Vertical heat processing apparatus and method for using the same
    1.
    发明申请
    Vertical heat processing apparatus and method for using the same 有权
    立式热处理装置及其使用方法

    公开(公告)号:US20080008566A1

    公开(公告)日:2008-01-10

    申请号:US11822282

    申请日:2007-07-03

    IPC分类号: H01L21/67 F27D11/12

    摘要: A vertical heat processing apparatus for performing a heat process on a plurality of target substrates all together includes a vertical process container configured to accommodate the target substrates and having a transfer port at a bottom; a holder configured to support the target substrates at intervals in a vertical direction inside the process container; and a heater disposed around the process container, and configured to supply heat rays through a sidewall of the process container, so as to heat an interior of the process container. A thermal buffer member is disposed between the heater and a lower end side of the process container to surround the lower end side, and is configured to decrease transmissibility of the lower end side for heat rays between the heater and target substrates inside the process container.

    摘要翻译: 一种垂直加热装置,用于对多个目标基板进行热处理,所述垂直加热装置一起包括垂直处理容器,其构造成容纳所述目标基板并且在底部具有转移口; 保持器,被构造成在处理容器内沿垂直方向间隔地支撑目标基板; 以及加热器,其设置在所述处理容器的周围,并且被配置为通过所述处理容器的侧壁提供热射线,以便加热所述处理容器的内部。 加热器和处理容器的下端侧之间设置有热缓冲部件,以包围下端侧,并且构造为降低加工器和加工容器内的目标基板之间的热线的下端侧的透射率。

    Vertical heat processing apparatus and method for using the same
    2.
    发明授权
    Vertical heat processing apparatus and method for using the same 有权
    立式热处理装置及其使用方法

    公开(公告)号:US07575431B2

    公开(公告)日:2009-08-18

    申请号:US11822282

    申请日:2007-07-03

    IPC分类号: F27D1/00

    摘要: A vertical heat processing apparatus for performing a heat process on a plurality of target substrates all together includes a vertical process container configured to accommodate the target substrates and having a transfer port at a bottom; a holder configured to support the target substrates at intervals in a vertical direction inside the process container; and a heater disposed around the process container, and configured to supply heat rays through a sidewall of the process container, so as to heat an interior of the process container. A thermal buffer member is disposed between the heater and a lower end side of the process container to surround the lower end side, and is configured to decrease transmissibility of the lower end side for heat rays between the heater and target substrates inside the process container.

    摘要翻译: 一种垂直加热装置,用于对多个目标基板进行热处理,所述垂直加热装置一起包括垂直处理容器,其构造成容纳所述目标基板并且在底部具有转移口; 保持器,被构造成在处理容器内沿垂直方向间隔地支撑目标基板; 以及加热器,其设置在所述处理容器的周围,并且被配置为通过所述处理容器的侧壁提供热射线,以便加热所述处理容器的内部。 加热器和处理容器的下端侧之间设置有热缓冲部件,以包围下端侧,并且构造为降低加工器和加工容器内的目标基板之间的热线的下端侧的透射率。