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    Mixtures of mono- and DI- or polyfunctional silanes as silylating agents for top surface imaging
    2.
    发明授权
    Mixtures of mono- and DI- or polyfunctional silanes as silylating agents for top surface imaging 失效
    单 - 和二 - 或多官能硅烷的混合物，用作顶表面成像的甲硅烷化剂

    公开(公告)号：US5707783A

    公开(公告)日：1998-01-13

    申请号：US566666

    申请日：1995-12-04

    Applicant: Craig M. Stauffer ,  William R. Peterson

    Inventor： Craig M. Stauffer ,  William R. Peterson

    IPC: G03F7/26 ,  G03C5/56 ,  G03C1/60

    CPC classification number: G03F7/265

    Abstract: Top surface imaging by silylation of organic photoresists for use in lithographic techniques for the manufacture of microelectronic devices is improved by the use of certain mixtures of organosilane silylating agents. The mixture includes a monofunctional silane in combination with a di- or polyfunctional silane, selected such that the boiling points are the same or very close to each other to facilitate a vapor-phase reaction. Silylation with this mixture provides effective penetration of the silane into the resist without causing so much lowering of the glass transition temperature of the resist that the resist flows under the processing steps and distorts the pattern.

    Abstract translation: 通过使用有机硅烷甲硅烷化剂的某些混合物来改进用于制备微电子器件的光刻技术的有机光致抗蚀剂的甲硅烷基化的顶表面成像。 该混合物包括与二官能或多官能硅烷组合的单官能硅烷，其选择为使得沸点彼此相同或非常接近以促进气相反应。 用这种混合物进行硅烷化可以有效地将硅烷渗透到抗蚀剂中，而不会导致抗蚀剂的玻璃化转变温度降低，抗蚀剂在加工步骤下流动并扭曲图案。

    Non-Aminic photoresist adhesion promoters for microelectronic applications
    3.
    发明授权
    Non-Aminic photoresist adhesion promoters for microelectronic applications 失效
    用于微电子应用的非氨基光刻胶粘合促进剂

    公开(公告)号：US5702767A

    公开(公告)日：1997-12-30

    申请号：US562725

    申请日：1995-11-27

    Applicant: William R. Peterson ,  Craig M. Stauffer

    Inventor： William R. Peterson ,  Craig M. Stauffer

    IPC: G03F7/075 ,  G03F7/085 ,  G03F7/38 ,  H01L21/027 ,  H01L21/312 ,  B05D1/36 ,  B05D3/04 ,  B05D5/00

    CPC classification number: G03F7/0751 ,  H01L21/312

    Abstract: A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.

    Abstract translation: 公开了一种用于提供具有改进的聚合物膜附着性的无机基材的方法。 该方法需要使至少一种具有至少一个烷基甲硅烷基部分的有机硅烷化合物与至少一种能够与基材反应以使基材甲硅烷基化的至少一种可水解基团反应。 来自反应的可水解的副产物（如果有的话）具有小于或等于约7的pH。

    Module in an integrated delivery system for chemical vapors from liquid sources
    4.
    发明授权
    Module in an integrated delivery system for chemical vapors from liquid sources 失效
    在液体源的化学蒸气综合交付系统中的模块

    公开(公告)号：US5399200A

    公开(公告)日：1995-03-21

    申请号：US209090

    申请日：1994-03-10

    Applicant: Craig M. Stauffer

    Inventor： Craig M. Stauffer

    IPC: C23C16/44 ,  C23C16/448 ,  F22B1/28 ,  H01L21/205 ,  H01L21/31 ,  C23C16/00

    CPC classification number: C23C16/4485 ,  F22B1/284

    Abstract: An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

    Abstract translation: 提出了一种具有加热容器的集成模块，用于使用液体源蒸发用于半导体工艺的液体。 截止阀和用于控制来自储存器的蒸汽流的比例压力阀安装在模块上用于阀的简单传导加热。 还安装在模块上的电容压力计也具有自己的加热元件。 避免蒸气的凝结，获得一致的性能和可靠性。

    Binary vapor adhesion promoters and methods of using the same
    6.
    发明授权
    Binary vapor adhesion promoters and methods of using the same 失效
    二元蒸气粘附促进剂及其使用方法

    公开(公告)号：US5429673A

    公开(公告)日：1995-07-04

    申请号：US130620

    申请日：1993-10-01

    Applicant: William R. Peterson ,  Craig M. Stauffer

    Inventor： William R. Peterson ,  Craig M. Stauffer

    IPC: G03F7/075 ,  C07F7/10 ,  G03F7/085 ,  H01L21/312 ,  C09D5/00

    CPC classification number: H01L21/02304 ,  C07F7/10 ,  G03F7/085 ,  H01L21/02307 ,  H01L21/3125

    Abstract: Novel compositions are provided for use in the vapor priming of substrates used in the preparation and production of microelectronic devices comprising a first component comprising an organosilane having a hydrolyzable silicon-nitrogen bond and a second component selected from the group consisting of a second organosilane different from the first component having a hydrolyzable silicon-nitrogen bond, a hydrocarbon, an ether, a disiloxane and an alkoxysilane in which all components have substantially the same boiling points at atmospheric pressure. These compositions which are vaporized and transported to an area of silylation on a substrate by an inert gas, silylate the substrate surface and provide for uniform successful coating with organic films. These organosilane mixtures allow for rapid vapor priming and silylation steps in the manufacture of microelectronic devices with successful subsequent coating of the substrates with uniform organic films.

    Abstract translation: 提供新的组合物用于制备和生产微电子器件中使用的底物的气相引发，其中包括含有可水解的硅 - 氮键的有机硅烷的第一组分和选自第二有机硅烷的第二组分，所述第二组分不同于 具有可水解硅 - 氮键的第一组分，烃，醚，二硅氧烷和烷氧基硅烷，其中所有组分在大气压下具有基本上相同的沸点。 这些组合物通过惰性气体蒸发并运输到基板上的甲硅烷基化区域，使基材表面甲硅烷基化并提供均匀成功地涂覆有机薄膜。 这些有机硅烷混合物允许在制造微电子器件时进行快速蒸发引发和硅烷化步骤，成功地随后用均匀的有机膜涂覆基底。

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