THIN SEMICONDUCTOR CHIP PICKUP APPARATUS AND METHOD
    2.
    发明申请
    THIN SEMICONDUCTOR CHIP PICKUP APPARATUS AND METHOD 审中-公开
    薄半导体芯片撷取器和方法

    公开(公告)号:US20080092360A1

    公开(公告)日:2008-04-24

    申请号:US11864452

    申请日:2007-09-28

    IPC分类号: B23P19/00

    摘要: Provided are a thin semiconductor chip pickup apparatus and method for detaching a die bonding film from a semiconductor chip using the apparatus. The apparatus may include a stage for supporting a die-bonding film to which a semiconductor chip is attached, a plurality of suction members arranged on the center of the stage for extracting the die-bonding film by a vacuum, where the suction members detach the die-bonding film away from the semiconductor chip to form a vacuum region, and a plurality of vacuum suction ports respectively interposed between adjacent suction members to allow the suction members to detach the die-bonding film by the vacuum.

    摘要翻译: 提供了一种使用该装置从半导体芯片分离芯片接合薄膜的薄的半导体芯片拾取装置和方法。 该装置可以包括用于支撑安装有半导体芯片的芯片接合膜的载物台,布置在载物台的中心的多个抽吸构件用于通过真空抽出芯片接合薄膜,其中抽吸构件分离 将半导体芯片的芯片接合膜形成真空区域,分别插入相邻的吸引部件之间的多个真空吸引口,使吸引部件通过真空分离芯片接合薄膜。