Method for forming supported thin layers of non-evaporable getter
material and getter devices formed thereby
    10.
    发明授权
    Method for forming supported thin layers of non-evaporable getter material and getter devices formed thereby 有权
    用于形成不可蒸发的吸气剂材料的支撑薄层的方法和由此形成的吸气装置

    公开(公告)号:US6016034A

    公开(公告)日:2000-01-18

    申请号:US154800

    申请日:1998-09-17

    CPC分类号: H01J7/183

    摘要: A method for forming a supported thin layer of non-evaporable getter (NEG) material and a getter device formed thereby are provided. A suspension comprised of non-evaporable getter (NEG) material particles in a dispersing medium is prepared. The NEG material particles in the suspension have a particle size not greater than about 150 .mu.m. The dispersing medium has an aqueous, alcoholic, or hydroalcoholic base and contains not more than about 1 wt % of organic compounds having a boiling temperature of at least about 250.degree. C. The ratio of the weight of the NEG material particles to the weight of the dispersing medium is between about 4:1 and about 1:1. A layer of the suspension is deposited on a carrier by a serigraphic technique. Next, the deposited layer is dried to evaporate volatile components of the dispersing medium and thereby form a dried deposit. Finally, the dried deposit is sintered under vacuum at a temperature between about 800.degree. C. and 1000.degree. C. with a surface of the dried deposit covered with a refractory material to inhibit scaling. Getter devices formed in accordance with this method also are provided.

    摘要翻译: 提供了一种用于形成支撑的非蒸发性吸气剂(NEG)薄层的方法和由此形成的吸气装置。 制备由分散介质中的非蒸发性吸气剂(NEG)材料颗粒组成的悬浮液。 悬浮液中的NEG材料颗粒具有不大于约150μm的粒度。 分散介质具有水性,醇类或水醇碱,并且含有不超过约1重量%的沸点为至少约250℃的有机化合物.NEG材料颗粒的重量与 分散介质在约4:1和约1:1之间。 悬浮液层通过丝印技术沉积在载体上。 接下来,将沉积层干燥以蒸发分散介质的挥发性组分,从而形成干燥的沉积物。 最后,将干燥的沉积物在真空下在约800℃至1000℃之间的温度下烧结,并将干燥沉积物的表面覆盖耐火材料以抑制结垢。 还提供了根据该方法形成的吸气装置。