Substrate cutting method
    8.
    发明授权
    Substrate cutting method 失效
    基板切割方法

    公开(公告)号:US07077120B2

    公开(公告)日:2006-07-18

    申请号:US08801464

    申请日:1997-02-18

    IPC分类号: H01L21/00 B26D5/00

    摘要: A method of producing a semiconductor device constructed by arranging a plurality of substrates, on each of which, thin film semiconductor elements two-dimensionally arranged are installed. The method includes the steps of cutting a substrate along at least a slice line provided on the substrate and on a side facing another substrate, which is one of the substrates when the plurality of substrates are arranged, while detecting a misalignment of a cutting position from the slice line and correcting a cutting position, cutting the substrate of a side opposing the slice line without correcting the cutting position, and adjacently arranging the plurality of substrates on substantially a same plane such that the sides having been cut face each other, while correcting the cutting position of the substrates.

    摘要翻译: 一种制造半导体器件的方法,该半导体器件通过布置多个基片而构成,其中每个基片均安装有二维薄膜半导体元件。 该方法包括以下步骤:沿着至少设置在基板上的切片线和面向另一基板的一侧切割基板,该基板是当布置多个基板时的基板之一,同时检测切割位置与 切割线并校正切割位置,切割与切片线对置的一侧的基板,而不修正切割位置,并且将多个基板相邻布置在基本相同的平面上,使得已经被切割的边彼此面对,同时校正 基板的切割位置。

    Clamping mechanism for pallet changer
    9.
    发明申请
    Clamping mechanism for pallet changer 审中-公开
    托盘更换器夹紧机构

    公开(公告)号:US20060118384A1

    公开(公告)日:2006-06-08

    申请号:US11261774

    申请日:2005-10-31

    IPC分类号: B23Q7/00

    摘要: In a pallet changer that changes pallets for mounting workpieces on a machine tool work table, a pallet changer clamping mechanism that clamps and unclamps a workpiece-mounting pallet to and from the work table, the pallet changer clamping mechanism comprising a workpiece-mounting pallet whose direction of delivery to and removal from the work table is the same as its direction of movement for clamping and unclamping. The workpiece-mounting pallet moves on a plane parallel to the work table when clamped to and unclamped from the work table.

    摘要翻译: 在将托盘安装在机床工作台上的托盘更换器中,一个托盘交换器夹紧机构,夹紧和卸下工件安装托盘到工作台和从工作台上移动,托盘交换器夹紧机构包括一个工件安装托盘, 向工作台传送和移出的方向与其夹紧和松开的运动方向相同。 工件安装托盘在夹紧到工作台并从工作台上松开时,在平行于工作台的平面上移动。

    Feeder for machine tool
    10.
    发明授权
    Feeder for machine tool 有权
    机床进料器

    公开(公告)号:US08429997B2

    公开(公告)日:2013-04-30

    申请号:US13034734

    申请日:2011-02-25

    IPC分类号: G05G11/00

    摘要: A feeder for a machine tool adapted to move a table relative to a saddle by rotation of a motor includes a ball thread nut fixed to the saddle and a ball thread shaft that engages with the ball thread nut in a rotatable manner but is immovable in an axial direction of the ball thread shaft relative to the table. The motor is fixed to the table and the ball thread shaft is coupled to the motor. A sum of a movable distance of the table relative to the saddle and a length of the saddle in the axial direction is shorter than a length of the table in the axial direction. The feeder further includes rails fixed to the table on its surface where the motor is fixed and bearings that are fixed to the saddle and bear the rails.

    摘要翻译: 适于通过电动机旋转而相对于鞍座移动工作台的机床的进给器包括固定到鞍座的滚珠螺母和可旋转地与球螺纹螺母接合但不可移动的滚珠丝杠螺母 球螺纹轴相对于工作台的轴向。 电机固定在工作台上,滚珠丝杠轴与电机相连。 工作台相对于鞍座的可移动距离和鞍座在轴向方向上的长度的总和短于工作台在轴向方向上的长度。 进料器还包括固定在其表面上的电动机固定的工作台的轨道和固定到鞍座并承载轨道的轴承。