Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET)
    6.
    发明授权
    Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET) 有权
    使具有前缘屏蔽(LES)和前缘锥度(LET)的PMR写入器的过程

    公开(公告)号:US08400733B2

    公开(公告)日:2013-03-19

    申请号:US12954422

    申请日:2010-11-24

    IPC分类号: G11B5/147

    摘要: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

    摘要翻译: 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极,磁性材料沉积在平坦化表面上,形成图案化的抗蚀剂材料,并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

    PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET)
    8.
    发明申请
    PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) 失效
    具有导向边缘屏蔽(LES)和导线边缘(LET)的PMR写入的过程

    公开(公告)号:US20120125886A1

    公开(公告)日:2012-05-24

    申请号:US12954485

    申请日:2010-11-24

    IPC分类号: G01R1/16

    摘要: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

    摘要翻译: 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极,将磁性材料沉积在平坦化表面上,形成图案化的抗蚀剂材料,并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

    Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield
    10.
    发明授权
    Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield 有权
    用于制造具有前缘锥形写极,自对准侧屏蔽和独立后屏蔽的垂直磁写头的方法

    公开(公告)号:US08347489B2

    公开(公告)日:2013-01-08

    申请号:US12874116

    申请日:2010-09-01

    IPC分类号: G11B5/127 H04R31/00

    摘要: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.

    摘要翻译: 一种用于制造具有锥形写柱以及前缘锥形的磁写头的方法,以及独立的后侧和侧面磁屏蔽。 该方法允许写极通过干法进行构建,其中写极材料通过诸如溅射沉积或电镀的工艺沉积,并且写极形状通过掩模和离子铣削定义。 写极具有阶梯特征,其可以用于在稍微从ABS处凹陷的位置处在后屏蔽和写极之间提供增加的磁间隔,或者可以是磁性材料,其增加写极的位置处的有效厚度 从ABS略微凹进。 可以在该阶梯特征上进一步构建凸块结构,以增强磁场梯度以及减少后屏蔽饱和度。