微镜放大倍数和非线性的方法

    公开(公告)号：US06596993B1

    公开(公告)日：2003-07-22

    申请号：US09696252

    申请日：2000-10-26

    申请人： Albert Sicignano ,  Tim Goldburt ,  Dmitriy Yeremin

    发明人： Albert Sicignano ,  Tim Goldburt ,  Dmitriy Yeremin

    IPC分类号： G21K700

    CPC分类号： H01J37/28 ,  H01J2237/2826

    摘要： A method of automatically correcting magnification and/or non linearity of scanning electron microscope has the steps of loading a reference material in the microscope, inputting a pitch of the reference material and a nominal magnification of the microscope, obtaining an image of the reference material, determining a pitch and/or a linearity of the image of the reference material, comparing the pitch of the image with the inputted pitch of the reference material to obtain a ratio indicative of the magnification and/or comparing the magnification in different locations across an image field indicative of the linearity, comparing the thusly determined magnification with the nominal magnification, and if an error of magnification exceeds a predetermined value, adjusting the scanning electron microscope.

    摘要翻译： 自动校正扫描电子显微镜的放大倍数和/或非线性的方法具有以下步骤：在显微镜中加载参考物质，输入参考物质的间距和显微镜的标称倍率，获得参考物质的图像， 确定参考材料的图像的间距和/或线性，将图像的间距与参考材料的输入间距进行比较，以获得指示放大率的比率和/或比较跨越图像的不同位置的倍率 指示线性的场，将如此确定的倍率与标称倍率进行比较，并且如果放大误差超过预定值，则调整扫描电子显微镜。

    Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scale
    7.
    发明授权
    Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scale 失效
    具有不同操作原理的显微镜放大倍率校准方法，使其成为单一的绝对刻度

    公开(公告)号：US07054000B2

    公开(公告)日：2006-05-30

    申请号：US10633605

    申请日：2003-08-04

    申请人： Arkady Nikitin ,  Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

    发明人： Arkady Nikitin ,  Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

    IPC分类号： G01J1/10

    CPC分类号： G01B9/04 ,  G02B21/00

    摘要： A method of calibration of magnification of a microscope with the use of a diffraction grating has the steps of determining a mean period of a diffraction grating by irradiating the diffraction grating with an electromagnetic radiation having a known wavelength and analyzing a resulting diffraction pattern, determining a scatter of individual values of a period of the diffraction grating by multiple measurements of periods of the diffraction grating by a microscope in pixels in one area in a microscope field of view, and calculating a mean value of the period and the scatter based on the measurements, determining a sufficient number of measurements of the period for providing an accepted statistic error of a magnification of the microscope, performing measurements corresponding to the determined acceptable number of measurements, of individual values of the period in pixels in a plurality of portions of the diffraction grating, calculating a general mean value of the period in pixels based on the immediately preceding step, and finally calculating a parameter corresponding to the magnification of the microscope based on the determined mean value of the period of the diffraction grating in the microscope image and the calculating of the general mean value of the period in pixels.

    摘要翻译： 使用衍射光栅校准显微镜的放大倍数的方法具有以下步骤：通过用具有已知波长的电磁辐射照射衍射光栅来确定衍射光栅的平均周期，并分析所得到的衍射图案，确定 通过显微镜在显微镜视场中的一个区域中的像素中的衍射光栅的周期的多次测量来分散衍射光栅的周期的各个值，并且基于测量值来计算周期的平均值和散射 ，确定用于提供显微镜的放大倍数的可接受的统计误差的足够数量的测量值，对所确定的可接受测量数量执行与衍射的多个部分中的像素周期的各个值的各个值的测量值 光栅，计算周期的一般平均值（以像素为单位）b 并且最终基于所确定的显微镜图像中的衍射光栅的周期的平均值和周期的平均值的计算（以像素为单位）来计算与显微镜的放大率对应的参数。

    Method of calibration of magnification of microscopes having different operational principles for bringing them to a single, absolute scale
    8.
    发明申请
    Method of calibration of magnification of microscopes having different operational principles for bringing them to a single, absolute scale 失效
    具有不同操作原理的显微镜放大倍率校准方法，使其达到单一绝对刻度

    公开(公告)号：US20050030530A1

    公开(公告)日：2005-02-10

    申请号：US10633605

    申请日：2003-08-04

    申请人： Arkady Nikitin ,  Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

    发明人： Arkady Nikitin ,  Albert Sicignano ,  Dmitriy Yeremin ,  Tim Goldburt

    IPC分类号： G01B9/04 ,  G01J1/10 ,  G02B21/00

    CPC分类号： G01B9/04 ,  G02B21/00

    摘要： A method of calibration of magnification of a microscope with the use of a diffraction grating has the steps of determining a mean period of a diffraction grating by irradiating the diffraction grating with an electromagnetic radiation having a known wavelength and analyzing a resulting diffraction pattern, determining a scatter of individual values of a period of the diffraction grating by multiple measurements of periods of the diffraction grating by a microscope in pixels in one area in a microscope field of view, and calculating a mean value of the period and the scatter based on the measurements, determining a sufficient number of measurements of the period for providing an accepted statistic error of a magnification of the microscope, performing measurements corresponding to the determined acceptable number of measurements, of individual values of the period in pixels in a plurality of portions of the diffraction grating, calculating a general mean value of the period in pixels based on the immediately preceding step, and finally calculating a parameter corresponding to the magnification of the microscope based on the determined mean value of the period of the diffraction grating in the microscope image and the calculating of the general mean value of the period in pixels.

    摘要翻译： 使用衍射光栅校准显微镜的放大倍数的方法具有以下步骤：通过用具有已知波长的电磁辐射照射衍射光栅来确定衍射光栅的平均周期，并分析所得到的衍射图案，确定 通过显微镜在显微镜视场中的一个区域中的像素中的衍射光栅的周期的多次测量来分散衍射光栅的周期的各个值，并且基于测量值来计算周期的平均值和散射 ，确定用于提供显微镜的放大倍数的可接受的统计误差的足够数量的测量值，对所确定的可接受测量数量执行与衍射的多个部分中的像素周期的各个值的各个值的测量值 光栅，计算周期的一般平均值（以像素为单位）b 并且最终基于所确定的显微镜图像中的衍射光栅的周期的平均值和周期的平均值的计算（以像素为单位）来计算与显微镜的放大率对应的参数。