Array substrate and method for manufacturing the same, display device

    公开(公告)号:US10204936B2

    公开(公告)日:2019-02-12

    申请号:US14405008

    申请日:2013-11-20

    Abstract: An array substrate includes a display region and a Gate driver On Array (GOA) region. In the GOA region, a gate metal electrode, a gate insulating layer, an active layer, a transition layer, and a source-drain metal electrode are formed in sequence from bottom to top, and a via hole is provided penetrating the transition layer, the active layer and the gate insulating layer, the source-drain metal electrode is electrically connected to the gate metal electrode through the via hole; and at an edge of the via hole, there is formed an angle opening upward at edges of the transition layer and the active layer. There are further disclosed a manufacturing method of the array substrate and a display device provided with the array substrate.

    Array substrate, manufacturing method of array substrate and display device

    公开(公告)号:US09929183B2

    公开(公告)日:2018-03-27

    申请号:US14387504

    申请日:2013-06-09

    Inventor: Jian Guo

    CPC classification number: H01L27/124 H01L27/1259 H01L27/127

    Abstract: Embodiments of the present invention disclose an array substrate, a manufacturing method of the array substrate and a display device, and the manufacturing method of the array substrate comprises: forming a gate line and a gate electrode on a base substrate; forming a gate insulating layer above the gate line and the gate electrode; successively depositing a semiconductor layer and a metal layer above the gate insulating layer, and forming an active layer, a source electrode and a drain electrode that are disposed above the gate electrode and a residual semiconductor layer disposed above the gate line and a signal line covering the residual semiconductor layer by using one patterning process; performing a patterning process for the signal line, the residual semiconductor layer disposed below the signal line and the gate insulating layer to form a via hole, so that a surface of the gate line, side sectional surfaces of the signal line, side sectional surfaces of the residual semiconductor layer and side sectional surfaces of the gate insulating layer are exposed through the via hole; and forming a lapping conductive layer at a position where the via hole is located, so that the signal line and the gate line are electrically connected.

    Array substrate, preparation method thereof and display device

    公开(公告)号:US09799683B2

    公开(公告)日:2017-10-24

    申请号:US15098914

    申请日:2016-04-14

    CPC classification number: H01L27/1248 H01L27/124 H01L27/1244 H01L27/1259

    Abstract: The present invention provides an array substrate, a preparation method thereof and a display device. The array substrate includes at least one thin film transistor and a resin layer having at least one resin via hole, wherein a film-thickness-difference-adjusting layer used for reducing the film thickness difference at the resin via hole is arranged at the lower part of the resin layer in at least a part of the resin via hole. By providing the film-thickness-difference-adjusting layer, the film thickness difference at the resin via hole can be effectively reduced, and when a photolithographic process is performed, the difference of the thickness of the photoresist here and the thicknesses at other positions is reduced, so that the via hole fluctuation of a passivation layer caused by the larger film thickness difference at the resin via hole is improved, and the metal residue problem of the pixel electrodes is effectively avoided.

    ARRAY SUBSTRATE, DISPLAY DEVICE HAVING THE SAME, AND FABRICATING METHOD THEREOF
    8.
    发明申请
    ARRAY SUBSTRATE, DISPLAY DEVICE HAVING THE SAME, AND FABRICATING METHOD THEREOF 有权
    阵列基板,具有该基板的显示装置及其制造方法

    公开(公告)号:US20170005117A1

    公开(公告)日:2017-01-05

    申请号:US15030596

    申请日:2015-12-28

    Inventor: Jian Guo

    CPC classification number: H01L27/1248 G02F1/136227 H01L27/1259 H01L29/41733

    Abstract: The present application discloses a method of fabricating an array substrate comprising forming a via extending through a first insulating layer and a second insulating layer, the via comprising a first sub-via in the first insulating layer and the second sub-via in a second insulating layer; mobilizing a portion of first insulating layer material surrounding the first sub-via; and distributing the mobilized portion of the first insulating layer material over a sidewall of the second sub-via.

    Abstract translation: 本申请公开了一种制造阵列基板的方法,包括形成延伸穿过第一绝缘层和第二绝缘层的通孔,所述通孔包括在第一绝缘层中的第一子通孔和在第二绝缘层中的第二子通孔 层; 移动围绕所述第一子通路的第一绝缘层材料的一部分; 以及将第一绝缘层材料的动员部分分布在第二子通孔的侧壁上。

    ARRAY SUBSTRATE, FABRICATION METHOD THEREOF AND DISPLAY DEVICE
    10.
    发明申请
    ARRAY SUBSTRATE, FABRICATION METHOD THEREOF AND DISPLAY DEVICE 审中-公开
    阵列基板,其制造方法和显示装置

    公开(公告)号:US20150303225A1

    公开(公告)日:2015-10-22

    申请号:US14439999

    申请日:2014-09-05

    Abstract: An array substrate and a fabrication method thereof and a display device are provided. The fabrication method comprises: preparing a base substrate, the base substrate including a pixel region and a gate on array region; forming a pattern including a gate electrode and a pattern of an active layer on the base substrate, and forming a gate lead on the gate on array region, by a first patterning process; forming a pattern of a gate insulating layer by a second patterning process; forming a pattern including a source/drain electrode by a third patterning process; forming a pattern of a planarization layer by a fourth patterning layer; and forming a pattern including a pixel electrode by a fifth patterning layer.

    Abstract translation: 提供阵列基板及其制造方法和显示装置。 所述制造方法包括:准备基底基板,所述基底基板包括像素区域和阵列区域上的栅极; 在基底基板上形成包括栅电极和有源层图形的图案,并通过第一图案化工艺在阵列区上的栅极上形成栅极引线; 通过第二图案化工艺形成栅极绝缘层的图案; 通过第三图案化工艺形成包括源极/漏极的图案; 通过第四图案形成层形成平坦化层的图案; 以及通过第五图案形成层形成包括像素电极的图案。

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