公开(公告)号：US06924874B2

公开(公告)日：2005-08-02

申请号：US10250122

申请日：2003-06-05

申请人： Gwo-Long Lin ,  I-Min Lu ,  Chu-Jung Shih ,  Shyuan-Jeng Ho ,  I-Wei Wu

发明人： Gwo-Long Lin ,  I-Min Lu ,  Chu-Jung Shih ,  Shyuan-Jeng Ho ,  I-Wei Wu

IPC分类号： H01L21/77 ,  H01L21/84 ,  H01L27/12 ,  H01L29/786 ,  G02F1/13

CPC分类号： H01L27/1288 ,  H01L27/12 ,  H01L27/1214 ,  H01L27/1255 ,  H01L29/78621

摘要： The present invention provides a method of forming a liquid crystal display (LCD). Active layers of N-type and P-type low temperature polysilicon thin film transistors and a bottom electrode of a storage capacitor are formed first. Then a N-type source/drain is formed and the bottom electrode is doped with dopants. A gate insulator, a gate electrode, a capacitor dielectric, and a top electrode are thereafter formed. After that, a P-type source/drain is formed. Finally, a source interconnect, a drain interconnect, and a pixel electrode of the liquid crystal display are formed.

摘要翻译： 本发明提供一种形成液晶显示器（LCD）的方法。 首先形成N型和P型低温多晶硅薄膜晶体管的有源层和存储电容器的底部电极。 然后形成N型源极/漏极，并且底部电极掺杂有掺杂剂。 此后形成栅极绝缘体，栅极电极，电容器电介质和顶部电极。 之后，形成P型源极/漏极。 最后，形成液晶显示器的源极互连，漏极互连以及像素电极。

公开(公告)号：US06731352B2

公开(公告)日：2004-05-04

申请号：US10161301

申请日：2002-06-03

申请人： Chu-Jung Shih ,  Gwo-Long Lin ,  I-Min Lu ,  I-Wei Wu

发明人： Chu-Jung Shih ,  Gwo-Long Lin ,  I-Min Lu ,  I-Wei Wu

IPC分类号： G02F1136

CPC分类号： G02F1/136227 ,  G02F2202/104

摘要： A six mask-steps method for fabricating liquid crystal display is described. A driving area and a pixel area are defined by a first mask step. Gates on the driving/pixel area and upper electrodes of capacitors on the pixel area are defined by a second mask step. Then, using the gates and the upper electrodes as a mask, a source/drain, channel region and lower electrode are formed in the driving/pixel area by an ion-doping process. A second insulation layer is formed and covers the insulation substrate. A plurality of first openings is formed by the third mask step and the gate and the source/drain are exposed. A second conductive layer is formed and covers the second insulation layer and the first opening is filled. Then, the second conductive layer is patterned, and a source/drain line is formed and contacts electrically with the source/drain by the fourth mask step. A dielectric layer is formed and covers the second insulation layer and the second conductive layer; the dielectric layer has a planar surface. A second opening is formed by the fifth mask step and the drain line on the pixel area is exposed. Finally, a pixel electrode is defined by the sixth mask step and contacts electrically with the drain line.

摘要翻译： 描述了用于制造液晶显示器的六个掩模步骤方法。 驱动区域和像素区域由第一掩模步骤限定。 通过第二掩模步骤限定像素区域上的驱动/像素区域和电容器的上部电极。 然后，使用栅极和上部电极作为掩模，通过离子掺杂工艺在驱动/像素区域中形成源极/漏极，沟道区域和下部电极。 形成第二绝缘层并覆盖绝缘基板。 通过第三掩模步骤形成多个第一开口，露出栅极和源极/漏极。 形成第二导电层并覆盖第二绝缘层，并填充第一开口。 然后，对第二导电层进行构图，并且通过第四掩模步骤形成源极/漏极线并与源极/漏极电接触。 形成介电层并覆盖第二绝缘层和第二导电层; 电介质层具有平坦表面。 通过第五掩模步骤形成第二开口，并且暴露像素区域上的漏极线。 最后，像素电极由第六掩模步骤限定，并与漏极线电接触。

公开(公告)号：US07112458B2

公开(公告)日：2006-09-26

申请号：US10605499

申请日：2003-10-02

申请人： Chu-Jung Shih ,  Gwo-Long Lin ,  I-Min Lu

发明人： Chu-Jung Shih ,  Gwo-Long Lin ,  I-Min Lu

IPC分类号： H01L21/302

CPC分类号： H01L27/1288 ,  H01L27/1255

摘要： An active layer of a P-type low temperature polysilicon thin film transistor and a bottom electrode of a storage capacitor are first formed. Then, a P-type source/drain is formed and the bottom electrode is doped with dopants. A gate insulator, a gate electrode, a capacitor dielectric, and a top electrode are thereafter formed. Finally, a source interconnect, a drain interconnect, and a pixel electrode of the liquid crystal display are formed.

摘要翻译： 首先形成P型低温多晶硅薄膜晶体管的有源层和存储电容器的底部电极。 然后，形成P型源极/漏极，并且底部电极掺杂有掺杂剂。 此后形成栅极绝缘体，栅极电极，电容器电介质和顶部电极。 最后，形成液晶显示器的源极互连，漏极互连以及像素电极。

公开(公告)号：US20050072754A1

公开(公告)日：2005-04-07

申请号：US10605499

申请日：2003-10-02

申请人： Chu-Jung Shih ,  Gwo-Long Lin ,  I-Min Lu

发明人： Chu-Jung Shih ,  Gwo-Long Lin ,  I-Min Lu

IPC分类号： C30B33/00

CPC分类号： H01L27/1288 ,  H01L27/1255

摘要： An active layer of a P-type low temperature polysilicon thin film transistor and a bottom electrode of a storage capacitor are first formed. Then, a P-type source/drain is formed and the bottom electrode is doped with dopants. A gate insulator, a gate electrode, a capacitor dielectric, and a top electrode are thereafter formed. Finally, a source interconnect, a drain interconnect, and a pixel electrode of the liquid crystal display are formed.

摘要翻译： 首先形成P型低温多晶硅薄膜晶体管的有源层和存储电容器的底部电极。 然后，形成P型源极/漏极，并且底部电极掺杂有掺杂剂。 此后形成栅极绝缘体，栅极电极，电容器电介质和顶部电极。 最后，形成液晶显示器的源极互连，漏极互连和像素电极。

公开(公告)号：US6087277A

公开(公告)日：2000-07-11

申请号：US431137

申请日：1999-11-01

申请人： Chu-Jung Shih ,  I-Min Lu

发明人： Chu-Jung Shih ,  I-Min Lu

IPC分类号： B23K26/073 ,  B23K26/16 ,  C21D1/34 ,  H01L21/26

CPC分类号： B23K26/0732 ,  B23K26/16 ,  C21D1/34 ,  C21D2221/10 ,  Y02P10/212 ,  Y10S438/905

摘要： A laser scanning system suitable for annealing applications is described. The problem of keeping the window (through which the laser shines into the system) clean, even though the laser ejects a considerable amount of debris, has been solved by inserting a moveable shutter close to the window between it and the substrate. The center portion of the shutter is an insert of optical quality quartz that is just large enough to allow the laser beam to pass through unimpeded and undiverted. By moving the beam and the shutter in concert it is ensured that the beam always passes through the insert. Most of the debris ejected by the laser as a side effect of its operation is trapped on the shutter. Relatively little material ends up on the quartz insert but when sufficient has accumulated there, the insert can be replaced at much lower cost than replacing the window. By moving the beam back and forth together with movement of the substrate, the entire area of the film on the substrate may be scanned by the beam. In a second embodiment, the quartz insert is omitted and an open slit left in its place. With this arrangement debris will eventually accumulate on the window but at a greatly reduced rate relative to an unprotected window.

摘要翻译： 描述适用于退火应用的激光扫描系统。 通过将可移动的快门插入其与基板之间的窗口，已经解决了将激光照射到系统中的窗口（即激光喷射到系统中）清洁的问题，即使激光喷出相当大量的碎屑。 快门的中心部分是光学质量石英的插入物，其刚好足够大以允许激光束通过无阻碍和未流出。 通过一起移动光束和快门，确保光束始终通过插入件。 作为其操作的副作用的激光喷射的大多数碎屑被捕获在快门上。 相对较少的材料最终在石英插入物上，但是当足够的积累在那里时，可以以比更换窗户低得多的成本替换插入件。 通过与基板的移动一起来回移动光束，可以通过光束扫描基板上的膜的整个区域。 在第二实施例中，省略了石英插入件，并且在其位置处留有开口狭缝。 通过这种布置，碎片将最终积聚在窗户上，但是相对于未受保护的窗口以大大降低的速率。

公开(公告)号：US06740569B2

公开(公告)日：2004-05-25

申请号：US10248361

申请日：2003-01-14

申请人： Chu-Jung Shih ,  I-Min Lu

发明人： Chu-Jung Shih ,  I-Min Lu

IPC分类号： H01L2100

CPC分类号： H01L21/02686 ,  H01L21/02532 ,  H01L21/2026 ,  Y10S438/978

摘要： A method of fabricating a polysilicon film by an excimer laser annealing process is introduced. First, an amorphous silicon film is deposited on a substrate composed of glass. The amorphous silicon film includes a first region, which is located in the center, with a first thickness, and a second region, which is located in the periphery, with a slant sidewall. The thickness of the amorphous silicon film is measured so as to obtain the profile of the sidewall in the second region. According to the profile of the sidewall, a pre-cursor region is determined for performing an excimer laser annealing process wherein a second thickness in the boundary of the pre-curser regionis smaller than the first thickness so as to increase area of produced polysilicon film.

摘要翻译： 引入了通过准分子激光退火工艺制造多晶硅膜的方法。 首先，将非晶硅膜沉积在由玻璃构成的基板上。 非晶硅膜包括位于中心的第一厚度的第一区域和位于周边的具有倾斜侧壁的第二区域。 测量非晶硅膜的厚度，以获得第二区域中侧壁的轮廓。 根据侧壁的轮廓，确定用于进行准分子激光退火处理的前置区域，其中预卷曲区域的边界中的第二厚度小于第一厚度，从而增加产生的多晶硅膜的面积。

公开(公告)号：US6008144A

公开(公告)日：1999-12-28

申请号：US17133

申请日：1998-02-02

申请人： Chu-Jung Shih ,  I-Min Lu

发明人： Chu-Jung Shih ,  I-Min Lu

IPC分类号： B23K26/073 ,  B23K26/16 ,  C21D1/34 ,  H01L21/26 ,  H01L21/324

CPC分类号： B23K26/0732 ,  B23K26/16 ,  C21D1/34 ,  C21D2221/10 ,  Y02P10/212 ,  Y10S438/905

摘要： A laser scanning system suitable for annealing applications is described. The problem of keeping the window (through which the laser shines into the system) clean, even though the laser ejects a considerable amount of debris, has been solved by inserting a moveable shutter close to the window between it and the substrate. The center portion of the shutter is an insert of optical quality quartz that is just large enough to allow the laser beam to pass through unimpeded and undiverted. By moving the beam and the shutter in concert it is ensured that the beam always passes through the insert. Most of the debris ejected by the laser as a side effect of its operation is trapped on the shutter. Relatively little material ends up on the quartz insert but when sufficient has accumulated there, the insert can be replaced at much lower cost than replacing the window. By moving the beam back and forth together with movement of the substrate, the entire area of the film on the substrate may be scanned by the beam. In a second embodiment, the quartz insert is omitted and an open slit left in its place. With this arrangement debris will eventually accumulate on the window but at a greatly reduced rate relative to an unprotected window.

公开(公告)号：US08400075B2

公开(公告)日：2013-03-19

申请号：US12768740

申请日：2010-04-28

申请人： Wei Guo ,  Yaw-Shing Tseng ,  Chu-Jung Shih ,  Chen-Hsun Liao

发明人： Wei Guo ,  Yaw-Shing Tseng ,  Chu-Jung Shih ,  Chen-Hsun Liao

IPC分类号： H05B37/02 ,  H05B39/00

CPC分类号： H05B33/089 ,  Y02B20/341

摘要： An illumination circuit includes a series circuit including light sources connected in series between a high voltage node and a low voltage node, and break-protecting circuits. Each break-protecting circuit includes a control circuit and a bypass circuit. The bypass circuit is connected in parallel to at least one corresponding light source of the light sources. The control circuit is connected to the series circuit and the bypass circuit to detect a voltage change of the series circuit and control the bypass circuit to be in a conduct state or a blocked state according to the voltage change

摘要翻译： 照明电路包括串联连接在高压节点和低电压节点之间的串联电路和断路保护电路。 每个断路保护电路包括控制电路和旁路电路。 旁路电路与光源的至少一个对应的光源并联连接。 控制电路连接到串联电路和旁路电路，以检测串联电路的电压变化，并根据电压变化控制旁路电路处于导通状态或阻断状态

公开(公告)号：US06703266B1

公开(公告)日：2004-03-09

申请号：US10249562

申请日：2003-04-18

申请人： Hsin-Ming Chen ,  Yaw-Ming Tsai ,  Chu-Jung Shih

发明人： Hsin-Ming Chen ,  Yaw-Ming Tsai ,  Chu-Jung Shih

IPC分类号： H01L2100

CPC分类号： H01L27/1288 ,  H01L27/1214 ,  H01L27/124 ,  H01L27/1255 ,  H01L29/78621 ,  Y10S438/942

摘要： A method for fabricating a thin film transistor array and driving circuit comprising the steps of: providing a substrate; patterning a polysilicon layer and an N+ thin film over the substrate to form a plurality of islands; patterning the islands to form P+ doped regions; patterning out source/drain terminals and the lower electrode of a storage capacitor; etching back the N+ thin film; patterning out a gate and the upper electrode of the storage capacitor and patterning a passivation layer and a conductive layer to form pixel electrodes and a wiring layout.

摘要翻译： 一种制造薄膜晶体管阵列和驱动电路的方法，包括以下步骤：提供衬底; 在衬底上形成多晶硅层和N +薄膜以形成多个岛; 图案化岛以形成P +掺杂区域; 图案化存储电容器的源极/漏极端子和下部电极; 蚀刻N +薄膜; 图案化存储电容器的栅极和上电极，并且图案化钝化层和导电层以形成像素电极和布线布局。

公开(公告)号：US08013926B2

公开(公告)日：2011-09-06

申请号：US12228024

申请日：2008-08-08

申请人： Chu-Jung Shih ,  Shun-Ming Huang

发明人： Chu-Jung Shih ,  Shun-Ming Huang

IPC分类号： H04N5/222

CPC分类号： G06F3/147 ,  G09G2330/022 ,  G09G2360/144 ,  G09G2380/16 ,  H04N7/188

摘要： An exemplary digital photo frame includes an image memory configured for storing a display image, a display device configured for reading and displaying the display image, an infrared sensor configured for detecting infrared light, generating a first detecting signal when the infrared light is detected, generating a second detecting signal when the detected infrared light is no longer detectable, and a camera control circuit including a reference image therein. The camera control circuit generates an instant image and compares the instant image with the reference image when the first detecting signal is generated. The digital photo frame is configured to operate in a monitor mode or a display mode according to a comparing result when the infrared light is detected.

摘要翻译： 示例性数字相框包括被配置为存储显示图像的图像存储器，被配置为读取和显示显示图像的显示装置，被配置为检测红外光的红外传感器，当检测到红外光时产生第一检测信号，产生 当检测到的红外光不再可检测时的第二检测信号，以及包括其中的参考图像的照相机控制电路。 相机控制电路产生即时图像，并且当产生第一检测信号时将即时图像与参考图像进行比较。 数字相框被配置为在检测到红外光时根据比较结果在监视模式或显示模式下操作。