Charged beam drawing apparatus
    1.
    发明授权
    Charged beam drawing apparatus 失效
    充电光束拉制装置

    公开(公告)号:US06495841B1

    公开(公告)日:2002-12-17

    申请号:US09299145

    申请日:1999-04-26

    IPC分类号: H01J37317

    摘要: In an electron beam drawing apparatus including an objective lens for focusing an electron beam emitted from an electron gun on a sample surface and an objective deflector for controlling the position of the electron beam on the sample surface, an objective driving mechanism for mechanically moving the objective lens and objective deflector in a plane perpendicular to the optical axis of the electron beam is provided and an optical axis shifting deflector arranged nearer to the electron gun than the objective lens and objective deflector, for deflecting the electron beam in synchronism with the operation of the objective lens and objective deflector is provided.

    摘要翻译: 在包括用于将从电子枪发射的电子束聚焦在样品表面上的物镜和用于控制电子束在样品表面上的位置的物镜偏转器的电子束描绘装置中,用于机械地移动物镜的物镜驱动机构 提供了与电子束的光轴垂直的平面中的透镜和物镜偏转器,并且与物镜和物镜偏转器相比更靠近电子枪布置的光轴移动偏转器,用于与电子束的操作同步地偏转 提供物镜和物镜偏转器。

    Charged beam drawing apparatus and charged beam drawing method
    2.
    发明授权
    Charged beam drawing apparatus and charged beam drawing method 有权
    充电光束拉制装置和带电束束拉制法

    公开(公告)号:US07476881B2

    公开(公告)日:2009-01-13

    申请号:US11560127

    申请日:2006-11-15

    IPC分类号: G21K5/04

    摘要: There is provided a charged beam drawing apparatus which includes main/sub two-stage deflectors, divides a main deflection drawing region on a sample into sub deflection drawing regions determined by the deflection width of the sub deflector, selects one of the sub deflection drawing regions by use of the main deflector and draws shots in the selected sub deflection drawing region by use of the sub deflector. A sub deflection driving unit includes a sub deflection sensitivity correction circuit, a sub deflection astigmatic correction circuit, an adder circuit which adds an output of the sub deflection sensitivity correction circuit and an output of the sub deflection astigmatic correction circuit, and a deflection amplifier which additionally applies an output of the adder circuit to the sub deflector.

    摘要翻译: 提供了一种带电束的拉伸装置,其包括主/次两级偏转器,将样品上的主偏转绘制区域划分成由次偏转器的偏转宽度确定的次偏转绘图区域,选择一个子偏转绘图区域 通过使用主偏转器,并且通过使用副偏转器在所选择的亚偏转绘图区域中绘制照片。 副偏转驱动单元包括副偏转灵敏度校正电路,副偏转像散校正电路,将副偏转灵敏度校正电路的输出和副偏转像散校正电路的输出相加的加法电路,以及偏转放大器, 另外将加法器电路的输出施加到副偏转器。

    Mobile communication terminal capable of displaying communication mode

    公开(公告)号:US06999789B2

    公开(公告)日:2006-02-14

    申请号:US10323838

    申请日:2002-12-20

    申请人: Kiyoshi Hattori

    发明人: Kiyoshi Hattori

    IPC分类号: H04M1/00

    摘要: In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.

    Refrigerator
    4.
    发明授权
    Refrigerator 失效
    冰箱

    公开(公告)号:US4343157A

    公开(公告)日:1982-08-10

    申请号:US149324

    申请日:1980-05-13

    申请人: Kiyoshi Hattori

    发明人: Kiyoshi Hattori

    IPC分类号: F25B13/00 F25B47/02

    CPC分类号: F25B47/025 F25B2341/0011

    摘要: A refrigerator comprising in which a trap is provided between the outlet of a liquid receptacle and the outlet of a cooler via a normally-closed valve, a flow passage for connecting the lower portion of said trap to the outlet of a condenser is provided, and a flow passage switching mechanism for shifting, when starting a defrosting operation, the inlet of said cooler from the admission port of a compressor to the discharge port thereof, and the inlet of said condenser from the discharge port of said compressor to the admission port thereof, and for switching said normally-closed valve to open state is provided. Said refrigerator further comprising a radiator connected at its inlet to the discharge port of said compressor, a water tank or a liquid tank in which said radiator is immersed, a heat receiver immersed in said water tank or liquid tank, and an ejector connected at its inlet to the discharge port of said compressor, at its outlet to the inlet of said cooler and at its suction port to the outlet of said heat receiver.

    摘要翻译: 一种冰箱,其特征在于,在液体容器的出口和冷却器的出口经由常闭阀之间设置有捕集器,设有用于将所述捕集器的下部与冷凝器的出口连接的流路, 流路切换机构,用于在开始除霜运转时将所述冷却器的入口从压缩机的入口排出到其排出口,并且将所述冷凝器的入口从所述压缩机的排出口移动到其入口 并且用于将所述常闭阀切换到打开状态。 所述冰箱还包括在其入口处连接到所述压缩机的排出口的散热器,浸没所述散热器的水箱或液体罐,浸入所述水箱或液体罐中的吸收器,以及连接在其上的喷射器 进口到所述压缩机的排放口,在其出口处到所述冷却器的入口,并且在其吸入口处连接到所述热接收器的出口。

    Spindle control system
    5.
    发明授权
    Spindle control system 失效
    主轴控制系统

    公开(公告)号:US4206392A

    公开(公告)日:1980-06-03

    申请号:US898696

    申请日:1978-04-21

    摘要: In a spindle control system in which a pulse coder is coupled with a spindle; a pulse train signal, derived from the pulse coder upon each rotation of the spindle through a predetermined rotational angle, is converted into an analog signal corresponding to the actual rotational speed of the spindle; and the analog signal is compared with a commanded speed signal to drive the spindle at the commanded speed. Upon application of a command for stopping the spindle at a predetermined position, a predetermined numerical value is set in an error register in accordance with a specified position signal from the pulse coder, the pulse train signal from the pulse coder is fed back to the error register, and the rotational position of the spindle is controlled with a signal corresponding to the content of the error register.

    摘要翻译: 在其中脉冲编码器与主轴联接的主轴控制系统中; 在主轴每转动预定旋转角度时从脉冲编码器导出的脉冲序列信号被转换为对应于主轴的实际转速的模拟信号; 并将模拟信号与指令速度信号进行比较,以指令速度驱动主轴。 在将主轴停止在预定位置的命令时,根据来自脉冲编码器的指定位置信号将预定数值设置在误差寄存器中,来自脉冲编码器的脉冲序列信号被反馈到误差 并且用对应于误差寄存器的内容的信号来控制主轴的旋转位置。

    Position measurement apparatus and method and pattern forming apparatus and writing method
    7.
    发明申请
    Position measurement apparatus and method and pattern forming apparatus and writing method 有权
    位置测量装置和方法以及图案形成装置和书写方法

    公开(公告)号:US20070024864A1

    公开(公告)日:2007-02-01

    申请号:US11492843

    申请日:2006-07-26

    IPC分类号: G01B11/02

    摘要: A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by said measurement unit, a second filter connected in parallel with said first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by said measurement unit, a third filter connected in series to said second filter with the series connection of said second and third filters connected in parallel with the first filter, configured to attenuate the first component of said certain frequency region of the measured value outputted by said measurement unit, and a synthetic unit configured to combine an output of said first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.

    摘要翻译: 位置测量装置包括可移动平台结构,使用激光测量台的移动位置并输出相应测量值的测量单元,被配置为衰减测量值的某个频率区域的第一分量的第一滤波器 由所述测量单元输出的与所述第一滤波器并联连接的第二滤波器被配置为衰减由所述测量单元输出的测量值的特定频率区域以外的第二分量;第三滤波器,其与所述第二滤波器串联连接, 与所述第一滤波器并联连接的所述第二和第三滤波器的串联连接,被配置为衰减由所述测量单元输出的测量值的所述特定频率区域的第一分量;以及合成单元,被配置为将所述第一滤波器的输出 以及第二和第三滤波器的串联连接的输出,从而输出 第一个合并价值。

    Mobile communication terminal capable of displaying communication mode

    公开(公告)号:US20060003801A1

    公开(公告)日:2006-01-05

    申请号:US11219891

    申请日:2005-09-07

    申请人: Kiyoshi Hattori

    发明人: Kiyoshi Hattori

    IPC分类号: H04Q7/20 H04M1/00

    摘要: In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.

    Charged particle beam system and chamber of charged particle beam system
    9.
    发明授权
    Charged particle beam system and chamber of charged particle beam system 有权
    带电粒子束系统和带电粒子束系统的腔室

    公开(公告)号:US06617592B2

    公开(公告)日:2003-09-09

    申请号:US09810478

    申请日:2001-03-19

    IPC分类号: A61N500

    摘要: A charged particle beam system includes a chamber having an opening in a ceiling, a table placed immediately below the opening and movable in one direction, a laser interferometer set in the chamber, including a laser oscillator placed along the moving direction of the table, a movable mirror placed on the table side opposing the oscillator, a beam splitter placed to cross the laser beam and a fixed mirror fixed, immediately above the beam splitter, on the ceiling of the chamber, an optical lens barrel having an opening communicating with the opening of the chamber, and a beam gun set on a ceiling of the optical lens barrel to irradiate a specimen placed on the table with a charged particle beam through the first and second openings. At least an upper wall portion from the opening to the fixed mirror of the chamber is made of an invar alloy.

    摘要翻译: 带电粒子束系统包括:在天花板上具有开口的腔室,放置在开口正下方并可在一个方向上移动的工作台;设置在腔室中的激光干涉仪,包括沿着工作台移动方向放置的激光振荡器, 放置在与振荡器相对的台面侧的可移动反射镜,放置成穿过激光束的分束器和在分束器正上方固定的固定镜,位于腔室的天花板上,光学透镜镜筒具有与开口连通的开口 以及设置在光学镜筒的天花板上的射束,以通过第一和第二开口照射放置在桌子上的带有带电粒子束的样本。 至少从腔室的开口到固定反射镜的上壁部分由凹入合金制成。