Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    6.
    发明授权
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号:US07576951B2

    公开(公告)日:2009-08-18

    申请号:US11411556

    申请日:2006-04-25

    IPC分类号: G11B5/127

    摘要: A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译: 用于垂直磁记录的磁写头,具有带有凹后缘的写极。 磁性写入极可以具有梯形形状,其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽,并且如果包括后屏蔽,则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能,例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极,掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层,并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层,并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE POLE HAVING A WRITE POLE AND TRAILING SHIELD WITH A TAPERED TRAILING GAP
    7.
    发明申请
    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE POLE HAVING A WRITE POLE AND TRAILING SHIELD WITH A TAPERED TRAILING GAP 审中-公开
    用于制作具有写入轨迹的具有写入点和跟踪屏蔽的贯通磁性写入点的方法

    公开(公告)号:US20120154951A1

    公开(公告)日:2012-06-21

    申请号:US12975010

    申请日:2010-12-21

    IPC分类号: G11B5/187 G11B5/255 G11B5/127

    摘要: A method for manufacturing a magnetic write head having a that has a write pole with a tapered trailing edge in a pole tip region, and a trailing shield that has a leading edge that tapers away from the write pole at an angle that is greater than that taper angle of the trailing edge of the write pole. The magnetic head has a step feature with a front edge that is recessed from the ABS. In one embodiment a magnetic wedge is formed over the tapered surface of the write pole. In another embodiment, a non-magnetic bump is formed over a first tapered portion of the write pole adjacent to the front edge of the step feature, and a non-magnetic wedge is formed over a second tapered portion of the write pole and extends from the non-magnetic bump to the air bearing surface.

    摘要翻译: 一种用于制造具有在磁极尖端区域具有锥形后缘的写入极的磁性写入头的方法,以及具有与所述写入磁极成角度大于所述磁极尖端的角度的前缘从所述写入磁极分离的前缘的后挡板。 写极后缘的锥角。 磁头具有台阶特征,其前缘从ABS凹入。 在一个实施例中,磁楔形成在写极的锥形表面上。 在另一个实施例中,非磁性凸块形成在与步极特征的前边缘相邻的写磁极的第一锥形部分上方,并且非磁性楔形成在写极的第二锥形部分之上并且从 非磁性凸块到空气轴承表面。

    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    8.
    发明申请
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号:US20070258167A1

    公开(公告)日:2007-11-08

    申请号:US11411556

    申请日:2006-04-25

    IPC分类号: G11B5/147

    摘要: A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译: 用于垂直磁记录的磁写头,具有带有凹后缘的写极。 磁性写入极可以具有梯形形状,其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽,并且如果包括后屏蔽,则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能,例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极,掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层,并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层,并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield
    9.
    发明授权
    Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield 有权
    用于制造具有前缘锥形写极,自对准侧屏蔽和独立后屏蔽的垂直磁写头的方法

    公开(公告)号:US08347489B2

    公开(公告)日:2013-01-08

    申请号:US12874116

    申请日:2010-09-01

    IPC分类号: G11B5/127 H04R31/00

    摘要: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.

    摘要翻译: 一种用于制造具有锥形写柱以及前缘锥形的磁写头的方法,以及独立的后侧和侧面磁屏蔽。 该方法允许写极通过干法进行构建,其中写极材料通过诸如溅射沉积或电镀的工艺沉积,并且写极形状通过掩模和离子铣削定义。 写极具有阶梯特征,其可以用于在稍微从ABS处凹陷的位置处在后屏蔽和写极之间提供增加的磁间隔,或者可以是磁性材料,其增加写极的位置处的有效厚度 从ABS略微凹进。 可以在该阶梯特征上进一步构建凸块结构,以增强磁场梯度以及减少后屏蔽饱和度。

    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A LEADING EDGE TAPERED WRITE POLE, SELF ALIGNED SIDE SHIELD AND INDEPENDENT TRAILING SHIELD
    10.
    发明申请
    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A LEADING EDGE TAPERED WRITE POLE, SELF ALIGNED SIDE SHIELD AND INDEPENDENT TRAILING SHIELD 有权
    用于制造具有导向边缘的写入磁头,自对准侧屏蔽和独立的跟踪屏蔽的贯穿磁头写入头的方法

    公开(公告)号:US20120050915A1

    公开(公告)日:2012-03-01

    申请号:US12874116

    申请日:2010-09-01

    IPC分类号: G11B5/10 B44C1/22

    摘要: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation. Because the trailing and side shields are formed independently, they can be made of different materials and with different throat heights.

    摘要翻译: 一种用于制造具有锥形写柱以及前缘锥形的磁写头的方法,以及独立的后侧和侧面磁屏蔽。 该方法允许通过干法处理写入极,其中写极材料通过诸如溅射沉积或电镀的工艺沉积,并且写极形状通过掩模和离子铣削来定义。 写极具有阶梯特征,其可以用于在稍微从ABS处凹陷的位置处在后屏蔽和写极之间提供增加的磁间隔,或者可以是磁性材料,其增加写极的位置处的有效厚度 从ABS略微凹进。 可以在该阶梯特征上进一步构建凸块结构,以增强磁场梯度以及减少后屏蔽饱和度。 因为尾部和侧面的屏蔽是独立形成的,所以它们可以由不同的材料制成,具有不同的喉部高度。