Method and apparatus for reducing implant topography reflection effect
    2.
    发明授权
    Method and apparatus for reducing implant topography reflection effect 有权
    减少种植体形貌反射效应的方法和装置

    公开(公告)号:US08572519B2

    公开(公告)日:2013-10-29

    申请号:US12758147

    申请日:2010-04-12

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36 G03F1/70

    摘要: Embodiments of the present disclosure provide methods and apparatuses for integrated circuits. An exemplary integrated circuit (IC) method includes providing an IC design layout that includes a design feature; determining a dimensional difference between the design feature and a corresponding developed photoresist feature of a photoresist layer; modifying the CD of the design feature to compensate for the difference, thereby generating a modified IC design layout; and making a mask using the modified IC design layout.

    摘要翻译: 本公开的实施例提供用于集成电路的方法和装置。 一种示例性的集成电路(IC)方法包括提供包括设计特征的IC设计布局; 确定所述设计特征和光致抗蚀剂层的相应展开的光致抗蚀剂特征之间的尺寸差; 修改设计特征的CD以补偿差异,从而生成修改的IC设计布局; 并使用修改的IC设计布局制作面具。

    Hard Mask Removal for Semiconductor Devices
    3.
    发明申请
    Hard Mask Removal for Semiconductor Devices 有权
    半导体器件的硬掩模去除

    公开(公告)号:US20110223753A1

    公开(公告)日:2011-09-15

    申请号:US12724157

    申请日:2010-03-15

    IPC分类号: H01L21/3065 H01L21/28

    摘要: A method of removing a hard mask during fabrication of semiconductor devices is provided. A protective layer, such as a bottom anti-reflective coating (BARC) layer or other dielectric layer, is formed over structures formed on a substrate, wherein spacers are formed alongside the structures. In an embodiment, the structures are gate electrodes having a hard mask formed thereon and the spacers are spacers formed alongside the gate electrodes. A photoresist layer is formed over the protective layer, and the photoresist layer may be patterned to remove a portion of the photoresist layer over portions of the protective layer. Thereafter, an etch-back process is performed, such that the protective layer adjacent to the spacers remains to substantially protect the spacers. The hard mask is then removed while the protective layer protects the spacers.

    摘要翻译: 提供了在制造半导体器件期间去除硬掩模的方法。 在衬底上形成的结构上形成诸如底部抗反射涂层(BARC)层或其它电介质层的保护层,其中间隔物沿着结构形成。 在一个实施例中,结构是具有形成在其上的硬掩模的栅电极,并且间隔物是与栅电极一起形成的间隔物。 在保护层上形成光致抗蚀剂层,并且可以对光致抗蚀剂层进行图案化以在保护层的部分上去除光致抗蚀剂层的一部分。 此后,执行回蚀处理,使得与间隔物相邻的保护层保持基本上保护间隔物。 然后去除硬掩模,同时保护层保护间隔物。

    Flexible capacity memory IC
    4.
    发明申请
    Flexible capacity memory IC 审中-公开
    灵活容量存储IC

    公开(公告)号:US20060285419A1

    公开(公告)日:2006-12-21

    申请号:US11153264

    申请日:2005-06-16

    IPC分类号: G11C8/00

    CPC分类号: G11C8/12 G11C2207/105

    摘要: More than one memory areas are connected in parallel to increase the memory capacity when activated. The different memory area in a single unit die is activated by a selector pad which controls a single-pole, double throw switch to enable or disable the different memory areas. The corresponding pads of like memory areas are interconnected.

    摘要翻译: 并行连接多个存储器区域以增加激活时的存储容量。 单个单元管芯中的不同存储区域由控制单极双掷开关的选择器板激活,以启用或禁用不同的存储区域。 类似存储区域的相应焊盘是相互连接的。

    Scaled video output overlaid onto a computer graphics output
    5.
    发明授权
    Scaled video output overlaid onto a computer graphics output 失效
    缩放的视频输出覆盖在计算机图形输出上

    公开(公告)号:US5710573A

    公开(公告)日:1998-01-20

    申请号:US434974

    申请日:1995-05-04

    摘要: A display control apparatus is provided to generate a scaled video output overlaid onto a computer graphics output. The display control apparatus includes a timing generator, adapted to receive a horizontal synchronization signal of the computer graphics output and the pixel number of horizontal scan line of the scaled video output, for generating a pixel clock of scaled video output and a horizontal lock signal; a scaling buffer, storing a video digital pixel data and having an output port generating the scaled video output, responsive to the pixel clock of scaled video output; an overlay controller, coupled to a controller bus and receiving an analog pixel data of the computer graphics output and, responsive to the pixel clock of scaled video output, the horizontal lock signal and a vertical synchronization signal of the computer graphics output, for overlaying the scaled video output onto the computer graphics output.

    摘要翻译: 提供显示控制装置以产生叠加在计算机图形输出上的缩放视频输出。 显示控制装置包括定时发生器,用于接收计算机图形输出的水平同步信号和缩放视频输出的水平扫描线的像素数,用于产生缩放视频输出的像素时钟和水平锁定信号; 缩放缓冲器,存储视频数字像素数据,并具有产生缩放视频输出的输出端口,响应缩放视频输出的像素时钟; 覆盖控制器,耦合到控制器总线并接收计算机图形输出的模拟像素数据,并且响应于缩放视频输出的像素时钟,水平锁定信号和计算机图形输出的垂直同步信号,以覆盖 缩放视频输出到计算机图形输出。

    Hard mask removal for semiconductor devices
    7.
    发明授权
    Hard mask removal for semiconductor devices 有权
    半导体器件的硬掩模去除

    公开(公告)号:US08372719B2

    公开(公告)日:2013-02-12

    申请号:US12724157

    申请日:2010-03-15

    IPC分类号: H01L21/461 H01L21/027

    摘要: A method of removing a hard mask during fabrication of semiconductor devices is provided. A protective layer, such as a bottom anti-reflective coating (BARC) layer or other dielectric layer, is formed over structures formed on a substrate, wherein spacers are formed alongside the structures. In an embodiment, the structures are gate electrodes having a hard mask formed thereon and the spacers are spacers formed alongside the gate electrodes. A photoresist layer is formed over the protective layer, and the photoresist layer may be patterned to remove a portion of the photoresist layer over portions of the protective layer. Thereafter, an etch-back process is performed, such that the protective layer adjacent to the spacers remains to substantially protect the spacers. The hard mask is then removed while the protective layer protects the spacers.

    摘要翻译: 提供了在制造半导体器件期间去除硬掩模的方法。 在衬底上形成的结构上形成诸如底部抗反射涂层(BARC)层或其它电介质层的保护层,其中间隔物沿着结构形成。 在一个实施例中,结构是具有形成在其上的硬掩模的栅电极,并且间隔物是与栅电极一起形成的间隔物。 在保护层上形成光致抗蚀剂层,并且可以对光致抗蚀剂层进行图案化以在保护层的部分上去除光致抗蚀剂层的一部分。 此后,执行回蚀处理,使得与间隔物相邻的保护层保持基本上保护间隔物。 然后去除硬掩模,同时保护层保护间隔物。

    METHOD AND APPARATUS FOR REDUCING IMPLANT TOPOGRAPHY REFLECTION EFFECT
    8.
    发明申请
    METHOD AND APPARATUS FOR REDUCING IMPLANT TOPOGRAPHY REFLECTION EFFECT 有权
    用于减少植入地形反射效应的方法和装置

    公开(公告)号:US20110252387A1

    公开(公告)日:2011-10-13

    申请号:US12758147

    申请日:2010-04-12

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36 G03F1/70

    摘要: Embodiments of the present disclosure provide methods and apparatuses for integrated circuits. An exemplary integrated circuit (IC) method includes providing an IC design layout that includes a design feature; determining a dimensional difference between the design feature and a corresponding developed photoresist feature of a photoresist layer; modifying the CD of the design feature to compensate for the difference, thereby generating a modified IC design layout; and making a mask using the modified IC design layout.

    摘要翻译: 本公开的实施例提供用于集成电路的方法和装置。 一种示例性的集成电路(IC)方法包括提供包括设计特征的IC设计布局; 确定所述设计特征和光致抗蚀剂层的相应展开的光致抗蚀剂特征之间的尺寸差; 修改设计特征的CD以补偿差异,从而生成修改的IC设计布局; 并使用修改的IC设计布局制作面具。

    Split control pad for multiple signal
    9.
    发明授权
    Split control pad for multiple signal 有权
    分离控制板用于多个信号

    公开(公告)号:US07245028B2

    公开(公告)日:2007-07-17

    申请号:US11141792

    申请日:2005-06-02

    IPC分类号: H01L23/48

    摘要: A control pad is split into two sections for output one of three signals selected from the group consisted of 00, 01, and 11 on an integrated circuit. Each section is internally connected to different voltage sources, say Vdd which represents logical “1”, or Vss which represents logical “0”, so that a default output is 1,0. When the split control pad is bonded with outside Vdd or Vss, both sections output “1,1” or “0,0” respectively. One of three possible logic word combinations can be selected to use for an IC.

    摘要翻译: 控制板被分成两部分,用于输出从集成电路中由00,01和11组成的组中选择的三个信号之一。 每个部分内部连接到不同的电压源,例如表示逻辑“1”的Vdd,或表示逻辑“0”的Vss,默认输出为1,0。 当分离控制板与Vdd或Vss外部接合时,两个部分分别输出“1,1”或“0,0”。 可以选择三种可能的逻辑字组合中的一种用于IC。

    Micro-system for burn-in system program from a plug-able subsystem into main memory and method thereof
    10.
    发明授权
    Micro-system for burn-in system program from a plug-able subsystem into main memory and method thereof 失效
    用于从可插入子系统到主存储器的用于老化系统程序的微系统及其方法

    公开(公告)号:US07120772B2

    公开(公告)日:2006-10-10

    申请号:US10693926

    申请日:2003-10-28

    申请人: Chi-Cheng Hung

    发明人: Chi-Cheng Hung

    IPC分类号: G06F12/00

    摘要: This invention relates to a micro-system for burn-in system program from a backup memory of plug-able subsystem into main memory and method thereof, wherein data codes via the data bus accessed by processor from the backup memory or the main memory are determined by two devices for adjusting level.

    摘要翻译: 本发明涉及一种用于从可插拔子系统的备用存储器到主存储器的老化系统程序的微系统及其方法,其中确定由处理器从备用存储器或主存储器访问的数据总线的数据代码 通过两个设备调整水平。