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公开(公告)号:US06987570B1
公开(公告)日:2006-01-17
申请号:US10109361
申请日:2002-03-28
申请人: Joanna Schmit , Artur Olszak
发明人: Joanna Schmit , Artur Olszak
IPC分类号: G01B9/02
CPC分类号: G01B11/2441 , G01B9/02057 , G01B9/02071 , G01B9/0209 , G01B2290/60 , G01J3/45
摘要: Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.
摘要翻译: 通过将样品表面的不同部分顺序地放置在仪器的视场内,进行连续的干涉测量来产生复合高度分布。 参考信号用于在每次测量扫描期间提供扫描仪运动的完整历史。 参考信号独立于为了剖面测量目的收集的条纹,并用于产生独立于扫描仪非线性和其他误差源的扫描的z位置历史。 结果,扫描仪非线性和缺乏可重复性导致的错误从该过程中消除,并且可以组合在空间上断开的部分的轮廓,而不损失可归因于扫描仪缺陷的精度。
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公开(公告)号:US06624894B2
公开(公告)日:2003-09-23
申请号:US09888826
申请日:2001-06-25
申请人: Artur Olszak , Joanna Schmit
发明人: Artur Olszak , Joanna Schmit
IPC分类号: G01B1102
CPC分类号: G01B11/2441 , G01B9/02057 , G01B9/02071 , G01B9/0209 , G01B2290/60 , G01J3/45
摘要: A reference signal is used to track the actual behavior of the scanner in an interferometer to produce scanner-position data that can be used to correct errors introduced by scanner nonlinearities and other error sources. A narrow-band light source is advantageously utilized to cover the entire range of operation of the scanner. Because of the independent reference channel, the invention is suitable for implementation with all types of conventional interferometric techniques. The concept is preferably implemented by utilizing an additional light source and the same scanner used for the measurement, so that the OPD varies in synchronization of both the reference-signal and data-collection procedures. Alternatively, a high temporal-coherence filter may be used with the same light source and optical path used for the interferometric measurement.
摘要翻译: 参考信号用于跟踪扫描仪在干涉仪中的实际行为,以产生可用于校正扫描仪非线性和其他错误源引入的误差的扫描仪位置数据。 有利地,窄带光源用于覆盖扫描仪的整个操作范围。 由于独立的参考通道,本发明适用于所有类型的常规干涉技术的实现。 该概念优选地通过利用附加光源和用于测量的相同扫描器来实现,使得OPD在参考信号和数据收集过程的同步上变化。 或者,可以使用与用于干涉测量的相同光源和光路的高时间相干滤波器。
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公开(公告)号:US06624893B1
公开(公告)日:2003-09-23
申请号:US09875638
申请日:2001-06-06
申请人: Joanna Schmit , Artur Olszak
发明人: Joanna Schmit , Artur Olszak
IPC分类号: G01B1102
CPC分类号: G01B11/2441
摘要: Interferometric measurements are carried out in conventional manner to produce a correlogram corresponding to successive scanner steps. An approximation of the actual scan-step size between frames is calculated from multiple-frame intensity data collected around the frame of interest using common irradiance algorithms. The scan-step size so measured is then used in standard PSI, VSI or PSIOTF algorithms, instead of the scanner's nominal phase step. According to one embodiment, the invention utilizes a five-frame PSI algorithm to produce an average scan-step size of four scan steps. According to another embodiment, the phase step between frames is calculated directly utilizing a novel five-frame algorithm that produces an approximation of actual phase step for a given frame, rather than an average value of four steps around the frame. The method requires reduced data processing and can advantageously be applied “on-the fly” as intensity data are acquired during scanning.
摘要翻译: 以常规方式进行干涉测量以产生对应于连续的扫描器步骤的相关图。 使用共同的辐照算法,从感兴趣的帧周围的多帧强度数据计算帧之间的实际扫描步长的近似值。 然后将如此测量的扫描步长用于标准PSI,VSI或PSIOTF算法,而不是扫描仪的标称相位步长。 根据一个实施例,本发明利用五帧PSI算法来产生四个扫描步骤的平均扫描步长。 根据另一个实施例,直接利用新的五帧算法来计算帧之间的相位步长,该算法产生给定帧的实际相位步长的近似值,而不是围绕该帧的四个步长的平均值。 该方法需要减少数据处理,并且可以有利地在扫描期间获取强度数据时“即时”地应用该方法。
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公开(公告)号:US09581437B2
公开(公告)日:2017-02-28
申请号:US14956355
申请日:2015-12-01
申请人: Robert Smythe , Artur Olszak , Piotr Szwaykowski
发明人: Robert Smythe , Artur Olszak , Piotr Szwaykowski
CPC分类号: G01B11/2441 , G01B9/02038 , G01B9/02057 , G01B9/0209 , G01B11/007
摘要: A non-contact optical probe utilizes an optical reference surface that projects a curved test wavefront toward the test surface and detects it by creating curved interferometric fringes localized in space in front of the reference surface. When a point to be measured on the test surface intersects the location of the fringes, the condition is detected by the probe. Because the fringes are localized at a known position in space with respect to a reference system, the precise coordinate of the surface point can be established. Such localized fringes are preferably produced by a spectrally controllable light source. The curvature of the fringes ensures a sufficiently large angle of acceptance for the probe to capture light reflected from points of high surface slope. The probe is particularly suitable for coordinate measurement machines.
摘要翻译: 非接触光学探针利用光学参考表面,其将弯曲的测试波前投影到测试表面,并通过产生局部在参考表面前方的空间中的弯曲干涉条纹来检测它。 当在测试表面上要测量的点与条纹的位置相交时,探测器检测该条件。 因为边缘相对于参考系统位于空间中的已知位置,所以可以建立表面点的精确坐标。 这样的局部条纹优选地由光谱可控的光源产生。 条纹的曲率确保了探头足够大的接受角度来捕获从高斜率的点反射的光。 探头特别适用于坐标测量机。
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公开(公告)号:US09618320B2
公开(公告)日:2017-04-11
申请号:US14834727
申请日:2015-08-25
申请人: Artur Olszak
发明人: Artur Olszak
IPC分类号: G01B9/02
CPC分类号: G01B9/02007 , G01B9/02004
摘要: Heterodyne interferometry is combined with spectrally-controlled interferometry (SCI) to achieve the advantages of both. Phase shifts produced by SCI produce phase-shifted correlograms suitable for heterodyne interferometric analysis, thereby enabling interferometric measurements with conventional common-path apparatus free of coherence noise and scanning-related errors, and with the precision of conventional heterodyne interferometry. A spectrum-modulating light source suitable for the invention is obtained by combining a rotating spiral grating with a multi-slit grating placed in the front focal plane of a collimating lens that propagates the light toward a blazed diffraction grating. Another exemplary spectrum-modulating light source is obtained by combining a slit spectrometer with an acousto-optic modulator.
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公开(公告)号:US20070250491A1
公开(公告)日:2007-10-25
申请号:US11818556
申请日:2007-06-14
申请人: Artur Olszak , Michael Descour , James Goodall
发明人: Artur Olszak , Michael Descour , James Goodall
CPC分类号: G06F16/58 , G06F16/748
摘要: A method for referencing image data. Preferred methods include methods for linking, characterizing, searching, and navigating the image data, as aids to reviewing the image data.
摘要翻译: 用于引用图像数据的方法。 优选的方法包括用于链接,表征,搜索和导航图像数据的方法,作为查看图像数据的辅助。
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公开(公告)号:US20070153370A1
公开(公告)日:2007-07-05
申请号:US11644564
申请日:2006-12-23
申请人: Artur Olszak , Chen Liang
发明人: Artur Olszak , Chen Liang
IPC分类号: G02B21/00
CPC分类号: G01J3/2803 , G01J3/02 , G01J3/0208 , G01J3/0235 , G01J3/0237 , G01J3/10 , G01J3/2823 , G01N21/253 , G01N21/31 , G02B21/367
摘要: An array microscope scans a slide in rapid sequence at different wavelengths to record multiple spectral images of the sample. Full spatial resolution of the image sensor is realized at each color because pixels are not shared between spectral bands. The object and detector are placed at conjugate distances selected to produce substantially equal magnification with minimum chromatic aberration at all wavelengths to ensure registration of all images. Spectral analysis is carried out by combining the images captured at each wavelength. The greater-than-RGB spectral resolution provided by the combination of images enables the isolation and display of the effects produced by the contemporaneous use of more than two stains on a tissue for improved pathological analysis.
摘要翻译: 阵列显微镜以不同波长的快速序列扫描载玻片以记录样品的多个光谱图像。 由于像素不在光谱带之间共享,因此在每种颜色下实现图像传感器的全空间分辨率。 物体和检测器被放置在所选择的共轭距离处以在所有波长处产生具有最小色差的基本相等的倍率,以确保所有图像的配准。 通过组合在每个波长处拍摄的图像进行光谱分析。 由图像组合提供的大于RGB的光谱分辨率使得能够隔离和显示由组织上同时使用两种以上污渍产生的效果,以改善病理分析。
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公开(公告)号:US20050084175A1
公开(公告)日:2005-04-21
申请号:US10687432
申请日:2003-10-16
申请人: Artur Olszak
发明人: Artur Olszak
CPC分类号: G06T3/4038 , G02B21/367 , G06K9/00134 , G06K2009/2045 , H04N1/3876
摘要: An imaging apparatus consists of multiple miniaturized microscopes arranged into an array capable of simultaneously imaging a portion of an object. A step-and-repeat approach is followed to scan the object and generate multiple sets of checkerboard images. In order to improve the quality of the composite image produced by concatenation or stitching of the checkerboard images, the performance of each microscope is normalized to the same base reference for each relevant optical-system property. Correction factors are developed through calibration to equalize the spectral response measured at each detector; to similarly balance the gains and offsets of the detector/light-source combinations associated with the various objectives; to correct for geometric misalignments between microscopes; and to correct optical and chromatic aberrations in each objective.
摘要翻译: 成像装置由布置成阵列的多个微型显微镜组成,能够同时成像物体的一部分。 跟踪扫描对象并生成多组棋盘图像的重复步骤。 为了提高棋盘图像的拼接或缝合产生的复合图像的质量,每个显微镜的性能对于每个相关的光学系统属性归一化为相同的基准参考。 通过校准开发校正因子以均衡每个检测器处测得的光谱响应; 类似地平衡与各种目标相关联的检测器/光源组合的增益和偏移; 以校正显微镜之间的几何不对准; 并纠正每个目标中的光学和色差。
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公开(公告)号:US09696211B2
公开(公告)日:2017-07-04
申请号:US14927320
申请日:2015-10-29
申请人: Artur Olszak
发明人: Artur Olszak
CPC分类号: G01J9/02 , G01B9/02004 , G01B9/02005 , G01J2009/0249 , G02F1/01 , G02F1/0121 , G02F2203/05
摘要: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry. A suitable time-modulated source combines a coherent source with an optical modulator and a waveform generator synchronized with the source.
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公开(公告)号:US20070159688A1
公开(公告)日:2007-07-12
申请号:US11711283
申请日:2007-02-27
申请人: Michael Descour , Artur Olszak , Andrew Lowe
发明人: Michael Descour , Artur Olszak , Andrew Lowe
IPC分类号: G02B21/00
CPC分类号: G02B21/34 , G01N2001/282 , G01N2035/00772
摘要: In a scanning microscope, slides are fed automatically from a magazine to the imaging system. Each slide is labeled in some fashion with information for selecting the appropriate modality of operation of the scanner for that slide and the modality is implemented automatically. The information is preferably tied to and defined by a laboratory information system (LIS). For example, the instructions may regard the type of microscopy (i.e., trans- or epi-illumination), multi-spectral imaging with particular spectral bands combined with a particular set of z-positions, alternative filters, settings for the numerical aperture of the condenser, alternative detector operation for different resolutions, and alternative post-scan analyses of the data, as deemed optimal for the scan. The label may also contain the slide's identity, a pathologist's name, desired post-scan handling protocol, etc. The preferred array microscope to carry out the invention is also described.
摘要翻译: 在扫描显微镜中,幻灯片自动从一个暗盒进给成像系统。 每个幻灯片都以某种方式被标记为具有用于选择用于该幻灯片的扫描器的适当操作模式的信息,并且该模式被自动实现。 该信息最好与实验室信息系统(LIS)相关联并由其定义。 例如,说明书可以将显微镜的类型(即透射或表面照明),具有与特定z轴位置组合的特定光谱带的多光谱成像,替代滤光片,数值孔径的设置 冷凝器,不同分辨率的替代检测器操作,以及数据的替代扫描后分析,被认为是扫描的最佳选择。 标签还可以包含幻灯片的身份,病理学家的名字,期望的扫描后处理协议等。还描述了实现本发明的优选阵列显微镜。
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