摘要:
A programmable device with a metal oxide semiconductor field effect transistor (MOSFET) surrounded by a programmable substrate region is described. The MOSFET has a source and drain region separated by a channel region with an insulating region and gate disposed above the channel region. A junction disposed within the substrate region controls the programmable substrate region. Biasing the junction depletes the substrate region, which isolates the body of the MOSFET from a secondary well. When the junction is left unbiased, the body of the MOSFET is electrically coupled to the secondary well.
摘要:
Metal-oxide-metal capacitors with bar vias are provided for integrated circuits. The capacitors may be formed in the interconnect layers of integrated circuits. Stacked bar vias and metal lines in the interconnect layers may be connected to form conductive vertical plates that span multiple interconnect layers. The capacitors with bar vias may be formed by placing multiple vertical plates formed from stacked bar vias and metal lines parallel to each other, alternating the polarity of adjacent vertical parallel plates to form multiple parallel plate capacitors. The parallel plates may be interconnected to form first and second terminals in a capacitor.
摘要:
A deep trench capacitor includes a trench having walls and a floor. The deep trench capacitor also includes a layer of gate oxide on the walls and floor. Gate polysilicon is deposited over the gate oxide.
摘要:
Integrated circuits with transistors and decoupling capacitor structures are provided. A decoupling capacitor structure may include multiple deep trench structures formed in a semiconductor substrate. The deep trench structures may each be lined with high-κ dielectric material. A conductive metal layer for use in controlling threshold voltages associated with n-channel or p-channel devices may be formed over the high-κ dielectric liner. Conductive material such as aluminum may be used to fill the remaining trench cavity. The high-κ dielectric liner may be simultaneously deposited into the deep trench structures and gate regions of the transistors. In one suitable arrangement, the deep trench structures and transistor metal gates for at least a selected type of transistors may be formed in parallel. In another suitable arrangement, the deep trench structures and the transistor metal gates may be formed in separate steps.
摘要:
Provided is a high resistance value vertically-integrated semiconductor interconnect with resistance in the 10 k&OHgr;-10 G&OHgr; range, and a process to make such highly resistive interconnects together with low resistive interconnects in a precisely controllable manner. In addition, provided is an SRAM cell with highly resistive contact processing for a pull-up resistor.
摘要:
Provided is a high resistance value vertically-integrated semiconductor interconnect, and a process to make such highly resistive interconnects together with low resistive interconnects in a precisely controllable manner. In addition, provided is an SRAM cell with highly resistive contact processing for a pull-up resistor.