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42 条记录 (耗时 0.031 秒)

    Systems for magnification and distortion correction for imprint lithography processes
    4.
    发明申请
    Systems for magnification and distortion correction for imprint lithography processes 有权
    用于压印光刻工艺的放大和失真校正系统

    公开(公告)号：US20050006343A1

    公开(公告)日：2005-01-13

    申请号：US10616294

    申请日：2003-07-09

    申请人： Byung Choi ,  Sidlgata Sreenivasan ,  Mario Meissl

    发明人： Byung Choi ,  Sidlgata Sreenivasan ,  Mario Meissl

    IPC分类号： G01L21/30 ,  G03F20060101 ,  G03F7/00

    CPC分类号： G03F7/0002 ,  B29C43/003 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00

    摘要： The present invention is directed toward a system to vary dimensions of a template in order to attenuate if not prevent distortions in an underlying pattern formed by the template. To that end, the system features a compression device that includes a pair of spaced-apart contact members to compress a perimeter surface of the template between the pair of spaced-apart contact members. The compression device includes first and second bodies, each has a contact member and an actuator arm. One of the actuator arms is coupled to the first body to reciprocate about an axis in response to variations of a volume of a bladder disposed adjacent to the actuator arm. In this manner, the distance between the two contact members may be varied.

    摘要翻译： 本发明涉及一种改变模板尺寸的系统，以便衰减如果不是防止由模板形成的底层图案的失真。 为此，该系统具有压缩装置，该压缩装置包括一对间隔开的接触构件，以在一对间隔开的接触构件之间压缩模板的周边表面。 压缩装置包括第一和第二主体，每个具有接触构件和致动器臂。 致动器臂中的一个联接到第一主体以响应于邻近致动器臂设置的气囊的体积的变化而围绕轴线往复运动。 以这种方式，可以改变两个接触构件之间的距离。

    Conforming Template for Patterning Liquids Disposed on Substrates
    5.
    发明申请
    Conforming Template for Patterning Liquids Disposed on Substrates 有权
    符合基板上图案化液体的模板

    公开(公告)号：US20070122942A1

    公开(公告)日：2007-05-31

    申请号：US11669569

    申请日：2007-01-31

    申请人： Sidlgata Sreenivasan ,  Byung Choi ,  Ronald Voisin

    发明人： Sidlgata Sreenivasan ,  Byung Choi ,  Ronald Voisin

    IPC分类号： H01L21/00 ,  B28B11/08

    CPC分类号： B29C43/003 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10S977/887

    摘要： The present invention includes a conforming template for patterning liquids disposed on substrates. The template includes a body having opposed first and second surfaces. The first surface includes a plurality of recessed regions with a patterning region being disposed between adjacent recessed regions. Specifically, the recessed regions define flexure regions about which each patterning region may move independent of the remaining patterning regions of the template. In one embodiment the template is mounted to a fluid chamber having an inlet and a throughway. The template is connected to the throughway and the inlet is connected to a fluid source to facilitate deformation of the template to conform to a profile of a surface adjacent thereto.

    摘要翻译： 本发明包括用于图案化液体配置在基板上的一致性模板。 模板包括具有相对的第一和第二表面的主体。 第一表面包括多个凹陷区域，其中图案化区域设置在相邻的凹陷区域之间。 具体地，凹陷区域限定挠曲区域，每个图案化区域围绕该弯曲区域可独立于模板的剩余图案形成区域移动。 在一个实施例中，模板安装到具有入口和通道的流体室。 模板连接到通道，并且入口连接到流体源以便于模板的变形以符合与其相邻的表面的轮廓。

    Conforming template for patterning liquids disposed on substrates
    6.
    发明申请
    Conforming template for patterning liquids disposed on substrates 有权
    符合设置在基板上的图案化液体的模板

    公开(公告)号：US20050051698A1

    公开(公告)日：2005-03-10

    申请号：US10614716

    申请日：2003-07-07

    申请人： Sidlgata Sreenivasan ,  Byung Choi ,  Ronald Voisin

    发明人： Sidlgata Sreenivasan ,  Byung Choi ,  Ronald Voisin

    IPC分类号： B29C33/42 ,  G03F7/00

    CPC分类号： B29C43/003 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10S977/887

    摘要： The present invention includes a conforming template for patterning liquids disposed on substrates. The template includes a body having opposed first and second surfaces. The first surface includes a plurality of recessed regions with a patterning region being disposed between adjacent recessed regions. Specifically, the recessed regions define flexure regions about which each patterning region may move independent of the remaining patterning regions of the template. In one embodiment the template is mounted to a fluid chamber having an inlet and a throughway. The template is connected to the throughway and the inlet is connected to a fluid source to facilitate deformation of the template to conform to a profile of a surface adjacent thereto.

    摘要翻译： 本发明包括用于图案化液体配置在基板上的一致性模板。 模板包括具有相对的第一和第二表面的主体。 第一表面包括多个凹陷区域，其中图案化区域设置在相邻的凹陷区域之间。 具体地，凹陷区域限定挠曲区域，每个图案化区域围绕该弯曲区域可独立于模板的剩余图案形成区域移动。 在一个实施例中，模板安装到具有入口和通道的流体室。 模板连接到通道，并且入口连接到流体源以便于模板的变形以符合与其相邻的表面的轮廓。

    Apparatus to control displacement of a body spaced-apart from a surface
    8.
    发明申请
    Apparatus to control displacement of a body spaced-apart from a surface 有权
    用于控制与表面间隔开的主体的位移的装置

    公开(公告)号：US20050264132A1

    公开(公告)日：2005-12-01

    申请号：US11118070

    申请日：2005-04-29

    申请人： Byung Choi ,  Sidlgata Sreenivasan ,  Stephen Johnson

    发明人： Byung Choi ,  Sidlgata Sreenivasan ,  Stephen Johnson

    IPC分类号： G03F7/20 ,  G03F7/00 ,  G03F9/00 ,  H01L21/027 ,  H02N2/00

    CPC分类号： G03F9/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

    摘要： An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes.

    摘要翻译： 用于控制与表面间隔开的物体的位移的装置包括具有限定第一旋转轴线的第一弯曲构件和限定第二旋转轴线的第二挠曲构件的挠曲系统。 身体联接到挠曲系统以围绕多个轴线移动。 致动系统联接到挠曲系统以选择性地限制身体沿着多个轴的子集的运动。

    ASSEMBLY AND METHOD FOR TRANSFERRING IMPRINT LITHOGRAPHY TEMPLATES
    9.
    发明申请
    ASSEMBLY AND METHOD FOR TRANSFERRING IMPRINT LITHOGRAPHY TEMPLATES 失效
    用于传输印记碎片模板的装配和方法

    公开(公告)号：US20050214398A1

    公开(公告)日：2005-09-29

    申请号：US10437476

    申请日：2003-05-14

    申请人： Mario Meissl ,  Byung Choi

    发明人： Mario Meissl ,  Byung Choi

    IPC分类号： B29C33/30 ,  B29C53/02 ,  B29C59/02 ,  B41L39/00 ,  G03C5/00 ,  G03F7/00

    CPC分类号： G03F7/0002 ,  B29C43/003 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00

    摘要： Disclosed is a template transfer assembly and method that features a template transfer substrate, and a template having first and second sides, with the first side facing away from the template transfer substrate and the second side facing the template transfer substrate and having mold pattern formed thereon. Polymerized imprint material is disposed between the second side and the template transfer substrate to fixedly attach the template to the template transfer substrate. The method of transferring an imprint lithography template includes dispensing a selected volume of imprinting fluid onto the template transfer substrate, placing the template upon the selected volume; and converting the imprinting fluid to solid imprint material. The selected volume of imprint material is of sufficient quantity to fixedly attach the template to the template transfer substrate while maintaining a space between the mold and the template transfer substrate.

    摘要翻译： 公开了一种具有模板转移基板的模板转印组件和方法，以及具有第一和第二侧面的模板，其中第一侧背离模板转印基板，第二面朝向模板转印基板并且具有形成在其上的模具图案 。 聚合压印材料设置在第二侧和模板转移衬底之间，以将模板固定地附着到模板转移衬底上。 传送压印光刻模板的方法包括将选定体积的压印流体分配到模板转移衬底上，将模板放置在所选择的体积上; 并将压印流体转换成固体印记材料。 所选择的压印材料量足以将模板固定到模板转移基板上，同时保持模具和模板转印基板之间的空间。