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17 条记录 (耗时 0.027 秒)

    DETERMINING DIE PERFORMANCE BY INCORPORATING NEIGHBORING DIE PERFORMANCE METRICS
    4.
    发明申请
    DETERMINING DIE PERFORMANCE BY INCORPORATING NEIGHBORING DIE PERFORMANCE METRICS 有权
    确定相邻性能性能指标的性能

    公开(公告)号：US20080244348A1

    公开(公告)日：2008-10-02

    申请号：US11692989

    申请日：2007-03-29

    申请人： Daniel Kadosh ,  Gregory A. Cherry ,  Carl Bowen ,  Luis De La Fuente ,  Rajesh Vijayaraghavan

    发明人： Daniel Kadosh ,  Gregory A. Cherry ,  Carl Bowen ,  Luis De La Fuente ,  Rajesh Vijayaraghavan

    IPC分类号： G06F11/00

    CPC分类号： G01R31/287

    摘要： A method includes receiving a first set of parameters associated with a plurality of die. A first die performance metric associated with a selected die is determined based on the first set of parameters. At least one neighborhood die performance metric associated with a set comprised of a plurality of die that neighbor the selected die is determined based on the first set of parameters. A second die performance metric is determined for the selected die based on the first die performance metric and the neighborhood die performance metric.

    摘要翻译： 一种方法包括接收与多个管芯相关联的第一组参数。 基于第一组参数来确定与所选择的管芯相关联的第一管芯性能度量。 基于第一组参数来确定与由与选定的管芯相邻的多个管芯组成的组相关联的至少一个邻近管芯性能度量。 基于第一管芯性能度量和邻近管芯性能度量，为所选择的管芯确定第二管芯性能度量。

    Method and apparatus for multivariate fault detection and classification
    5.
    发明授权
    Method and apparatus for multivariate fault detection and classification 有权
    多变量故障检测和分类方法与装置

    公开(公告)号：US07248939B1

    公开(公告)日：2007-07-24

    申请号：US11035276

    申请日：2005-01-13

    申请人： Kevin Andrew Chamness ,  Daniel Kadosh ,  Gregory A. Cherry ,  Jason Williams

    发明人： Kevin Andrew Chamness ,  Daniel Kadosh ,  Gregory A. Cherry ,  Jason Williams

    IPC分类号： G06F19/00

    CPC分类号： H01L21/67288 ,  H01L21/67276

    摘要： The present invention provides a method and apparatus for multivariate fault identification and classification. The method includes accessing data indicative of a plurality of physical parameters associated with a plurality of processed semiconductor wafers and providing at least one summary report including information indicative of at least one univariate representation of the accessed data and at least one multivariate representation of the accessed data.

    摘要翻译： 本发明提供了一种用于多变量故障识别和分类的方法和装置。 该方法包括访问指示与多个处理的半导体晶片相关联的多个物理参数的数据，并且提供包括指示所访问数据的至少一个单变量表示的信息的至少一个概要报告和所访问数据的至少一个多变量表示 。

    Method and apparatus for detecting faults using principal component analysis parameter groupings
    6.
    发明授权
    Method and apparatus for detecting faults using principal component analysis parameter groupings 失效
    使用主成分分析参数分组检测故障的方法和装置

    公开(公告)号：US07198964B1

    公开(公告)日：2007-04-03

    申请号：US10770681

    申请日：2004-02-03

    申请人： Gregory A. Cherry ,  Daniel Kadosh

    发明人： Gregory A. Cherry ,  Daniel Kadosh

    IPC分类号： H01L21/66

    CPC分类号： H01L22/20 ,  G05B19/41875 ,  G05B2219/37224 ,  H01L22/14 ,  Y02P90/22

    摘要： A method for identifying faults in a semiconductor fabrication process includes storing measurements for a plurality of parameters of a wafer in the semiconductor fabrication process. A first subset of the parameters is selected. The subset is associated with a feature formed on the wafer. A principal component analysis model is applied to the first subset to generate a performance metric. A fault condition with the wafer is identified based on the performance metric. A system includes a data store and a fault monitor. The data store is adapted to store measurements for a plurality of parameters of a wafer in a semiconductor fabrication process. The fault monitor is adapted to select a first subset of the parameters, the subset being associated with a feature formed on the wafer, apply a principal component analysis model to the first subset to generate a performance metric, and identify a fault condition with the wafer based on the performance metric.

    摘要翻译： 用于识别半导体制造工艺中的故障的方法包括在半导体制造工艺中存储晶片的多个参数的测量。 选择参数的第一个子集。 该子集与形成在晶片上的特征相关联。 主成分分析模型应用于第一子集以生成性能指标。 基于性能度量来识别晶片的故障状况。 系统包括数据存储和故障监视器。 数据存储器适于在半导体制造过程中存储晶片的多个参数的测量。 所述故障监视器适于选择所述参数的第一子集，所述子集与形成在所述晶片上的特征相关联，将主分量分析模型应用于所述第一子集以产生性能度量，并且识别所述晶片的故障状况 基于性能指标。

    Probability constrained optimization for electrical fabrication control
    7.
    发明授权
    Probability constrained optimization for electrical fabrication control 失效
    概率约束优化电气制造控制

    公开(公告)号：US06959224B2

    公开(公告)日：2005-10-25

    申请号：US10335748

    申请日：2003-01-02

    申请人： Richard P. Good ,  Gregory A. Cherry ,  Jin Wang

    发明人： Richard P. Good ,  Gregory A. Cherry ,  Jin Wang

    IPC分类号： G03F7/20 ,  G05B19/418 ,  H01L21/66 ,  G06F19/00

    CPC分类号： G03F7/705 ,  G05B19/41885 ,  G05B2219/32015 ,  G05B2219/50129 ,  H01L22/20 ,  Y02P90/26

    摘要： A method includes defining a model of a process for manufacturing a device, the process including a plurality of steps. A plurality of inline process targets are defined for at least a subset of the process steps. The model relates the inline process targets to a plurality of process output parameters. A first set of probabilistic constraints for the inline process targets is defined. A second set of probabilistic constraints for the process output parameters is defined. An objective function is defined based on the model and the plurality of process output parameters. A trajectory of the process output parameters is determined by optimizing the objective function subject to the first and second sets of probabilistic constraints for each process step to determine values for the inline process targets at each process step, the optimization being iterated after completion of each process step for the remaining process steps.

    摘要翻译： 一种方法包括定义用于制造设备的过程的模型，该过程包括多个步骤。 为进程步骤的至少一个子集定义了多个内联过程目标。 该模型将内联过程目标与多个过程输出参数相关联。 定义了内联流程目标的第一组概率约束。 定义了过程输出参数的第二组概率约束。 基于模型和多个过程输出参数定义目标函数。 过程输出参数的轨迹通过优化目标函数来确定，该目标函数受制于每个处理步骤的第一和第二组概率约束，以确定每个处理步骤中的内联过程目标的值，优化在每个过程完成之后重复 步骤剩下的过程步骤。

    Fault detection and classification based on calculating distances between data points
    8.
    发明授权
    Fault detection and classification based on calculating distances between data points 失效
    基于计算数据点之间的距离的故障检测和分类

    公开(公告)号：US07043403B1

    公开(公告)日：2006-05-09

    申请号：US10234755

    申请日：2002-09-04

    申请人： Jin Wang ,  Gregory A. Cherry

    发明人： Jin Wang ,  Gregory A. Cherry

    IPC分类号： G06F19/00

    CPC分类号： G05B23/024

    摘要： A method and apparatus is provided for fault detection and classification based on calculating distances between data points. The method comprises receiving a data sample representative of measurements of one or more variables associated with a process operation, determining a distance between the data sample and one or more data points of a history data of the process operation and detecting a fault associated with the process operation based on the distance between the data sample and the one or more data points of the history data.

    摘要翻译： 提供了一种基于计算数据点之间距离的故障检测和分类方法和装置。 该方法包括接收表示与过程操作相关联的一个或多个变量的测量的数据样本，确定数据样本与处理操作的历史数据的一个或多个数据点之间的距离并检测与该过程相关联的故障 基于数据样本与历史数据的一个或多个数据点之间的距离进行操作。

    Adjusting a sampling protocol in an adaptive control process
    9.
    发明授权
    Adjusting a sampling protocol in an adaptive control process 有权
    在自适应控制过程中调整采样协议

    公开(公告)号：US07050879B1

    公开(公告)日：2006-05-23

    申请号：US10406463

    申请日：2003-04-03

    申请人： Jin Wang ,  Gregory A. Cherry

    发明人： Jin Wang ,  Gregory A. Cherry

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/00

    摘要： A method and an apparatus are provided for adjusting a sampling protocol in an adaptive control process. The method comprises determining a performance value based on a measurement associated with at least one or more previously processed workpieces, adjusting a sampling protocol for one or more processed workpieces based on the determined performance value, and measuring the one or more processed workpieces according to the sampling protocol to provide one or more measurements. The method further comprises adjusting at least one of a process model and a control parameter based on at least a portion of the one or more measurements.

    摘要翻译： 提供了一种用于在自适应控制过程中调整采样协议的方法和装置。 该方法包括基于与至少一个或多个先前处理的工件相关联的测量来确定性能值，基于所确定的性能值调整一个或多个经处理的工件的采样协议，以及根据所确定的性能值测量所述一个或多个经处理的工件 采样协议提供一个或多个测量。 该方法还包括基于一个或多个测量的至少一部分来调整过程模型和控制参数中的至少一个。

    Updating process controller based upon fault detection analysis
    10.
    发明授权
    Updating process controller based upon fault detection analysis 失效
    基于故障检测分析更新过程控制器

    公开(公告)号：US06871114B1

    公开(公告)日：2005-03-22

    申请号：US10231713

    申请日：2002-08-30

    申请人： Eric O. Green ,  Matthew A. Purdy ,  Elfido Coss, Jr. ,  Christopher A. Bode ,  Robert J. Chong ,  Gregory A. Cherry

    发明人： Eric O. Green ,  Matthew A. Purdy ,  Elfido Coss, Jr. ,  Christopher A. Bode ,  Robert J. Chong ,  Gregory A. Cherry

    IPC分类号： G05B19/404 ,  G06F19/00

    CPC分类号： G05B19/404 ,  G05B2219/37252 ,  G05B2219/37345 ,  G05B2219/45031

    摘要： A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.

    摘要翻译： 一种基于故障检测分析调整过程控制器的方法和装置。 使用加工工具进行工件的加工步骤。 获取与工件的加工有关的制造数据。 制造数据可以包括与处理工具有关的计量学数据和/或与加工工具的工具状态有关的刀具状态数据。 基于获取的制造数据执行计量/工具状态数据集成处理。 计量/工具状态数据集成过程包括对与处理工具相关的工具健康进行评估，并且基于对工具健康的评估来调整计量数据的重点。