公开(公告)号：US20120074975A1

公开(公告)日：2012-03-29

申请号：US12888579

申请日：2010-09-23

申请人： Abram M. Detofsky ,  Todd P. Albertson ,  David Shia

发明人： Abram M. Detofsky ,  Todd P. Albertson ,  David Shia

IPC分类号： G01R31/28 ,  G01B11/14 ,  H01R13/64

CPC分类号： G01R1/0408 ,  G01B7/31 ,  G01R1/0483 ,  G01R1/06794 ,  G01R31/2891 ,  H05K1/0268 ,  H05K2203/162 ,  H05K2203/166

摘要： Methods and structures for testing a microelectronic packaging structure/device are described. Those methods may include placing a device in a floating carrier, wherein the floating carrier is coupled to a socket housing by pin dowels disposed in four corners of the socket housing, and wherein at least two actuating motors are disposed within the socket housing, and micro adjusting the device by utilizing a capacitive coupled or a fiber optic alignment system wherein a maximum measured capacitance or maximum measured intensity between alignment structures disposed in the socket housing and alignment package balls disposed within the device indicate optimal alignment of the device. Methods further include methods for active co-planarity detection through the use of a capacitive-coupled techniques.

摘要翻译： 描述了用于测试微电子封装结构/器件的方法和结构。 这些方法可以包括将设备放置在浮动载体中，其中浮动载体通过设置在插座壳体的四个角落中的销钉联接到插座壳体，并且其中至少两个致动马达设置在插座壳体内，并且微型 通过利用电容耦合或光纤对准系统来调节装置，其中设置在插座壳体中的对准结构和设置在装置内的对准封装球之间的最大测量电容或最大测量强度表示装置的最佳对准。 方法还包括通过使用电容耦合技术进行有源共平面检测的方法。

公开(公告)号：US20140091821A1

公开(公告)日：2014-04-03

申请号：US13631599

申请日：2012-09-28

申请人： David Shia ,  Todd P. Albertson ,  Kip P. Stevenson

发明人： David Shia ,  Todd P. Albertson ,  Kip P. Stevenson

IPC分类号： G01R1/067 ,  G01R31/26

CPC分类号： G01R1/06761 ,  G01R3/00 ,  G01R31/2886

摘要： An electrical probe of an aspect includes a high yield strength wire core. The high yield strength wire core includes predominantly one or more materials selected from tungsten, tungsten-copper alloy, tungsten-nickel alloy, beryllium-copper alloy, molybdenum, stainless steel, and combinations thereof. The high mechanical strength wire core has a yield strength of at least 1 gigapascal (GPa) at temperature of 250° C. The electrical probe also includes a low electrical resistivity layer concentrically around the high yield strength wire core. The concentric layer includes predominantly one or more materials selected from silver, gold, copper, and combinations thereof. The low electrical resistivity layer has an electrical resistivity of no more than 2×10−8 Ohm-meters. The electrical probe has an outer cross-sectional dimension of the electrical probe that is no more than 50 micrometers. Between 60 to 85% of the outer cross-sectional dimension is provided by the high mechanical strength wire core. Between 10 to 30% of the outer cross-sectional dimension is provided by the low electrical resistivity layer.

摘要翻译： 一个方面的电探针包括高屈服强度的线芯。 高屈服强度线芯主要包括选自钨，钨 - 铜合金，钨 - 镍合金，铍 - 铜合金，钼，不锈钢及其组合中的一种或多种材料。 高机械强度线芯在250℃的温度下具有至少1千兆帕（GPa）的屈服强度。电探针还包括围绕高屈服强度线芯同心的低电阻率层。 同心层主要包括一种或多种选自银，金，铜及其组合的材料。 低电阻率层的电阻率不超过2×10-8欧姆米。 电探针具有不大于50微米的电探针的外横截面尺寸。 外横截面尺寸的60％至85％是由高机械强度线芯提供的。 外部横截面尺寸的10至30％由低电阻率层提供。

公开(公告)号：US09535095B2

公开(公告)日：2017-01-03

申请号：US14013422

申请日：2013-08-29

申请人： David Shia ,  Todd P. Albertson ,  Keith J. Martin

发明人： David Shia ,  Todd P. Albertson ,  Keith J. Martin

IPC分类号： G01R1/073 ,  G01R1/067 ,  G01R3/00

CPC分类号： G01R1/07371 ,  G01R1/06733 ,  G01R1/07357 ,  G01R3/00 ,  Y10T29/49124

摘要： Wire probes are described that resist rotation during assembly into a probe head of a die tester. One example includes probe wires with a protrusion at a pre-determined position along the length of the wire. A probe substrate with pads on one side each to attach to and electrically connect with a probe wire and a pads on the opposite side to connect to test equipment and a probe holder above the substrate with holes. Each hole holds a respective one of the probe wires against the probe substrate. Each hole also has a key to mate with a protrusion of a respective probe wire so that the protrusions engage the keys to prevent rotation of the respective wire.

摘要翻译： 描述了在组装到模具测试器的探针头期间抵抗旋转的线探针。 一个例子包括沿导线长度的预定位置具有突起的探针线。 探针基板，其一侧具有焊盘，每个探针基板附接到探针线和相对侧上的电极，以连接到测试设备，并且在基板上方具有孔。 每个孔将相应的探针线保持在探针基板上。 每个孔还具有与相应探针线的突起配合的键，使得突起接合键以防止相应线的旋转。

公开(公告)号：US09134343B2

公开(公告)日：2015-09-15

申请号：US13630141

申请日：2012-09-28

申请人： David Shia ,  Todd P. Albertson

发明人： David Shia ,  Todd P. Albertson

IPC分类号： G01R31/00 ,  G01R1/067 ,  G01R3/00 ,  G01R1/073

CPC分类号： G01R1/06705 ,  G01R1/07307 ,  G01R3/00

摘要： An apparatus includes a robot and a sort probe gripper. The sort probe gripper includes a body, a jaw mount inserted into the body, a plurality of grippers mounted in the jaw mount and an actuator sleeve slidable along the body to engage the plurality of grippers.

摘要翻译： 一种装置包括机器人和分选探针夹持器。 分类探针夹持器包括主体，插入到主体中的卡爪安装件，安装在卡爪安装件中的多个夹具和可沿主体滑动以与多个夹持器接合的致动器套筒。

公开(公告)号：US09207258B2

公开(公告)日：2015-12-08

申请号：US13631599

申请日：2012-09-28

申请人： David Shia ,  Todd P. Albertson ,  Kip P. Stevenson

发明人： David Shia ,  Todd P. Albertson ,  Kip P. Stevenson

IPC分类号： G01R1/067 ,  G01R31/26 ,  G01R3/00 ,  G01R31/28

CPC分类号： G01R1/06761 ,  G01R3/00 ,  G01R31/2886

摘要： An electrical probe of an aspect includes a high yield strength wire core. The high yield strength wire core includes predominantly one or more materials selected from tungsten, tungsten-copper alloy, tungsten-nickel alloy, beryllium-copper alloy, molybdenum, stainless steel, and combinations thereof. The high mechanical strength wire core has a yield strength of at least 1 gigapascal (GPa) at temperature of 250° C. The electrical probe also includes a low electrical resistivity layer concentrically around the high yield strength wire core. The concentric layer includes predominantly one or more materials selected from silver, gold, copper, and combinations thereof. The low electrical resistivity layer has an electrical resistivity of no more than 2×10−8 Ohm-meters. The electrical probe has an outer cross-sectional dimension of the electrical probe that is no more than 50 micrometers. Between 60 to 85% of the outer cross-sectional dimension is provided by the high mechanical strength wire core. Between 10 to 30% of the outer cross-sectional dimension is provided by the low electrical resistivity layer.

摘要翻译： 一个方面的电探针包括高屈服强度的线芯。 高屈服强度线芯主要包括选自钨，钨 - 铜合金，钨 - 镍合金，铍 - 铜合金，钼，不锈钢及其组合中的一种或多种材料。 高机械强度线芯在250℃的温度下具有至少1千兆帕（GPa）的屈服强度。电探针还包括围绕高屈服强度线芯同心的低电阻率层。 同心层主要包括一种或多种选自银，金，铜及其组合的材料。 低电阻率层的电阻率不超过2×10-8欧姆米。 电探针具有不大于50微米的电探针的外横截面尺寸。 外横截面尺寸的60％至85％是由高机械强度线芯提供的。 外部横截面尺寸的10至30％由低电阻率层提供。

公开(公告)号：US20140176172A1

公开(公告)日：2014-06-26

申请号：US13725255

申请日：2012-12-21

申请人： Kip Stevenson ,  Todd P. Albertson ,  David Shia ,  Kamil Salloum

发明人： Kip Stevenson ,  Todd P. Albertson ,  David Shia ,  Kamil Salloum

IPC分类号： G01R31/28

CPC分类号： G01R1/06755 ,  G01R3/00 ,  G01R31/26 ,  G01R31/2886

摘要： An examples includes a substrate, including a conductive trace and a layer disposed on top of the conductive trace, the layer defining at least one cavity extending to the conductive trace and an electrical probe disposed in the cavity, with solder coupling the electrical probe to the conductive trace. The electrical probe can include a high yield strength wire core including a refractory metal and a thin oxidation protection layer concentrically disposed around high yield strength wire core and providing an outside surface of the electrical probe, the thin oxidation protection layer including predominantly one or more materials selected from gold, platinum, ruthenium, rhodium, palladium, osmium, iridium, chromium, and combinations thereof, wherein the solder fills the cavity and is coupled to the electrical probe inside the cavity, disposed between the electrical probe and the layer.

摘要翻译： 示例包括基板，其包括导电迹线和设置在导电迹线顶部上的层，该层限定延伸到导电迹线的至少一个空腔和设置在该空腔中的电探针，焊料将电探针耦合到 导电痕迹 电探针可以包括高屈服强度的线芯，包括耐火金属和同心地设置在高屈服强度线芯周围的薄氧化保护层，并提供电探针的外表面，薄氧化保护层主要包括一种或多种材料 选自金，铂，钌，铑，钯，锇，铱，铬及其组合，其中焊料填充空腔并且耦合到设置在电探针和层之间的腔内的电探针。

公开(公告)号：US20140091828A1

公开(公告)日：2014-04-03

申请号：US13630141

申请日：2012-09-28

申请人： David Shia ,  Todd P. Albertson

发明人： David Shia ,  Todd P. Albertson

IPC分类号： G01R1/067

CPC分类号： G01R1/06705 ,  G01R1/07307 ,  G01R3/00

摘要： A sort probe gripper includes a body, a jaw mount inserted into the body, a plurality of grippers mounted in the jaw mount and an actuator sleeve slidable along the body to engage the plurality of grippers.

摘要翻译： 分类探针夹持器包括主体，插入到主体中的卡爪安装件，安装在卡爪安装件中的多个夹具和可沿主体滑动以与多个夹持器接合的致动器套筒。

公开(公告)号：US20130269173A1

公开(公告)日：2013-10-17

申请号：US13995931

申请日：2011-12-30

申请人： Todd P. Albertson ,  David M. Craig ,  Anil Kaza ,  David Shia

发明人： Todd P. Albertson ,  David M. Craig ,  Anil Kaza ,  David Shia

IPC分类号： G01R3/00

CPC分类号： G01R3/00 ,  G01R1/06705 ,  G01R1/07314 ,  Y10S901/02 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/53022 ,  Y10T29/5313

摘要： An apparatus comprising a robot; an end effector coupled to the robot and configured to grasp or transfer a probe of a size for use in a probe card; and instructions stored on a machine readable medium coupled to the robot, the instructions comprising to configure the robot to transfer a probe to a probe card substrate or, where the probe is attached to a probe card substrate, to move the probe. A method comprising automatically transferring a probe to a probe card substrate in an assembly process or, where the probe is attached to a probe card substrate, moving the probe in a repair process; and after transferring or moving the probe, heating the probe with a heat source.

摘要翻译： 一种包括机器人的装置; 耦合到所述机器人并被配置为抓住或传送尺寸用于探针卡的探针的端部执行器; 以及存储在耦合到所述机器人的机器可读介质上的指令，所述指令包括构造所述机器人以将探针传送到探针卡基板，或者所述探针附接到探针卡基板上以移动所述探针。 一种方法，包括在组装过程中自动将探针转移到探针卡基底，或者其中探针连接到探针卡基底上，在修复过程中移动探针; 在传送或移动探头之后，用热源加热探头。

公开(公告)号：US09069014B2

公开(公告)日：2015-06-30

申请号：US13539391

申请日：2012-06-30

申请人： Todd P. Albertson ,  Michael T. Crocker ,  David Shia ,  Lothar R. Kress

发明人： Todd P. Albertson ,  Michael T. Crocker ,  David Shia ,  Lothar R. Kress

IPC分类号： G01R31/00 ,  G01R1/073 ,  G01R3/00 ,  G01R31/28 ,  G01R1/00 ,  H01L21/00

CPC分类号： G01R1/07378 ,  G01R1/00 ,  G01R1/07357 ,  G01R3/00 ,  G01R31/2889 ,  H01L21/00 ,  Y10T29/4913 ,  Y10T29/49144

摘要： A wire probe assembly and forming process is described. In one example, a method includes inserting a plurality of wires through a probe former and a tip retainer to contact a probe head substrate, attaching the wires to a surface of the substrate, pulling the probe former laterally with respect to the substrate surface and the tip retainer to bend the wires into test probes with a resiliency to transverse movement, and removing the tip retainer to form a test probe head.

摘要翻译： 描述了线探头组件和成形过程。 在一个示例中，一种方法包括：将多条电线插入穿过探针成形器和尖端保持器以接触探头头基片，将电线连接到基片的表面，相对于基片表面侧向拉动探头， 尖端保持器将电线弯曲成具有弹性到横向运动的测试探针，并且移除尖端保持器以形成测试头。

公开(公告)号：US20150061713A1

公开(公告)日：2015-03-05

申请号：US14013422

申请日：2013-08-29

申请人： David Shia ,  Todd P. Albertson ,  Keith J. Mortin

发明人： David Shia ,  Todd P. Albertson ,  Keith J. Mortin

IPC分类号： G01R1/067 ,  G01R3/00

CPC分类号： G01R1/07371 ,  G01R1/06733 ,  G01R1/07357 ,  G01R3/00 ,  Y10T29/49124

摘要： Wire probes are described that resist rotation during assembly into a probe head of a die tester. One example includes probe wires with a protrusion at a pre-determined position along the length of the wire. A probe substrate with pads on one side each to attach to and electrically connect with a probe wire and a pads on the opposite side to connect to test equipment and a probe holder above the substrate with holes. Each hole holds a respective one of the probe wires against the probe substrate. Each hole also has a key to mate with a protrusion of a respective probe wire so that the protrusions engage the keys to prevent rotation of the respective wire.

摘要翻译： 描述了在组装到模具测试器的探针头期间抵抗旋转的线探针。 一个例子包括沿导线长度的预定位置具有突起的探针线。 探针基板，其一侧具有焊盘，每个探针基板附接到探针线和相对侧上的电极，以连接到测试设备，并且在基板上方具有孔。 每个孔将相应的探针线保持在探针基板上。 每个孔还具有与相应探针线的突起配合的键，使得突起接合键以防止相应线的旋转。