Resist stripping method and resist stripping apparatus
    1.
    发明授权
    Resist stripping method and resist stripping apparatus 失效
    抗剥离方法和抗剥离装置

    公开(公告)号:US07682463B2

    公开(公告)日:2010-03-23

    申请号:US11080878

    申请日:2005-03-15

    IPC分类号: B08B7/00 B08B3/04

    摘要: After the resist stripping liquid is supplied to the surface of the substrate which is being rotated at a first rotational speed, the rotational speed of the substrate is reduced from the first rotational speed to a second rotational speed with the supply of the resist stripping liquid to the surface of the substrate continued, thereby forming a liquid film by a mount of the resist stripping liquid on the surface of the substrate and then, maintaining a state where the liquid film is formed.

    摘要翻译: 在抗蚀剂剥离液体被供给到以第一转速旋转的基板的表面之后,通过将抗蚀剂剥离液供给到基板的旋转速度,将基板的旋转速度从第一转速减小到第二转速 基板的表面继续,由此通过在基板的表面上的抗蚀剂剥离液体的安装形成液膜,然后保持形成液膜的状态。

    Fuel Injection Valve
    4.
    发明申请
    Fuel Injection Valve 审中-公开
    燃油喷射阀

    公开(公告)号:US20120193454A1

    公开(公告)日:2012-08-02

    申请号:US13357657

    申请日:2012-01-25

    IPC分类号: B05B1/34

    CPC分类号: F02M61/1853 F02M61/162

    摘要: There is provided a fuel injection valve, in which uniformity in swirl intensity in a peripheral direction of a swirl fuel is heightened.A fuel injection valve comprises a valve element 3 and a valve seat 10, which cooperate to open and close a fuel passage to perform injection of a fuel and stoppage of injection, a nozzle body 4 having the valve seat 10, a swirl passage 21 provided downstream of a seat portion 10a, on which the valve element 3 and the valve seat 10 contact with each other, and a swirl chamber 22, to which the swirl passage 21 and a fuel injection port 23 are connected, and a recess (buffer) 24 for enlargement of the swirl chamber 22 in volume is provided on a wall surface portion 4a of the swirl chamber 22 opposed to the fuel injection port 23.

    摘要翻译: 提供了一种燃料喷射阀,其中涡流燃料的周向上的涡流强度的均匀性提高。 燃料喷射阀包括阀元件3和阀座10,其配合以打开和关闭燃料通道以执行燃料喷射和停止喷射,具有阀座10的喷嘴主体4,设置有旋转通道21 在阀元件3和阀座10彼此接触的座部分10a的下游,以及旋转通道21和燃料喷射口23连接的涡流室22和凹部(缓冲器) 在涡流室22的与燃料喷射口23相对的壁面部4a上设置体积大的涡流室22。

    MECHANISM FOR CONVERTING ROTATIONAL MOTION TO LINEAR MOTION
    5.
    发明申请
    MECHANISM FOR CONVERTING ROTATIONAL MOTION TO LINEAR MOTION 有权
    将旋转运动转换为线性运动的机制

    公开(公告)号:US20110303030A1

    公开(公告)日:2011-12-15

    申请号:US13160574

    申请日:2011-06-15

    IPC分类号: F16H25/22 B23P17/04 F16H25/20

    CPC分类号: F16H25/2266

    摘要: A rotational-to-linear conversion mechanism inhibits interference from occurring in places except for an engagement site to increase the efficiency of conversion mechanism and reliability, which has: a rack rod 1 including thread on its outer peripheral face; a holder member 3 provided on the outer periphery of the rack rod, rotating about the rack rod and moving in the axis direction; and revolving rollers 21 rotatably supported in the holder member, each having ring-shaped grooves formed in its outer peripheral face to be engaged with the thread, and placed at an axis angle with respect to a center axis of the rack rod to allow the ring-shaped grooves to be engaged with the thread on the rack rod. A contact face of the thread with each ring-shaped groove in an engagement site of the thread and the ring-shaped groove is formed as a convex face having different curvatures in a radial direction.

    摘要翻译: 旋转线性转换机构抑制除了接合位置之外的位置的干扰,以提高转换机构的效率和可靠性,其具有:在其外周面上包括螺纹的齿条杆1; 保持构件3,其设置在所述齿条的外周上,围绕所述齿杆杆旋转并沿轴向移动; 以及可转动地支撑在保持器构件中的旋转辊21,每个旋转辊21在其外周面上形成有与螺纹接合的环形槽,并且相对于齿条的中心轴以轴向倾斜的角度放置, 形状的槽与齿条杆上的螺纹接合。 在螺纹和环形槽的接合位置中的每个环形槽的螺纹的接触面形成为在径向上具有不同曲率的凸面。

    Substrate processing apparatus and substrate processing method
    7.
    发明授权
    Substrate processing apparatus and substrate processing method 有权
    基板加工装置及基板处理方法

    公开(公告)号:US07591922B2

    公开(公告)日:2009-09-22

    申请号:US11101739

    申请日:2005-04-08

    申请人: Yoshio Okamoto

    发明人: Yoshio Okamoto

    IPC分类号: H01B13/00 C23C16/00

    CPC分类号: H01L21/67253 Y10S134/902

    摘要: A substrate processing apparatus for supplying a treatment liquid onto the surface of a substrate to treat the same. This apparatus is provided with: a spin chuck for holding and rotating a substrate; a nozzle for supplying a treatment liquid to the substrate held by the spin chuck; a circulating passage arranged such that the treatment liquid supplied to the substrate from the nozzle and used for substrate treatment is circulated to the nozzle and reutilized for substrate treatment; a metal contamination amount measuring device for measuring the metal contamination amount in the treatment liquid passing through the circulating passage; and a judgment processing unit for judging whether or not the value measured by the metal contamination amount measuring device has exceeded a predetermined set value.

    摘要翻译: 一种基板处理装置,用于将处理液体供应到基板的表面上以对其进行处理。 该装置设有:用于保持和旋转衬底的旋转卡盘; 用于将处理液供给到由旋转卡盘保持的基板的喷嘴; 循环通道,其布置成使得从喷嘴供应到基板的处理液用于基板处理,循环到喷嘴并再利用以进行基板处理; 用于测量通过循环通道的处理液中的金属污染量的金属污染量测量装置; 以及判断处理单元,用于判断由金属污染量测量装置测量的值是否超过预定的设定值。

    Bead for Enantiomeric Isomer Resolution and Process for Producing the Same
    8.
    发明申请
    Bead for Enantiomeric Isomer Resolution and Process for Producing the Same 有权
    针对对映异构体异构体拆分及其制备方法

    公开(公告)号:US20090068468A1

    公开(公告)日:2009-03-12

    申请号:US11918331

    申请日:2006-04-28

    IPC分类号: B32B1/00 C07H3/00

    摘要: There is provided a process for producing beads for enantiomeric isomer resolution with a satisfactory separation efficiency. The beads for enantiomeric isomer resolution include a polysaccharide derivative, in which the polysaccharide derivative has a structure crosslinked at the 6-position hydroxy group of constituent units of the polysaccharide with a crosslinking agent. The process for producing the beads for enantiomeric isomer resolution includes: the step of adding dropwise an organic solvent solution of the polysaccharide derivative to a coagulation bath being stirred to thereby produce beads; the step of taking out the beads and then optionally drying the same after washing; and the step of reacting the beads with a crosslinking agent in an organic solvent to react at least part of the 6-position hydroxy groups in the constituent units of the polysaccharide with the crosslinking agent, thereby obtaining a reaction mixture containing beads having a crosslinked structure.

    摘要翻译: 提供了一种以令人满意的分离效率制备对映异构体拆分的珠的方法。 用于对映体异构体拆分的珠子包括多糖衍生物,其中多糖衍生物具有在多糖的构成单元的6-位羟基与交联剂交联的结构。 用于制备对映体异构体拆分的珠粒的方法包括:将滴加有机溶剂的多糖衍生物的溶液搅拌至凝固浴的步骤,从而产生珠粒; 取出珠粒,然后洗涤后任选地干燥珠粒的步骤; 和将珠粒与交联剂在有机溶剂中反应的步骤,使多糖的构成单元中的6位羟基的至少一部分与交联剂反应,得到含有交联结构的珠粒的反应混合物 。

    Chitosan Derivative and Method of Producing Same
    9.
    发明申请
    Chitosan Derivative and Method of Producing Same 有权
    壳聚糖衍生物及其生产方法

    公开(公告)号:US20090062519A1

    公开(公告)日:2009-03-05

    申请号:US11887521

    申请日:2006-04-28

    IPC分类号: C08B37/08

    摘要: Provided is a chitosan derivative having a high optical resolving power. Specifically provided is a chitosan derivative represented by the following Formula (I). wherein R1 represents an aliphatic group or an aromatic group having a carbon number of 1 to 30 which may have a substituent; R2 represents a substituent originating from an isocyanic acid derivative, carboxylic acid, ester, acid halide, acid amide compound, halide compound, aldehyde, or alcohol; and n is an integer of 5 or more.

    摘要翻译: 提供具有高光学分辨能力的壳聚糖衍生物。 具体提供的是由下式(I)表示的壳聚糖衍生物。 其中R1表示脂族基团或碳原子数为1〜30的可具有取代基的芳香族基团; R2表示衍生自异氰酸衍生物,羧酸,酯,酰卤,酰胺化合物,卤化物,醛或醇的取代基; n为5以上的整数。