利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

20 条记录 (耗时 0.021 秒)

    Apparatus for manufacturing a process abatement reactor
    2.
    发明授权
    Apparatus for manufacturing a process abatement reactor 失效
    用于制造工艺消除反应器的装置

    公开(公告)号：US07736600B2

    公开(公告)日：2010-06-15

    申请号：US11555056

    申请日：2006-10-31

    申请人： Daniel O. Clark ,  Sebastien Raoux ,  Robbert M. Vermeulen ,  Shaun W. Crawford

    发明人： Daniel O. Clark ,  Sebastien Raoux ,  Robbert M. Vermeulen ,  Shaun W. Crawford

    IPC分类号： B01D50/00

    CPC分类号： B01D53/38 ,  B01D53/68 ,  B01D53/74 ,  B01D53/79 ,  B01D53/8659 ,  B01D53/8662 ,  B01D2251/104 ,  B01D2251/106 ,  B01D2251/2062 ,  B01D2258/0216 ,  C23C16/4412 ,  F23C7/02 ,  F23D2900/00016 ,  F23G7/065 ,  F23M5/00

    摘要： A thermal reactor for use during the abatement of a semiconductor manufacturing process is provided, including a thermal reaction unit having: an interior porous wall that defines a central chamber, the interior porous wall formed from a plurality of stacked porous sections; at least one gas inlet in fluid communication with the central chamber and adapted to introduce gaseous waste stream to the central chamber; a thermal mechanism positioned within the central chamber and adapted to decompose the gaseous waste stream within the central chamber, thereby forming reaction products; and a fluid delivery system adapted to provide a fluid to the central chamber through the interior porous wall at a sufficient force to reduce deposition of reaction products on an inner surface of the interior porous wall of the central chamber; wherein at least one of the porous sections has one or more of: a property that varies within the porous section; and a property that differs from a property of at least one other porous section of the interior porous wall.

    摘要翻译： 提供了一种在减少半导体制造过程中使用的热反应器，包括热反应单元，其具有限定中心室的内部多孔壁，所述内部多孔壁由多个堆叠的多孔部分形成; 至少一个气体入口与中心室流体连通并且适于将气体废物流引入中心室; 位于中心室内的热机构，其适于分解中心室内的气态废物流，从而形成反应产物; 以及流体输送系统，其适于通过内部多孔壁以足够的力向中心室提供流体，以减少反应产物在中心室的内部多孔壁的内表面上的沉积; 其中所述多孔部分中的至少一个具有以下一种或多种：在所述多孔部分内变化的性质; 以及与内部多孔壁的至少另一个多孔部分的性质不同的性质。

    METHODS AND APPARATUS FOR HEATING REAGENTS AND EFFLUENTS IN ABATEMENT SYSTEMS
    9.
    发明申请
    METHODS AND APPARATUS FOR HEATING REAGENTS AND EFFLUENTS IN ABATEMENT SYSTEMS 审中-公开
    在加热系统中加热试剂和废水的方法和装置

    公开(公告)号：US20090252664A1

    公开(公告)日：2009-10-08

    申请号：US12372729

    申请日：2009-02-17

    申请人： Robbert M. Vermeulen ,  Daniel O. Clark

    发明人： Robbert M. Vermeulen ,  Daniel O. Clark

    IPC分类号： B01D53/75 ,  B01J19/00 ,  A62D3/40

    CPC分类号： H01L21/67103

    摘要： In some aspects, an apparatus for abating effluent from an electronic device manufacturing process tool is provided, including: a reaction chamber adapted to receive an effluent; and a reagent heating apparatus in fluid connection with the reaction chamber; wherein the reagent heating apparatus is adapted to heat a reagent and to introduce the heated reagent into a heated reagent reaction zone of the reaction chamber; and wherein the reaction chamber is further adapted to mix the effluent and the heated reagent in the heated reagent reaction zone. Other apparatus and methods are disclosed.

    摘要翻译： 在一些方面，提供了一种用于减轻来自电子设备制造工艺工具的流出物的设备，包括：适于接收流出物的反应室; 以及与所述反应室流体连接的试剂加热装置; 其中所述试剂加热装置适于加热试剂并将加热的试剂引入反应室的加热试剂反应区; 并且其中所述反应室还适于将所述流出物和所述加热的试剂混合在所述加热的试剂反应区中。 公开了其他装置和方法。

    METHODS AND APPARATUS FOR A COGENERATION ABATEMENT SYSTEM FOR ELECTRONIC DEVICE MANUFACTURING
    10.
    发明申请
    METHODS AND APPARATUS FOR A COGENERATION ABATEMENT SYSTEM FOR ELECTRONIC DEVICE MANUFACTURING 审中-公开
    用于电子设备制造的加密系统的方法和装置

    公开(公告)号：US20080310975A1

    公开(公告)日：2008-12-18

    申请号：US12126925

    申请日：2008-05-25

    申请人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  James L. Smith

    发明人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  James L. Smith

    IPC分类号： F04B17/00

    CPC分类号： G05B9/02 ,  Y02P80/15

    摘要： The present invention provides systems, methods, and apparatus for abating effluent from an electronic device manufacturing system using cogeneration. The invention includes a pump adapted to couple to a processing chamber and adapted to draw effluent from the processing chamber; a reaction chamber coupled to the pump and adapted to receive the effluent from the pump; and a turbine coupled to the reaction chamber and adapted to be driven by combustion gases from the reaction chamber. The turbine is adapted to generate power which is applied to operate the pump. Numerous additional aspects are disclosed.

    摘要翻译： 本发明提供了用于减少来自使用热电联产的电子装置制造系统的流出物的系统，方法和装置。 本发明包括适于联接到处理室并适于从处理室抽出流出物的泵; 反应室，其耦合到所述泵并适于从所述泵接收流出物; 以及联接到反应室并适于由来自反应室的燃烧气体驱动的涡轮机。 涡轮机适于产生用于操作泵的动力。 公开了许多附加方面。