摘要:
After the resist stripping liquid is supplied to the surface of the substrate which is being rotated at a first rotational speed, the rotational speed of the substrate is reduced from the first rotational speed to a second rotational speed with the supply of the resist stripping liquid to the surface of the substrate continued, thereby forming a liquid film by a mount of the resist stripping liquid on the surface of the substrate and then, maintaining a state where the liquid film is formed.
摘要:
After the resist stripping liquid is supplied to the surface of the substrate which is being rotated at a first rotational speed, the rotational speed of the substrate is reduced from the first rotational speed to a second rotational speed with the supply of the resist stripping liquid to the surface of the substrate continued, thereby forming a liquid film by a mount of the resist stripping liquid on the surface of the substrate and then, maintaining a state where the liquid film is formed.
摘要:
An object of the present invention is to provide a novel polysaccharide derivative used for a separating agent for optical isomers. The novel polysaccharide derivative contains a structure in which a hydrogen atom of a hydroxyl group or an amino group at 2-position in a structural unit of the polysaccharide is substituted with a monovalent group represented by the following general formula (1), and a hydrogen atom of a hydroxyl group or an amino group at 3-position in the structural unit is substituted with a monovalent group represented by the following general formula (2): R1—NH—CO— (1) R2—NH—CO— (2) where R1 and R2 represent substituted or unsubstituted aryl groups different from each other.
摘要:
There is provided a fuel injection valve, in which uniformity in swirl intensity in a peripheral direction of a swirl fuel is heightened.A fuel injection valve comprises a valve element 3 and a valve seat 10, which cooperate to open and close a fuel passage to perform injection of a fuel and stoppage of injection, a nozzle body 4 having the valve seat 10, a swirl passage 21 provided downstream of a seat portion 10a, on which the valve element 3 and the valve seat 10 contact with each other, and a swirl chamber 22, to which the swirl passage 21 and a fuel injection port 23 are connected, and a recess (buffer) 24 for enlargement of the swirl chamber 22 in volume is provided on a wall surface portion 4a of the swirl chamber 22 opposed to the fuel injection port 23.
摘要:
A rotational-to-linear conversion mechanism inhibits interference from occurring in places except for an engagement site to increase the efficiency of conversion mechanism and reliability, which has: a rack rod 1 including thread on its outer peripheral face; a holder member 3 provided on the outer periphery of the rack rod, rotating about the rack rod and moving in the axis direction; and revolving rollers 21 rotatably supported in the holder member, each having ring-shaped grooves formed in its outer peripheral face to be engaged with the thread, and placed at an axis angle with respect to a center axis of the rack rod to allow the ring-shaped grooves to be engaged with the thread on the rack rod. A contact face of the thread with each ring-shaped groove in an engagement site of the thread and the ring-shaped groove is formed as a convex face having different curvatures in a radial direction.
摘要:
The present invention provides: a polysaccharide derivative containing a structure wherein hydrogen atoms in a hydroxyl group or amino group at the 2-position and the 3-position of a structure unit of polysaccharide are substituted with different substituents respectively represented by a specific general formula; and, a separating agent for optical isomers, which contains such a polysaccharide derivative. The present invention can provide a novel polysaccharide derivative which has excellent optical isomer separating ability, and is thus suitable for a separating agent for optical isomers, and can provide a separating agent for optical isomers which comprises the polysaccharide derivative.
摘要:
A substrate processing apparatus for supplying a treatment liquid onto the surface of a substrate to treat the same. This apparatus is provided with: a spin chuck for holding and rotating a substrate; a nozzle for supplying a treatment liquid to the substrate held by the spin chuck; a circulating passage arranged such that the treatment liquid supplied to the substrate from the nozzle and used for substrate treatment is circulated to the nozzle and reutilized for substrate treatment; a metal contamination amount measuring device for measuring the metal contamination amount in the treatment liquid passing through the circulating passage; and a judgment processing unit for judging whether or not the value measured by the metal contamination amount measuring device has exceeded a predetermined set value.
摘要:
There is provided a process for producing beads for enantiomeric isomer resolution with a satisfactory separation efficiency. The beads for enantiomeric isomer resolution include a polysaccharide derivative, in which the polysaccharide derivative has a structure crosslinked at the 6-position hydroxy group of constituent units of the polysaccharide with a crosslinking agent. The process for producing the beads for enantiomeric isomer resolution includes: the step of adding dropwise an organic solvent solution of the polysaccharide derivative to a coagulation bath being stirred to thereby produce beads; the step of taking out the beads and then optionally drying the same after washing; and the step of reacting the beads with a crosslinking agent in an organic solvent to react at least part of the 6-position hydroxy groups in the constituent units of the polysaccharide with the crosslinking agent, thereby obtaining a reaction mixture containing beads having a crosslinked structure.
摘要:
Provided is a chitosan derivative having a high optical resolving power. Specifically provided is a chitosan derivative represented by the following Formula (I). wherein R1 represents an aliphatic group or an aromatic group having a carbon number of 1 to 30 which may have a substituent; R2 represents a substituent originating from an isocyanic acid derivative, carboxylic acid, ester, acid halide, acid amide compound, halide compound, aldehyde, or alcohol; and n is an integer of 5 or more.
摘要:
A separating agent which combines a high optical resolving power inherent in polysaccharide derivatives with sufficient solvent resistance and a method with which the separating agent can be produced efficiently in short steps. The separating agent for enantiomeric isomers is characterized in that a polymerizable polysaccharide derivative of a polysaccharide derivative having polymerizable functional groups and a polymerizable monomer having polymerizable unsaturated groups are copolymerized with a carrier having polymerizable functional groups to be chemically bound mutually. The separating agent is preferably used for high performance liquid chromatography (HPLC) and has an excellent solvent resistance.