公开(公告)号：US06943898B2

公开(公告)日：2005-09-13

申请号：US10353754

申请日：2003-01-28

申请人： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

发明人： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

IPC分类号： G01N15/14 ,  G01N21/956 ,  G02B21/14 ,  G01B9/02

CPC分类号： G02B21/14 ,  G01N21/95607

摘要： Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.

摘要翻译： 用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点 一起在表面。 第一和第二点之间的距离响应于样品的重复图案的间距。 收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。 检测器检测干涉图案的变化。

公开(公告)号：US06750436B2

公开(公告)日：2004-06-15

申请号：US10192220

申请日：2002-07-09

申请人： Haim Feldman ,  Boris Golberg ,  Alexander Libinson

发明人： Haim Feldman ,  Boris Golberg ,  Alexander Libinson

IPC分类号： G02B704

CPC分类号： G02B7/34

摘要： An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.

摘要翻译： 一种用于聚焦误差检测的装置和方法，其可操作以接收从检查对象反射的光并确定被检查对象的表面上的聚焦误差，所述聚焦误差检测装置包括光学元件和至少一个检测装置，而光学元件和 至少一个检测装置限定至少第一聚焦误差检测路径和第二聚焦误差检测路径，第一聚焦误差检测路径以比第二聚焦误差检测路径更大的灵敏度检测聚焦误差，而第二聚焦误差检测路径 在比第一个聚焦误差检测路径更大的聚焦误差范围内检测到聚焦误差。

公开(公告)号：US20140299790A1

公开(公告)日：2014-10-09

申请号：US14009869

申请日：2011-04-07

申请人： Amir Shoham ,  Haim Feldman ,  Doron Shoham

发明人： Amir Shoham ,  Haim Feldman ,  Doron Shoham

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/33 ,  G01N2021/8822 ,  G01N2201/0697

摘要： A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.

摘要翻译： 具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲， 在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

公开(公告)号：US20100188658A1

公开(公告)日：2010-07-29

申请号：US12752995

申请日：2010-04-01

申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

IPC分类号： G01N21/88 ,  G01N21/00

CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region

摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 在探测波长处的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料

公开(公告)号：US20100097680A1

公开(公告)日：2010-04-22

申请号：US12626592

申请日：2009-11-25

申请人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

发明人： Ron Naftali ,  Avishay Guetta ,  Haim Feldman ,  Doron Shoham

IPC分类号： G02B27/48 ,  G02B26/10

CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

摘要翻译： 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：US07620932B2

公开(公告)日：2009-11-17

申请号：US11966630

申请日：2007-12-28

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G06F17/50

CPC分类号： G03F1/84 ,  G03F1/36 ,  G03F7/705 ,  G03F7/706

摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

摘要翻译： 用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。 基于相干特性计算光学系统的相干分解。 分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。 扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。

公开(公告)号：US07331033B2

公开(公告)日：2008-02-12

申请号：US10928537

申请日：2004-08-27

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G06F17/50

CPC分类号： G03F1/84 ,  G03F1/36 ,  G03F7/705 ,  G03F7/706

摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

摘要翻译： 用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。 基于相干特性计算光学系统的相干分解。 分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。 扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。

公开(公告)号：US20050270521A1

公开(公告)日：2005-12-08

申请号：US11127914

申请日：2005-05-11

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88 ,  G01N21/956

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

公开(公告)号：US06671098B2

公开(公告)日：2003-12-30

申请号：US10151363

申请日：2002-05-16

申请人： Haim Feldman

发明人： Haim Feldman

IPC分类号： G02B2710

CPC分类号： G02B3/005 ,  G02B3/0056 ,  G02B3/0062 ,  G02B26/105 ,  G02B27/46 ,  G03F7/70616

摘要： A scanning angle expander that includes a converting optics for receiving an input beam, the input beam being inclined with respect with an optical axis of the converting optics by an input scan angle, and for converting the input beam to multiple output beamlets, each output beamlet being inclined with respect to the optical axis of the converting optics by an output scan angle; and expanding optics, for converting the multiple output beamlets to an output beam that is substantially parallel to the output beamlets, whereas the output beam and the input beam have substantially a same size.

摘要翻译： 一种扫描角扩展器，其包括用于接收输入光束的转换光学器件，所述输入光束相对于所述转换光学器件的光轴以输入扫描角度倾斜，并且用于将所述输入光束转换成多个输出子束，每个输出光束 相对于转换光学器件的光轴倾斜输出扫描角; 以及扩展光学器件，用于将多个输出子束转换成基本上平行于输出子束的输出光束，而输出光束和输入光束具有基本上相同的大小。

公开(公告)号：US08228601B2

公开(公告)日：2012-07-24

申请号：US12464761

申请日：2009-05-12

申请人： Doron Meshulach ,  Kobi Kan ,  Haim Feldman ,  Ido Dolev ,  Ori Sarfaty

发明人： Doron Meshulach ,  Kobi Kan ,  Haim Feldman ,  Ido Dolev ,  Ori Sarfaty

IPC分类号： G02B27/28

CPC分类号： G02B21/0092 ,  G02B21/0068

摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.

摘要翻译： 用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。 该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。 该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。