摘要:
A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide hole, thereby reducing pin scratching, particle generation, component wear, and increasing the useful life of the pin. In another embodiment, a flat-bottom tip is provided to promote self-standing of the lift pin, reducing pin tilting or leaning of the lift pin within the guide hole.
摘要:
A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide hole, thereby reducing pin scratching, particle generation, component wear, and increasing the useful life of the pin. In another embodiment, a flat-bottom tip is provided to promote self-standing of the lift pin, reducing pin tilting or leaning of the lift pin within the guide hole.
摘要:
A humidifier includes a first electrode that is a porous metal body having a three-dimensional porous structure, a second electrode that is a conductor electrode arranged opposite to the first electrode with a space of a predetermined distance from the first electrode, a power supply that forms an electric field in the space between the first electrode and the second electrode, a water supply unit that supplies water to the first electrode, and a fan that sends air to the space to evaporate and disperse the water that is supplied from the water supply unit to the first electrode and retained by the first electrode.
摘要:
There is provided a temperature measuring device capable of achieving cost reduction even in the case where the same is a multichannel temperature measuring device. The temperature-measuring device comprises a thermocouple having two dissimilar metal wires, ends thereof, on one-side, being joined with each other, and the other ends thereof, being connected to one pair of contact terminals, respectively, a unit of a temperature-measurement set made up by joining together a plurality of the thermocouples, and a reference junction compensation circuit provided for every unit of the temperature-measurement set, wherein at least one of the reference junction compensation circuits of the temperature-measuring device is left out while the other reference junction compensation circuits of the temperature-measuring device are removed upon a plurality of the units of the temperature-measurement sets being disposed in series.
摘要:
Disclosed is a terminal constructed in such a manner that at least an outer portion of the terminal including a region corresponding to a last-contact part of the terminal with a counterpart terminal when the terminal is disengaged from the counterpart terminal is formed of an insulating member. A conductive layer is formed on the surface of the insulating member to be electrically connected to a conductive part of the terminal. The terminal is constructed in such a manner that the conductive layer is detached from the counterpart terminal at a final stage of disengagement of the terminals. With this arrangement, arc discharge at the disengagement of the terminals is suppressed.
摘要:
A method for preventing microorganism multiplication, including using a gas containing a low concentration of ozone and a high concentration of ions, so that the multiplication of microorganisms can be safely and fully prevented by an additive effect of the ozone and ions. The generation of ozone is suppressed by reducing the discharge current in the ionization chamber using a pulse converter, which is provided to control the current flowing at the time of discharge, when generating the ions and ozone in the ionization chamber. Ions are produced in the ionization chamber in a high concentration to produce and supply ionized gas containing a low concentration of ozone and a high concentration of ions, which prevents microorganism multiplication on the objects.
摘要:
A sealing material includes a polyvinylchloride type resin as a major ingredient, a plasticizer, a thixotroping agent, a powdery filler, an adhesive promoter, and a heat stabilizer, and has a viscosity at the low shearing speed of 12,000 to 20,000 cps and a ratio of the viscosity at the low shearing speed to the viscosity at the high shearing speed of 1.5 to 2.5. The sealing material is suitably applied to gap between steel plates joined to each other by a non-contact way.Preferred polyvinylchloride type resin is a blend of a particulate resin having a mean particle size of 2 to 3 .mu.m mixed with a particulate resin having a mean particle size of 20 to 30 .mu.m at a mixing weight ratio of 1:1 to 3:1. Preferably, the plasticizer is a high molecular plasticizer, and the powdery filler is one having an oil absorption of 40 to 50 cc/100 g.
摘要:
An apparatus is realized which is capable of shortening the updating period of the measurement of a specific channel and lengthening the updating period of the measurement for another channel, thereby making the measurements for all the channels possible. The measurement apparatus includes a multiplexer that sequentially switches between analog input signals of a plurality of channels and internal calibration signals; an analog-to-digital converter that converts the signals from an analog to digital form; and a digital processor to which the signals are input, wherein the digital processor includes a sequence operation unit for sequentially switching between a combination of a channel for which a high-speed update is necessary and another channel, and the internal calibration signal among the input signals of the plurality of channels and supplying, to the multiplexer, an operation signal that is input to the AD converter.
摘要:
Provided is an ozone concentrator including an ozone generator (3), adsorption/desorption columns (4) in which silica gel (6) cooled with a certain-temperature refrigerant (25) for concentrating ozone generated by the ozone generator (3) is packed, a refrigerating machine (23) for cooling the refrigerant (25), a vacuum pump (20) for enhancing a concentration of the ozone in one of the adsorption/desorption columns (4) by discharging mainly oxygen from the silica gel (6) adsorbing the ozone, a plurality of valves (8) to (13) for air pressure operations, for switching passages of gas that is allowed to flow in or flow out with respect to the adsorption/desorption columns (4), and ozone concentration meters (28, 29) for measuring the concentration of the ozone enhanced by the vacuum pump (20), in which a discharge line of the vacuum pump (20) is connected to another one of the adsorption/desorption columns (4), whereby the ozone is allowed to pass through another one of the adsorption/desorption columns again. Therefore, stable ozone of high concentration can be generated at a satisfactory energy efficiency without any temperature difference between upper and lower positions of adsorption/desorption columns.
摘要翻译:提供一种臭氧浓缩器,其包括臭氧发生器(3),吸收/解吸塔(4),其中用用于浓缩臭氧发生器(3)产生的臭氧的一定温度制冷剂(25)冷却的硅胶(6)被包装 ,用于冷却制冷剂(25)的制冷机(23),用于通过主要从硅胶(6)中排出氧气来提高其中一个吸附/解吸塔(4)中的臭氧浓度的真空泵(20) 吸附臭氧,多个用于空气压力操作的阀(8)至(13),用于切换相对于吸附/解吸塔(4)流入或流出的气体的通道,以及臭氧浓度计 (28,29),用于测量真空泵(20)增强的臭氧浓度,其中真空泵(20)的排放管线连接到另一个吸附/解吸塔(4),由此, 允许臭氧通过另一个吸附/ des orption列。 因此,可以以令人满意的能量效率产生高浓度的稳定的臭氧,而在吸附/解吸塔的上部和下部位置之间没有任何温差。