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    Measuring System for Optical Monitoring of Coating Processes
    1.
    发明申请
    Measuring System for Optical Monitoring of Coating Processes 有权
    涂层工艺光学监测测量系统

    公开(公告)号：US20080285060A1

    公开(公告)日：2008-11-20

    申请号：US11908204

    申请日：2006-02-23

    申请人： Alfons Zoller ,  Harro Hagedorn ,  Werner Klug

    发明人： Alfons Zoller ,  Harro Hagedorn ,  Werner Klug

    IPC分类号： G01B11/06

    CPC分类号： C23C14/547 ,  G01B11/0683

    摘要： The invention concerns a measuring system for optical monitoring of coating processes in a vacuum chamber, in which the light source is arranged inside the vacuum chamber between the substrate carrier and a shutter is arranged beneath the substrate carrier and the light-receiving unit is arranged outside the vacuum chamber in the optical path of the light source. The substrate carrier is designed to accept at least one substrate, and it can move across the coasting source in the vacuum chamber, preferably revolving about an axis, whereby the substrate or substrates cross(es) the optical path between the light source and the light-receiving unit for transmission measurement, and the shutter shades a measurement area across the coating source.

    摘要翻译： 本发明涉及一种用于光学监测真空室中的涂布过程的测量系统，其中光源布置在基板载体和快门之间的真空室内部，布置在基板载体下方，光接收单元布置在外部 在光源的光路中的真空室。 衬底载体被设计成接受至少一个衬底，并且其可以在真空室中移动穿过滑动源，优选围绕轴线旋转，由此衬底或衬底跨越光源和光之间的光路 接收单元用于透射测量，并且快门遮蔽涂层源上的测量区域。

    Measuring system for optical monitoring of coating processes
    2.
    发明授权
    Measuring system for optical monitoring of coating processes 有权
    涂层工艺光学监测测量系统

    公开(公告)号：US08184302B2

    公开(公告)日：2012-05-22

    申请号：US11908204

    申请日：2006-02-23

    申请人： Alfons Zoller ,  Harro Hagedorn ,  Werner Klug

    发明人： Alfons Zoller ,  Harro Hagedorn ,  Werner Klug

    IPC分类号： G01B11/28

    CPC分类号： C23C14/547 ,  G01B11/0683

    摘要： The invention concerns a measuring system for optical monitoring of coating processes in a vacuum chamber, in which the light source is arranged inside the vacuum chamber between the substrate carrier and a shutter is arranged beneath the substrate carrier and the light-receiving unit is arranged outside the vacuum chamber in the optical path of the light source. The substrate carrier is designed to accept at least one substrate, and it can move across the coasting source in the vacuum chamber, preferably revolving about an axis, whereby the substrate or substrates cross(es) the optical path between the light source and the light-receiving unit for transmission measurement, and the shutter shades a measurement area across the coating source.

    摘要翻译： 本发明涉及一种用于光学监测真空室中的涂布过程的测量系统，其中光源布置在基板载体和快门之间的真空室内部，布置在基板载体下方，光接收单元布置在外部 在光源的光路中的真空室。 衬底载体被设计成接受至少一个衬底，并且其可以在真空室中移动穿过滑动源，优选围绕轴线旋转，由此衬底或衬底跨越光源和光之间的光路 接收单元用于透射测量，并且快门遮蔽涂层源上的测量区域。

    Process for continuous determination of the optical layer thickness of coatings
    3.
    发明授权
    Process for continuous determination of the optical layer thickness of coatings 失效
    连续测定涂层光学层厚度的方法

    公开(公告)号：US06549291B1

    公开(公告)日：2003-04-15

    申请号：US09655222

    申请日：2000-09-05

    申请人： Torsten Dieter ,  Rudolf Beckman ,  Alfons Zoller ,  Harro Hagedorn

    发明人： Torsten Dieter ,  Rudolf Beckman ,  Alfons Zoller ,  Harro Hagedorn

    IPC分类号： G01B1106

    CPC分类号： G01B11/0633

    摘要： Process for continuous determination of the optical layer thickness of coatings, which are applied on both sides of the spherical surfaces of concave convex lenses having different spherical radii R1 and R2. In this process a ray of light is beamed eccentrically during the coating process at each concave convex lens, and the reflection or transmission at the convex spherical surface and at the concave spherical surface is continuously measured with photodiodes, and the respective optical layer thickness is determined from the functional relationship between the reflection or the transmission and the optical layer thickness.

    摘要翻译： 用于连续确定涂层的光学层厚度的方法，其施加在具有不同球形半径R1和R2的凹凸透镜的球面的两侧上。 在该过程中，在每个凹凸透镜的涂覆过程中，光线偏心地射出，并且用光电二极管连续地测量凸球面和凹球面处的反射或透射，并且确定相应的光学层厚度 从反射或透射与光学层厚度之间的功能关系。

    Method for producing a multilayer coating and device for carrying out said method
    4.
    发明申请
    Method for producing a multilayer coating and device for carrying out said method 有权
    制造多层涂层的方法和用于实施所述方法的装置

    公开(公告)号：US20060151312A1

    公开(公告)日：2006-07-13

    申请号：US10537224

    申请日：2003-12-03

    申请人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

    发明人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

    IPC分类号： C23C14/00

    CPC分类号： H01J37/3473 ,  C23C14/0078 ,  C23C14/0094 ,  C23C14/024 ,  C23C14/08 ,  C23C14/547 ,  H01J37/34 ,  H01J37/3405 ,  H01J37/3476 ,  H01J2237/3321

    摘要： A method for producing one or more coating on a displaccable substrate in a vacuum chamber with the aid of a residual gas, by means of a sputtering device said coating being formed from at least two constituents, whereby a sputtering material of the sputtering device constitutes at least one first constituent and a reactive component of the residual gas constitutes a second constituent. The method comprises the following steps: reactive deposition of a coating on the substrate by the addition of a reactive component, with a predetermined stoichiometric deficit of the reactive component in a zone of the sputtering device; displacement of the substrate with the deposited coating into the vicinity of a plasma source, which is located in the vacuum chamber at a predetermined distance from the sputtering device; modification of the structure and/or stoichiometry of the coating by the action of the plasma of the plasma source, preferably by the addition of a predetermined quantity of the reactive component, to reduce the optical loss of the coating. The aim of the invention is to reduce the optical loss of the multilayer coating to below a predetermined value in a zone of the second coating adjoining the first coating. To achieve this, an interface is created with a thickness d1 and a value for the deficit of the reactive component DEF that is less than a value DEF1.

    摘要翻译： 一种利用溅射装置借助于残留气体在真空室中在可置换基板上产生一个或多个涂层的方法，所述涂层由至少两种成分形成，由此溅射装置的溅射材料构成 剩余气体的至少一个第一组分和反应性组分构成第二组分。 该方法包括以下步骤：通过添加反应性组分将涂层反应沉积在衬底上，在溅射装置的区域中具有预定的化学计量的反应性组分的缺陷; 将基板与沉积的涂层位移到距离溅射装置预定距离处的真空室中的等离子体源附近; 通过等离子体源的等离子体的作用改变涂层的结构和/或化学计量，优选地通过添加预定量的反应成分，以减少涂层的光学损失。 本发明的目的是在与第一涂层相邻的第二涂层的区域中将多层涂层的光学损耗降低到预定值以下。 为了实现这一点，创建具有厚度d 1> 1的接口和小于值DEF <1的反应分量DEF的缺陷值。

    Apparatus for the coating of substrates in a vacuum chamber
    6.
    发明授权
    Apparatus for the coating of substrates in a vacuum chamber 失效
    用于在真空室中涂覆基底的装置

    公开(公告)号：US06241824B1

    公开(公告)日：2001-06-05

    申请号：US09366971

    申请日：1999-08-04

    申请人： Günter Bräuer ,  Hermann Kloberdanz ,  Hans-Georg Lotz ,  Jochen Schneider ,  Alfons Zöller ,  Harro Hagedorn ,  Michael König ,  Jürgen Meinel ,  Götz Teschner

    发明人： Günter Bräuer ,  Hermann Kloberdanz ,  Hans-Georg Lotz ,  Jochen Schneider ,  Alfons Zöller ,  Harro Hagedorn ,  Michael König ,  Jürgen Meinel ,  Götz Teschner

    IPC分类号： C23C1600

    CPC分类号： C23C14/568

    摘要： In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (15,16,20) and with a loading and an unloading station (8 or 9), two vacuum chambers (3,4) are provided with several coating stations (6,7 or 10 to 14), directly next to one another, wherein a rotatable transport arm (15 or 16) is accommodated in each of the two chambers (3, 4), and the transport planes of the two transport arms (15,16) are aligned with one another. In the separation area of the two chambers (3,4), an air lock is provided with a corresponding transfer apparatus (5) with two transport arms (15,16), whose rotary plate (20) is provided with substrate storage unit (21,22) and projects about halfway into one chamber (3) and halfway into the other chamber (4), wherein one chamber (3) has both the loading as well as the unloading station (8 or 9).

    摘要翻译： 在用可旋转的基板载体（15,16,20）和装载和卸载站（8或9）在真空中涂覆基板的设备中，设有两个真空室（3,4） （6,7或10至14），彼此直接相邻，其中可旋转传送臂（15或16）容纳在两个室（3,4）的每一个中，并且两个传送臂的传送平面 15,16）彼此对齐。 在两个腔室（3,4）的分离区域中，气锁设置有具有两个输送臂（15,16）的相应的传送装置（5），其旋转板（20）设置有衬底存储单元 21,22），并且在一个室（3）的中途突出并且进入另一个室（4）的中途，其中一个室（3）具有两个装载以及卸载站（8或9）。

    Test Glass Changing
    7.
    发明申请
    Test Glass Changing 有权
    测试玻璃变化

    公开(公告)号：US20140375986A1

    公开(公告)日：2014-12-25

    申请号：US14342291

    申请日：2012-06-28

    申请人： Alfons Zöller ,  Harro Hagedorn ,  Eckhard Wirth ,  Werner Weinrich ,  Tobias Gross

    发明人： Alfons Zöller ,  Harro Hagedorn ,  Eckhard Wirth ,  Werner Weinrich ,  Tobias Gross

    IPC分类号： G01N21/88 ,  G01B11/06

    CPC分类号： G01N21/88 ,  G01B11/0616 ,  G01B11/0691 ,  G01N21/253 ,  G01N2021/8427

    摘要： A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.

    摘要翻译： 一种用于在真空涂层系统中光学测量层性能的测试玻璃变换器，包括用于通过涂料材料引导衬底的可移动衬底保持器; 连接到旋转主轴并且相对于基板保持器围绕旋转主轴可旋转的安装件; 以及控制装置，其将测试玻璃元件引导到光学测量装置的射线路径中并进入涂层材料的流中。 在每种情况下，安装座具有至少两个相对于主轴偏心偏移的凹部，用于一个测试玻璃元件。 控制装置可以引起安装件围绕主轴的旋转运动。 定心装置可以在支架上施加扭矩和保持力矩，以将设置在其中一个凹部中的测试玻璃元件带入测量装置的测量位置。 还提供了相关方法。