摘要:
In an electron beam drawing apparatus including an objective lens for focusing an electron beam emitted from an electron gun on a sample surface and an objective deflector for controlling the position of the electron beam on the sample surface, an objective driving mechanism for mechanically moving the objective lens and objective deflector in a plane perpendicular to the optical axis of the electron beam is provided and an optical axis shifting deflector arranged nearer to the electron gun than the objective lens and objective deflector, for deflecting the electron beam in synchronism with the operation of the objective lens and objective deflector is provided.
摘要:
There is provided a charged beam drawing apparatus which includes main/sub two-stage deflectors, divides a main deflection drawing region on a sample into sub deflection drawing regions determined by the deflection width of the sub deflector, selects one of the sub deflection drawing regions by use of the main deflector and draws shots in the selected sub deflection drawing region by use of the sub deflector. A sub deflection driving unit includes a sub deflection sensitivity correction circuit, a sub deflection astigmatic correction circuit, an adder circuit which adds an output of the sub deflection sensitivity correction circuit and an output of the sub deflection astigmatic correction circuit, and a deflection amplifier which additionally applies an output of the adder circuit to the sub deflector.
摘要:
In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.
摘要:
A refrigerator comprising in which a trap is provided between the outlet of a liquid receptacle and the outlet of a cooler via a normally-closed valve, a flow passage for connecting the lower portion of said trap to the outlet of a condenser is provided, and a flow passage switching mechanism for shifting, when starting a defrosting operation, the inlet of said cooler from the admission port of a compressor to the discharge port thereof, and the inlet of said condenser from the discharge port of said compressor to the admission port thereof, and for switching said normally-closed valve to open state is provided. Said refrigerator further comprising a radiator connected at its inlet to the discharge port of said compressor, a water tank or a liquid tank in which said radiator is immersed, a heat receiver immersed in said water tank or liquid tank, and an ejector connected at its inlet to the discharge port of said compressor, at its outlet to the inlet of said cooler and at its suction port to the outlet of said heat receiver.
摘要:
In a spindle control system in which a pulse coder is coupled with a spindle; a pulse train signal, derived from the pulse coder upon each rotation of the spindle through a predetermined rotational angle, is converted into an analog signal corresponding to the actual rotational speed of the spindle; and the analog signal is compared with a commanded speed signal to drive the spindle at the commanded speed. Upon application of a command for stopping the spindle at a predetermined position, a predetermined numerical value is set in an error register in accordance with a specified position signal from the pulse coder, the pulse train signal from the pulse coder is fed back to the error register, and the rotational position of the spindle is controlled with a signal corresponding to the content of the error register.
摘要:
Novel injection molding fiberglass reinforced thermoplastic concentrate granules are prepared by a process wherein continuous multifilament glass strands are impregnated with from 10 to 30 percent by weight of thermoplastic resin and, while the strand is maintained under controlled temperature conditions, the impregnated strand is cut to lengths of at least 1/8 of an inch.
摘要:
A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by said measurement unit, a second filter connected in parallel with said first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by said measurement unit, a third filter connected in series to said second filter with the series connection of said second and third filters connected in parallel with the first filter, configured to attenuate the first component of said certain frequency region of the measured value outputted by said measurement unit, and a synthetic unit configured to combine an output of said first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.
摘要:
In a mobile communication terminal connectable to a first base station using a first communication mode and a second base station using a second communication mode that is different from the first communication mode, a control message coming from an acquired one of the first and second base stations is received. Based on the received control message, the communication mode used in the base station is recognized, and information indicative of the recognized communication mode is informed to the user.
摘要:
A charged particle beam system includes a chamber having an opening in a ceiling, a table placed immediately below the opening and movable in one direction, a laser interferometer set in the chamber, including a laser oscillator placed along the moving direction of the table, a movable mirror placed on the table side opposing the oscillator, a beam splitter placed to cross the laser beam and a fixed mirror fixed, immediately above the beam splitter, on the ceiling of the chamber, an optical lens barrel having an opening communicating with the opening of the chamber, and a beam gun set on a ceiling of the optical lens barrel to irradiate a specimen placed on the table with a charged particle beam through the first and second openings. At least an upper wall portion from the opening to the fixed mirror of the chamber is made of an invar alloy.
摘要:
A boiling water reactor comprises a reactor pressure vessel accommodated in a vertical fashion, a core disposed at a low portion in the reactor pressure vessel, a plurality of control rods to be inserted from an upper side of the core into the spaces between adjacent fuel assemblies and withdrawn therefrom upwardly, a shroud surrounding the fuel assemblies so as to define the core and having an upper end opening, a shroud head which closes the upper end opening of the shroud and through which the control rods are inserted or withdrawn, a separator standing upward from the shroud head to carry out gas-water separation of steam generated from the core, a fixing pedestal disposed above the separator, a control rod driving mechanism mounted on the fixing pedestal and adapted to drive the control rods, a drier unit including a plurality of drier elements annularly arranged along an upper inner wall surface of the reactor pressure vessel and adapted to dry the steam passing through the steam flow hole of the fixing pedestal, and a jet pump unit disposed in a space between an outer surface of the shroud and an inner wall surface of the reactor pressure vessel.