公开(公告)号：US20160291458A1

公开(公告)日：2016-10-06

申请号：US14753192

申请日：2015-06-29

申请人： Daquan He ,  Fang Wei ,  Jun Zhu ,  Yukun Lv ,  Xusheng Zhang

发明人： Daquan He ,  Fang Wei ,  Jun Zhu ,  Yukun Lv ,  Xusheng Zhang

IPC分类号： G03F1/36 ,  G06F17/50

CPC分类号： G03F1/36

摘要： A method integrating target optimization and optical proximity correction including: fragmenting sides of a target pattern in the metal layer to form a plurality of fragments; simulating the target pattern and calculating image log slope of each fragment; calculating a target pattern optimal parameter for each fragment which is a product of three parameters including the image log slope, overlap ratio of the target pattern and a via pattern in a via layer, and critical dimension; optimizing the target pattern based on the target pattern optimal parameter; preforming optical proximity correction to the optimized target pattern; determining whether the corrected target pattern meets requirements; if yes, ending the target optimization and optical proximity correction; otherwise, using the corrected target pattern as a current target pattern and iterate from the step of simulating the target pattern and calculating image log slope of each fragment.

摘要翻译： 一种集成目标优化和光学邻近校正的方法，包括：金属层中的目标图案的碎裂边以形成多个碎片; 模拟目标模式并计算每个片段的图像对数斜率; 计算每个片段的目标图案最优参数，该三个参数的乘积包括图像对数斜率，目标图案的重叠率和通孔层中的通孔图案以及临界尺寸; 基于目标模式优化参数优化目标模式; 对优化的目标图案进行光学邻近校正; 确定校正的目标模式是否满足要求; 如果是，结束目标优化和光学邻近校正; 否则，使用校正的目标图案作为当前目标图案，并且从模拟目标图案的步骤并且计算每个片段的图像对数斜率来迭代。

公开(公告)号：US20180032648A1

公开(公告)日：2018-02-01

申请号：US15283286

申请日：2016-09-30

申请人： Yun Cao ,  Huan Kan ,  Fang Wei ,  Jun Zhu ,  Yukun Lv ,  Xusheng Zhang

发明人： Yun Cao ,  Huan Kan ,  Fang Wei ,  Jun Zhu ,  Yukun Lv ,  Xusheng Zhang

IPC分类号： G06F17/50 ,  H01L21/768

CPC分类号： G06F17/504 ,  G06F2217/16 ,  H01L21/76819

摘要： The invention disclosed a simulation method of CMP process, comprising: firstly, building a CMP model, and forming a matrix table of line width logarithm-density according to the CMP model, and making each intersection of the matrix table correspond to each CMP result under the corresponding line width and density; secondly, dividing a layout into a plurality of grids, and converting the equivalent line width and density of each grid into the coordinate of line width logarithm-density in the matrix table; thirdly, fitting and calculating preliminary CMP simulation results of each grid according to the coordinate of each grid in the matrix table and the CMP simulation results of its adjacent intersections of the matrix table; then, fitting and computing final CMP simulation results of each grid according to a related weighting factor which considers the impact of adjacent grids for the current grid on the layout; finally, outputting the final CMP simulation results of the whole layout.

公开(公告)号：US09666472B2

公开(公告)日：2017-05-30

申请号：US15083292

申请日：2016-03-29

申请人： Jin Xu ,  Qiyan Feng ,  Yu Ren ,  Yukun Lv ,  Xusheng Zhang

发明人： Jin Xu ,  Qiyan Feng ,  Yu Ren ,  Yukun Lv ,  Xusheng Zhang

IPC分类号： H01L21/00 ,  H01L21/762 ,  H01L21/027 ,  H01L21/308 ,  H01L21/66

CPC分类号： H01L21/76224 ,  H01L21/0276 ,  H01L21/3081 ,  H01L21/3083 ,  H01L21/3086 ,  H01L22/12 ,  H01L22/20

摘要： The present invention provides a method for controlling a critical dimension of shallow trench isolations in a STI etch process, comprises the following steps: before the STI etch process, pre-establishing a mapping relation between a post-etch and pre-etch critical dimension difference of a BARC layer and a thickness of the BARC layer; and during the STI etch process after coating the BARC layer, measuring the thickness of the BARC layer and determining a trimming time for a hard mask layer according to a critical dimension difference corresponding to the measured thickness in the mapping relation and a critical dimension of a photoresist pattern, then performing a trimming process for the hard mask layer lasting the trimming time to make a critical dimension of the hard mask layer equal to a required critical dimension of an active area, and etching a substrate to form shallow trenches with a predetermined critical dimension.

公开(公告)号：US20170025304A1

公开(公告)日：2017-01-26

申请号：US15083292

申请日：2016-03-29

申请人： Jin Xu ,  Qiyan Feng ,  Yu Ren ,  Yukun Lv ,  Xusheng Zhang

发明人： Jin Xu ,  Qiyan Feng ,  Yu Ren ,  Yukun Lv ,  Xusheng Zhang

IPC分类号： H01L21/762 ,  H01L21/308 ,  H01L21/66 ,  H01L21/027

CPC分类号： H01L21/76224 ,  H01L21/0276 ,  H01L21/3081 ,  H01L21/3083 ,  H01L21/3086 ,  H01L22/12 ,  H01L22/20

摘要： The present invention provides a method for controlling a critical dimension of shallow trench isolations in a STI etch process, comprises the following steps: before the STI etch process, pre-establishing a mapping relation between a post-etch and pre-etch critical dimension difference of a BARC layer and a thickness of the BARC layer; and during the STI etch process after coating the BARC layer, measuring the thickness of the BARC layer and determining a trimming time for a hard mask layer according to a critical dimension difference corresponding to the measured thickness in the mapping relation and a critical dimension of a photoresist pattern, then performing a trimming process for the hard mask layer lasting the trimming time to make a critical dimension of the hard mask layer equal to a required critical dimension of an active area, and etching a substrate to form shallow trenches with a predetermined critical dimension.

摘要翻译： 本发明提供了一种用于在STI蚀刻工艺中控制浅沟槽隔离的临界尺寸的方法，包括以下步骤：在STI蚀刻工艺之前，预先建立蚀刻后和临界尺寸之间的临界尺寸差的映射关系 的BARC层和BARC层的厚度; 并且在涂覆BARC层之后的STI蚀刻工艺期间，测量BARC层的厚度并根据对应于映射关系中的测量厚度的临界尺寸差异确定硬掩模层的修剪时间，并且确定 光刻胶图案，然后对硬掩模层进行修整处理以保持修剪时间，以使硬掩模层的临界尺寸等于有源区的所需临界尺寸，并蚀刻衬底以形成具有预定临界值的浅沟槽 尺寸。

公开(公告)号：US08855755B2

公开(公告)日：2014-10-07

申请号：US12430301

申请日：2009-04-27

申请人： Xusheng Zhang ,  Robert W. Stadler ,  Jeffrey M. Gillberg

发明人： Xusheng Zhang ,  Robert W. Stadler ,  Jeffrey M. Gillberg

IPC分类号： A61B5/0468 ,  A61N1/365 ,  A61N1/362 ,  A61B5/0464 ,  A61B5/046 ,  A61B5/00 ,  A61N1/39 ,  A61B5/0452

CPC分类号： A61N1/3621 ,  A61B5/04525 ,  A61B5/046 ,  A61B5/0464 ,  A61B5/726 ,  A61B5/7264 ,  A61N1/36507 ,  A61N1/3962 ,  G06F19/00

摘要： Techniques are described for distinguishing between treatable and non-treatable heart rhythms. A medical device that operates in accordance with the techniques analyzes characteristics over several cardiac event intervals to detect initiation of a sudden rate onset. After detection of the initiation of the sudden rate onset, the IMD analyzes a morphology of an EGM associated with a selected cardiac event within the first several beats after the initiation of sudden rate onset. In one example, the IMD analyzes the morphology of the EGM associated with the first cardiac event immediately subsequent to the initiation of the sudden rate onset. If the morphology of the EGM of the selected cardiac event is abnormal compared to template EGM, the rhythm is classified as treatable. Otherwise, the rhythm is classified as non-treatable.

摘要翻译： 描述了用于区分可治疗和不可治疗的心脏节律的技术。 根据该技术操作的医疗装置分析几个心脏事件间隔的特征，以检测突然发生率的起始。 在检测到突发性发作起始之后，IMD分析在突然发病起始之后的前几次心跳中与所选心脏事件相关的EGM的形态。 在一个实例中，IMD分析与突然发病起始之后紧接着的第一次心脏事件相关的EGM的形态。 如果所选心脏事件的EGM的形态与模板EGM相比异常，则将节律分类为可治疗的。 否则，节奏被分类为不可治疗。

公开(公告)号：US20130237872A1

公开(公告)日：2013-09-12

申请号：US13457959

申请日：2012-04-27

申请人： Xusheng Zhang ,  Teresa A. Whitman ,  Paul J. DeGroot ,  Mark L. Brown ,  Jeffrey M. Gillberg

发明人： Xusheng Zhang ,  Teresa A. Whitman ,  Paul J. DeGroot ,  Mark L. Brown ,  Jeffrey M. Gillberg

IPC分类号： A61N1/365 ,  A61B7/00 ,  A61B5/0402

CPC分类号： A61B5/7221 ,  A61B5/0456 ,  A61B5/046 ,  A61B5/0464 ,  A61B5/686 ,  A61B5/6869 ,  A61B5/7264 ,  A61B5/7285 ,  A61B7/00 ,  A61N1/3621 ,  A61N1/36514

摘要： Techniques for reducing inappropriate tachyarrhythmia therapy and associated medical device systems are described. In some examples a processor is enabled to receive a cardiac electrical signal representative of electrical activity of a heart of a patient and provide an indication of cardiac electrical signal reliability. A heart sound analyzing module is enabled to receive the indication of cardiac electrical signal reliability and a heart sound signal representing sounds generated by the heart of the patient and generated by a heart sound sensor. The heart sound analyzing module selectively determines an ensemble averaged heart sound signal or detects a plurality of heart sounds from the heart sound signal in response to the indication of cardiac electrical signal reliability.

摘要翻译： 描述了用于减少不适当的快速性心律失常治疗和相关的医疗装置系统的技术。 在一些示例中，处理器能够接收表示患者心脏的电活动的心脏电信号，并提供心脏电信号可靠性的指示。 心音分析模块能够接收心电信号可靠性的指示，以及表示由心脏声音传感器产生的由患者的心脏产生的声音的心音信号。 心脏声音分析模块响应于心脏电信号可靠性的指示，选择性地确定整体平均心音信号或从心音信号检测多个心音。

公开(公告)号：US20120296228A1

公开(公告)日：2012-11-22

申请号：US13111260

申请日：2011-05-19

申请人： Xusheng Zhang ,  Aleksandre T. Sambelashvili ,  David A. Anderson ,  Zhendong Song

发明人： Xusheng Zhang ,  Aleksandre T. Sambelashvili ,  David A. Anderson ,  Zhendong Song

IPC分类号： A61N1/365 ,  A61B5/0205

CPC分类号： A61N1/36578 ,  A61B5/0006 ,  A61B5/04017 ,  A61B5/0452 ,  A61B5/4848 ,  A61N1/36585 ,  A61N1/3682 ,  A61N1/3684

摘要： An implantable medical device receives both heart sound and electrogram signals. A processor within the implantable medical device extracts physiologically relevant information from both the heart sound signal and the electrogram signal. Based on the extracted physiologically relevant information a set of pacing parameters is evaluated. In certain examples, the values of the pacing parameters may be changed by the implantable medical device in response to the physiologically relevant information extracted from the heart sound signal and the electrogram signal.

摘要翻译： 可植入医疗设备接收心音和电描记信号。 可植入医疗装置内的处理器从心音信号和电描记图信号中提取生理相关信息。 基于提取的生理相关信息，评估一组起搏参数。 在某些示例中，响应于从心脏声音信号和电描记图信号提取的生理学相关信息，可由可植入医疗装置改变起搏参数的值。

公开(公告)号：US08315699B2

公开(公告)日：2012-11-20

申请号：US12768850

申请日：2010-04-28

申请人： Robert W. Stadler ,  Xusheng Zhang ,  Jeffrey M. Gillberg

发明人： Robert W. Stadler ,  Xusheng Zhang ,  Jeffrey M. Gillberg

IPC分类号： A61B5/04

CPC分类号： A61B5/02405 ,  A61B5/0031 ,  A61B5/04011 ,  A61B5/0464 ,  A61B5/0468 ,  A61B5/686 ,  A61B5/6869 ,  A61B5/7203 ,  A61N1/3622 ,  A61N1/36507 ,  A61N1/37264

摘要： A medical device and associated method for monitoring a patient's heart rhythm sense cardiac events and detect a sudden change in the heart rhythm in response to the sensed cardiac events. Detecting the sudden change includes determining a variability of intervals between the sensed cardiac events and switching between a low variability mode of operation and a high variability mode of operation in response to the variability of intervals. During the low variability mode, detecting the sudden change includes detecting an increase in the rate of cardiac events. During the high variability mode, detecting the sudden change includes detecting a sudden decrease in the variability of the cardiac event intervals. A concerning cardiac rhythm is detected in response to detecting the sudden change.

摘要翻译： 用于监测患者心律的医疗装置和相关联的方法感测心脏事件并且响应于感测到的心脏事件来检测心律的突然变化。 检测突然变化包括响应于间隔的可变性来确定所感测的心脏事件之间的间隔的可变性和低变异性操作模式与高变异性操作模式之间的切换。 在低变异性模式期间，检测突然变化包括检测心脏事件发生率的增加。 在高可变性模式期间，检测突然变化包括检测心脏事件间隔的变异性的突然降低。 响应于检测到突然变化而检测到关于心律的A。

公开(公告)号：US08306618B2

公开(公告)日：2012-11-06

申请号：US12763499

申请日：2010-04-20

申请人： Raja N. Ghanem ,  Robert W. Stadler ,  Xusheng Zhang

发明人： Raja N. Ghanem ,  Robert W. Stadler ,  Xusheng Zhang

IPC分类号： A61N1/37

CPC分类号： A61N1/3987 ,  A61B5/04011 ,  A61B5/0422 ,  A61B5/0456 ,  A61B5/046 ,  A61B5/0464 ,  A61B5/0468 ,  A61B5/4836 ,  A61B5/686 ,  A61B5/7203 ,  A61B5/7221 ,  A61B5/7239 ,  A61N1/05 ,  A61N1/3621 ,  A61N1/3925 ,  A61N1/3956 ,  Y10S128/901 ,  Y10S128/902

摘要： A method of detecting a cardiac event that includes sensing cardiac signals from a plurality of electrodes, determining rates of change of the sensed cardiac signals, and determining a range of the sensed cardiac signals. The sensed cardiac signals are detected as being associated with the cardiac event in response to the determined rates of change and the determined range.

摘要翻译： 一种检测心脏事件的方法，其包括感测来自多个电极的心脏信号，确定所感测的心脏信号的变化速率，以及确定感测的心脏信号的范围。 根据所确定的变化速率和所确定的范围，将所感测到的心脏信号检测为与心脏事件相关联。

公开(公告)号：US20120095520A1

公开(公告)日：2012-04-19

申请号：US12903325

申请日：2010-10-13

申请人： Xusheng Zhang ,  Robert W. Stadler ,  Jeffrey M. Gillberg

发明人： Xusheng Zhang ,  Robert W. Stadler ,  Jeffrey M. Gillberg

IPC分类号： A61N1/36

CPC分类号： A61B5/7267 ,  A61B5/0422 ,  A61B5/046 ,  A61B5/0464 ,  A61B5/686 ,  A61B5/7239 ,  A61N1/3624 ,  A61N1/3962

摘要： A system and method for use in a medical device for discriminating cardiac events establishes population-based thresholds corresponding to cardiac signal morphology metrics for discriminating between a first cardiac event and a second cardiac event. A population-based threshold criterion for discriminating cardiac events is established. The population-based threshold criterion is applied to a cardiac signal segment and the segment is classified if the criterion is satisfied. A patient-specific threshold is established in response to the sensed cardiac signal segment not being classified after applying the population-based threshold criterion. The sensed signal segment is classified in response to the patient-specific threshold comparison.

摘要翻译： 用于辨别心脏事件的医疗装置中的系统和方法建立了对应于心脏信号形态度量的基于群体的阈值，用于区分第一心脏事件和第二心脏事件。 建立了基于人群的阈值判别标准，用于辨别心脏事件。 基于人群的阈值标准被应用于心脏信号段，并且如果满足标准，则对该段进行分类。 响应于在应用基于群体的阈值标准之后未被分类的感测到的心脏信号段建立患者特异性阈值。 感测的信号段根据患者特异性阈值比较进行分类。