MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
    3.
    发明申请
    MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE 审中-公开
    半导体器件的制造方法

    公开(公告)号:US20090160084A1

    公开(公告)日:2009-06-25

    申请号:US12158289

    申请日:2006-12-28

    IPC分类号: B29C45/00

    摘要: A lead frame is equipped between an upper die with which a gate port and an air vent part are not formed in a cavity part 12a and a lower die in which a gate port 15f is formed in one place of a corner of a cavity part 15a and an air vent part is not formed. After decompressing the inside of the die formed of the cavity parts 12a and 15a by clamping the upper die and the lower die with the clamp pressure of intermediate pressure, mold resin is allowed to flow in the die. Residual air is exhausted while allowing mold resin to flow in the die formed of the cavity parts 12a and 15a by once clamping the upper die and the lower die with low-pressure clamp pressure. Then, the mold resin which filled up in the die formed of the cavity parts 12a and 15a is formed by clamping the upper die and the lower die with high-pressure clamp pressure.

    摘要翻译: 在空腔部分12a中没有形成门口和排气部的上模具之间设有引线框架,在空腔部分15a的角部的一个位置形成有栅极端口15f的下模具 并且不形成排气部。 在通过用中间压力的夹持压力夹紧上模和下模对由空腔部分12a和15a形成的模具的内部进行减压之后,使模制树脂在模具中流动。 残留的空气被排出,同时通过在低压夹紧压力下一次夹紧上模和下模,同时允许模制树脂在由空腔部分12a和15a形成的模具中流动。 然后,通过用高压夹持压力夹紧上模和下模,形成填充在由空腔部分12a和15a形成的模具中的模制树脂。

    Method of manufacturing a semiconductor device
    6.
    发明授权
    Method of manufacturing a semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08119050B2

    公开(公告)日:2012-02-21

    申请号:US11187864

    申请日:2005-07-25

    IPC分类号: B29C70/70

    摘要: Improvement in the yield of a semiconductor device is aimed at. When extruding a molded body with the ejector pin which performs advance-or-retreat movement at the projecting portion which projects from this bottom face in the bottom face of a mold cavity corresponding to the surface and the mounting side of a molded body after forming a molded body, depressed portions being formed in the surface and the mounting side by projecting portions, they can extrude. When accumulating molded bodies themselves in the baking step after a resin molding step and performing bake, by arranging the resin burr which furthermore withdrew from the surface and the mounting side in the depressed portion, bake can be performed in the condition that the accumulated molded bodies are stuck. Therefore, the form of deformation of a warp etc. of each molded body or a lead frame, can be made uniform, and, as a result, improvement in the yield of QFP (semiconductor device) is aimed at.

    摘要翻译: 目的在于提高半导体器件的产量。 当在顶出部分挤出成型体时,该突起部在形成一个成形体的模具的表面和安装侧的模腔的底面中从该底面从该底面突出的突出部分进行前进或后退运动 成型体,通过突出部在表面和安装侧形成凹部,它们可以挤出。 在树脂成形工序后的烘烤工序中自体积聚成型体,进行烘烤时,通过将从表面退出的树脂毛刺和凹部的安装侧配置,可以在累积成型体 被卡住 因此,可以使每个成形体或引线框架的翘曲等的变形形式均匀,从而旨在提高QFP(半导体器件)的产量。