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    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    6.
    发明授权
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号：US07576951B2

    公开(公告)日：2009-08-18

    申请号：US11411556

    申请日：2006-04-25

    申请人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    发明人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

    摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    PMR WRITER AND METHOD OF FABRICATION
    7.
    发明申请
    PMR WRITER AND METHOD OF FABRICATION 有权
    PMR WRITER和制造方法

    公开(公告)号：US20110134569A1

    公开(公告)日：2011-06-09

    申请号：US12634533

    申请日：2009-12-09

    申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

    发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

    IPC分类号： G11B5/10

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/31

    摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

    摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

    Magnetic head with flared write pole having multiple tapered regions
    8.
    发明授权
    Magnetic head with flared write pole having multiple tapered regions 有权
    具有多个锥形区域的具有扩口写入磁极的磁头

    公开(公告)号：US08498078B2

    公开(公告)日：2013-07-30

    申请号：US12634533

    申请日：2009-12-09

    申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

    发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Sue S. Zhang ,  Yi Zheng

    IPC分类号： G11B5/147 ,  G11B5/187

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/31

    摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

    摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD USING NOVEL REACTIVE ION ETCHING CHEMISTRY
    10.
    发明申请
    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD USING NOVEL REACTIVE ION ETCHING CHEMISTRY 审中-公开
    使用新型反应离子蚀刻化学品制造一个完整磁性写头的方法

    公开(公告)号：US20130082027A1

    公开(公告)日：2013-04-04

    申请号：US13251058

    申请日：2011-09-30

    申请人： Guomin Mao ,  Donald G. Allen ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

    发明人： Guomin Mao ,  Donald G. Allen ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Yi Zheng

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

    摘要： A method for manufacturing a magnetic write head for magnetic data recording. The method includes forming a depositing a magnetic write pole material and forming a mask structure over the write pole material that includes a polymer mask under-layer, a dielectric hard mask formed over the polymer mask under-layer and a photoresist mask formed over the dielectric hard mask. The image of the photoresist mask is transferred onto the underlying dielectric hard mask and then a reactive ion etching is performed to transfer the image of the dielectric hard mask onto the polymer mask under-layer. This reactive ion etching is performed in an atmosphere chemistry that includes both an oxygen containing gas and a nitrogen containing gas.

    摘要翻译： 一种用于制造用于磁数据记录的磁写头的方法。 该方法包括形成磁性写入极材料的沉积，并在包括聚合物掩模底层的写入极材料上形成掩模结构，在聚合物掩模底层上形成的电介质硬掩模和形成在电介质上的光致抗蚀剂掩模 硬面膜 将光致抗蚀剂掩模的图像转印到下面的电介质硬掩模上，然后进行反应离子蚀刻，以将电介质硬掩模的图像转印到聚合物掩模底层上。 该反应离子蚀刻在包含含氧气体和含氮气体的气氛化学中进行。