SYSTEM FOR TESTING A FLAT PANEL DISPLAY DEVICE AND METHOD THEREOF
    1.
    发明申请
    SYSTEM FOR TESTING A FLAT PANEL DISPLAY DEVICE AND METHOD THEREOF 有权
    用于测试平板显示设备的系统及其方法

    公开(公告)号:US20090224777A1

    公开(公告)日:2009-09-10

    申请号:US12279066

    申请日:2007-02-15

    IPC分类号: G01R31/302 G06F19/00

    CPC分类号: G02F1/1309

    摘要: A system for testing a flat panel display having a flat display panel assembly includes a testing stage for arranging tie flat display panel assembly, a measuring apparatus being disposed on the testing stage and for measuring a spectrum of a transmitted light passing through a measuring region of the flat display panel assembly from a light source, a transporting apparatus for moving the measuring apparatus at a constant acceleration on the testing stage, a defect informing apparatus being electrically connected to the measuring apparatus and for informing an existence of defect, a type of defect, and a severity of defect by processing an electrical signal of the spectrum transmitted from the measuring apparatus.

    摘要翻译: 一种用于测试具有平面显示面板组件的平板显示器的系统,包括用于布置平面显示面板组件的测试台,测量装置设置在测试台上,并用于测量通过测量区域的测量区域的透射光的光谱 来自光源的平面显示面板组件,用于在测试台上以恒定加速度移动测量装置的传送装置,与测量装置电连接并用于通知缺陷的存在的缺陷通知装置,缺陷的类型 以及通过处理从测量装置发送的频谱的电信号的缺陷的严重性。

    System for testing a flat panel display device and method thereof
    2.
    发明授权
    System for testing a flat panel display device and method thereof 有权
    用于测试平板显示装置的系统及其方法

    公开(公告)号:US07859274B2

    公开(公告)日:2010-12-28

    申请号:US12279066

    申请日:2007-02-15

    CPC分类号: G02F1/1309

    摘要: A system for testing a flat panel display having a flat display panel assembly includes a testing stage for arranging the flat display panel assembly, a measuring apparatus being disposed on the testing stage and for measuring a spectrum of a transmitted light passing through a measuring region of the flat display panel assembly from a light source, a transporting apparatus for moving the measuring apparatus at a constant acceleration on the testing stage, a defect informing apparatus being electrically connected to the measuring apparatus and for informing an existence of defect, a type of defect, and a severity of defect by processing an electrical signal of the spectrum transmitted from the measuring apparatus.

    摘要翻译: 一种用于测试具有平面显示面板组件的平板显示器的系统,包括:用于布置平面显示面板组件的测试台;测量装置,设置在测试台上,并用于测量通过测量区域的测量区域的透射光谱; 来自光源的平面显示面板组件,用于在测试台上以恒定加速度移动测量装置的传送装置,与测量装置电连接并用于通知缺陷的存在的缺陷通知装置,缺陷的类型 以及通过处理从测量装置发送的频谱的电信号的缺陷的严重性。

    Method of controlling metallic layer etching process and regenerating etchant for metallic layer etching process based on near infrared spectrometer
    3.
    发明授权
    Method of controlling metallic layer etching process and regenerating etchant for metallic layer etching process based on near infrared spectrometer 失效
    基于近红外光谱仪控制金属层蚀刻工艺和金属层蚀刻工艺再生蚀刻剂的方法

    公开(公告)号:US07112795B2

    公开(公告)日:2006-09-26

    申请号:US10276703

    申请日:2001-03-27

    IPC分类号: G01J5/02

    摘要: In a method of controlling a metallic layer etching process for fabricating a semiconductor device or a liquid crystal display device, the composition of the etchant used in etching the metallic layer is first analyzed with the NIR spectrometer. The state of the etchant is then determined by comparing the analyzed composition with the reference composition. In case the life span of the etchant comes to an end, the etchant is replaced with a new etchant. By contrast, in case the life span of the etchant is left over, the etchant is delivered to the next metallic layer etching process. This analysis technique may be applied to the etchant regenerating process in a similar way.

    摘要翻译: 在控制用于制造半导体器件或液晶显示器件的金属层蚀刻工艺的方法中,首先用NIR光谱仪分析用于蚀刻金属层的蚀刻剂的组成。 然后通过将分析的组合物与参考组合物进行比较来确定蚀刻剂的状态。 如果蚀刻剂的使用寿命终止,蚀刻剂将被新的蚀刻剂所取代。 相比之下,在蚀刻剂的寿命被遗留的情况下,蚀刻剂被输送到下一个金属层蚀刻工艺。 该分析技术可以以类似的方式应用于蚀刻剂再生过程。