公开(公告)号：US20160308103A1

公开(公告)日：2016-10-20

申请号：US15192936

申请日：2016-06-24

Applicant: Apple Inc.

Inventor： Hsin-Hua Hu ,  Kevin K.C. Chang ,  Andreas Bibl

IPC: H01L33/62 ,  H01L33/00 ,  H01L33/06 ,  H01L33/32 ,  H01L25/075 ,  H01L33/60

CPC classification number: H01L33/62 ,  H01L24/75 ,  H01L24/83 ,  H01L24/95 ,  H01L25/0753 ,  H01L27/15 ,  H01L27/156 ,  H01L33/005 ,  H01L33/0079 ,  H01L33/0095 ,  H01L33/04 ,  H01L33/06 ,  H01L33/08 ,  H01L33/32 ,  H01L33/60 ,  H01L2224/83005 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2933/0066 ,  H01L2924/00

Abstract: A method and structure for stabilizing an array of micro devices is disclosed. A stabilization layer includes an array of stabilization cavities and array of stabilization posts. Each stabilization cavity includes sidewalls surrounding a stabilization post. The array of micro devices is on the array of stabilization posts. Each micro device in the array of micro devices includes a bottom surface that is wider than a corresponding stabilization post directly underneath the bottom surface.