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    Molecular detection using an optical waveguide fixed to a cantilever
    1.
    发明授权
    Molecular detection using an optical waveguide fixed to a cantilever 有权
    使用固定在悬臂上的光波导的分子检测

    公开(公告)号：US07158693B2

    公开(公告)日：2007-01-02

    申请号：US11240151

    申请日：2005-09-29

    Applicant: Alex T. Tran ,  Dustin W. Carr

    Inventor： Alex T. Tran ,  Dustin W. Carr

    IPC: G02B6/00

    CPC classification number: G01N33/54373 ,  G02B6/3502 ,  G02B6/3566

    Abstract: The invention relates to devices and methods for detecting a ligand in a liquid, based on deflection of one or more microscopic cantilevers. Each cantilever has an optical waveguide fixed thereto or integral therewith. Deflection of the cantilever is detected by assessing coupling of light between the optical waveguide on the cantilever and an optical waveguide fixed distally thereto.

    Abstract translation: 本发明涉及用于检测液体中配体的装置和方法，其基于一个或多个微观悬臂的偏转。 每个悬臂具有固定到其上的或与其成一体的光波导。 通过评估悬臂梁上的光波导与远端固定的光波导之间的光耦合来检测悬臂的偏转。

    Microelectromechanical structures defined from silicon on insulator wafers
    2.
    发明授权
    Microelectromechanical structures defined from silicon on insulator wafers 有权
    由绝缘体上硅晶片定义的微机电结构

    公开(公告)号：US06362512B1

    公开(公告)日：2002-03-26

    申请号：US09468423

    申请日：1999-12-21

    Applicant: Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran

    Inventor： Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran

    IPC: H01L2982

    CPC classification number: B81B3/0083 ,  B81C2201/0109 ,  B81C2201/019 ,  B81C2201/0191 ,  B81C2201/053 ,  G02B6/4214

    Abstract: A device structure is defined in a single-crystal silicon (SCS) layer separated by an insulator layer, such as an oxide layer, from a handle wafer. The SCS can be attached to the insulator by wafer bonding, and is selectively etched, as by photolithographic patterning and dry etching. A sacrificial oxide layer can be deposited on the etched SCS, on which polysilicon can be deposited. A protective oxide layer is deposited, and CMOS circuitry and sensors are integrated. Silicon microstructures with sensors connected to CMOS circuitry are released. In addition, holes can be etched through the sacrificial oxide layer, sacrificial oxide can be deposited on the etched SCS, polysilicon can be deposited on the sacrificial oxide, PSG can be deposited on the polysilicon layer, which both can then be patterned.

    Abstract translation: 器件结构被限定在由来自处理晶片的绝缘体层（例如氧化物层）分离的单晶硅（SCS）层中。 SCS可以通过晶片接合连接到绝缘体，并且通过光刻图案和干蚀刻被选择性地蚀刻。 可以在蚀刻的SCS上沉积牺牲氧化物层，在其上沉积多晶硅。 沉积保护性氧化物层，并集成CMOS电路和传感器。 释放了连接到CMOS电路的传感器的硅微结构。 此外，可以通过牺牲氧化物层蚀刻孔，牺牲氧化物可以沉积在蚀刻的SCS上，多晶硅可以沉积在牺牲氧化物上，PSG可以沉积在多晶硅层上，然后可以对其进行图案化。

    Optical substance analyzer
    3.
    发明授权
    Optical substance analyzer 有权
    光学物质分析仪

    公开(公告)号：US07212693B2

    公开(公告)日：2007-05-01

    申请号：US10743253

    申请日：2003-12-22

    Applicant: Dustin W. Carr ,  Ho Bun Chan ,  Alex T. Tran

    Inventor： Dustin W. Carr ,  Ho Bun Chan ,  Alex T. Tran

    IPC: G02B6/00

    CPC classification number: G01N21/774 ,  G01N21/45 ,  G01N21/7746 ,  G01N33/54366 ,  G01N33/569 ,  G01N2021/7709 ,  G01N2021/7779 ,  G01N2021/7793

    Abstract: A portable waveguide sensor having one or more gratings. In one embodiment, the sensor has a waveguide, wherein a plurality of grooves imprinted onto the waveguide form a Bragg grating. The surface of the grooves has a functional layer adapted to bind a substance of interest, e.g., a biological pathogen. When the pathogen binds to the functional layer, the binding shifts the spectral reflection band corresponding to the Bragg grating such that a probe light previously reflected by the grating now passes through the grating, thereby indicating the presence of the pathogen. In another embodiment, the sensor has a Mach-Zehnder interferometer (MZI), one arm of which has a resonator formed by two Bragg gratings. The surface of the resonator between the gratings has a functional layer whereas the Bragg gratings themselves do not have such a layer.

    Abstract translation: 具有一个或多个光栅的便携式波导传感器。 在一个实施例中，传感器具有波导，其中印在波导上的多个凹槽形成布拉格光栅。 凹槽的表面具有适于结合感兴趣物质的功能层，例如生物病原体。 当病原体与功能层结合时，结合移动对应于布拉格光栅的光谱反射带，使得光栅以前反射的探针光线现在通过光栅，从而指示病原体的存在。 在另一个实施例中，传感器具有马赫 - 曾德干涉仪（MZI），其一个臂具有由两个布拉格光栅形成的谐振器。 光栅之间的谐振器的表面具有功能层，而布拉格光栅本身不具有这样的层。

    Piezo-resistive sensing of mirror position in an optical switch
    4.
    发明授权
    Piezo-resistive sensing of mirror position in an optical switch 有权
    在光开关中的反射镜位置的压电感测

    公开(公告)号：US06911913B2

    公开(公告)日：2005-06-28

    申请号：US10261086

    申请日：2002-09-30

    Applicant: Jungsang Kim ,  Anatoli Olkhovets ,  Alex T. Tran

    Inventor： Jungsang Kim ,  Anatoli Olkhovets ,  Alex T. Tran

    IPC: G02B6/35 ,  G02B26/08 ,  G08B17/06

    CPC classification number: G02B26/0841 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3578 ,  G02B6/359

    Abstract: An integrated piezo-resistive sensor for determining mirror position in an optical switch. One or more piezo-resistive layers may be formed in silicon springs supporting a movable mirror in the switch. Change in resistivity of those layers due to spring deformation during mirror motion is measured and related to the mirror deflection angle. Information about the angle may be used to provide feedback to the motion actuator, which then may be operated to orient the mirror more accurately. A sensor's sensitivity may be increased by appropriately orienting the springs with respect to the crystallographic axes of the silicon.

    Abstract translation: 一种用于确定光开关中镜面位置的集成压电传感器。 一个或多个压电层可以形成在支撑开关中的可移动反射镜的硅弹簧中。 测量由于反射镜运动期间的弹簧变形引起的那些层的电阻率的变化，并且与镜面偏转角有关。 可以使用关于角度的信息来向运动致动器提供反馈，然后可以对运动致动器进行操作以更准确地定向镜子。 可以通过相对于硅的结晶轴适当地定向弹簧来增加传感器的灵敏度。

    Process for manufacture of microoptomechanical structures
    7.
    发明授权
    Process for manufacture of microoptomechanical structures 有权
    微机电结构的制造工艺

    公开(公告)号：US06379989B1

    公开(公告)日：2002-04-30

    申请号：US09468141

    申请日：1999-12-21

    Applicant: Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran

    Inventor： Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran

    IPC: H01L2100

    CPC classification number: G02B6/43 ,  G02B6/4214

    Abstract: A microoptomechanical structure produced by defining a microoptical structure in a single-crystal silicon layer separated by an insulator layer from a handle wafer, such as a SOI wafer, selectively etching the single crystal silicon layer, depositing a sacrificial oxide layer on the etched single crystal silicon layer, depositing and etching a polysilicon layer on the sacrificial oxide layer, with remaining polysilcon forming hinge elements, and releasing formed microoptical structures. Embodiments use an oxide as an insulator, and other embodiments provide for wafer bonding of the silicon layer to the insulator layer.

    Abstract translation: 通过在由诸如SOI晶片的处理晶片分离的绝缘体层的单晶硅层中限定微光学结构而产生的微机电结构，选择性地蚀刻单晶硅层，在蚀刻的单晶上沉积牺牲氧化物层 硅层，沉积和蚀刻牺牲氧化物层上的多晶硅层，形成铰链元件，并释放形成的微光学结构。 实施例使用氧化物作为绝缘体，并且其它实施例提供硅层与绝缘体层的晶片结合。

    Molecular detection using an optical waveguide fixed to a cantilever
    9.
    发明授权
    Molecular detection using an optical waveguide fixed to a cantilever 有权
    使用固定在悬臂上的光波导的分子检测

    公开(公告)号：US06987898B2

    公开(公告)日：2006-01-17

    申请号：US10625384

    申请日：2003-07-23

    Applicant: Alex T. Tran ,  Dustin W. Carr

    Inventor： Alex T. Tran ,  Dustin W. Carr

    IPC: G02B6/00

    CPC classification number: G01N33/54373 ,  G02B6/3502 ,  G02B6/3566

    Abstract: The invention relates to devices and methods for detecting a ligand in a liquid, based on deflection of one or more microscopic cantilevers. Each cantilever has an optical waveguide fixed thereto or integral therewith. Deflection of the cantilever is detected by assessing coupling of light between the optical waveguide on the cantilever and an optical waveguide fixed distally thereto.

    Abstract translation: 本发明涉及用于检测液体中配体的装置和方法，其基于一个或多个微观悬臂的偏转。 每个悬臂具有固定到其上的或与其成一体的光波导。 通过评估悬臂梁上的光波导与远端固定的光波导之间的光耦合来检测悬臂的偏转。

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