公开(公告)号：US08547660B2

公开(公告)日：2013-10-01

申请号：US12641251

申请日：2009-12-17

申请人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H. P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H. P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3146 ,  G11B5/315 ,  Y10T428/11 ,  Y10T428/1171

摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.

摘要翻译： 一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离 层。 薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。 尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。 可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

公开(公告)号：US08201320B2

公开(公告)日：2012-06-19

申请号：US12641242

申请日：2009-12-17

申请人： Donald G. Allen ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H. P. Lee ,  Fenglin Liu ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H. P. Lee ,  Fenglin Liu ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： H04R31/00 ,  G11B5/127

CPC分类号： G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.

摘要翻译： 一种用于制造具有前磁屏蔽和后磁屏蔽的磁写头的方法，该方法被布置为防止向后磁屏蔽的磁写磁场的损失。 写头包括非磁性阶梯层，其在从空气轴承表面移除的区域处在后磁屏蔽和写极之间提供额外的间隔。

公开(公告)号：US20110151279A1

公开(公告)日：2011-06-23

申请号：US12641251

申请日：2009-12-17

申请人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/33

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3146 ,  G11B5/315 ,  Y10T428/11 ,  Y10T428/1171

摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.

摘要翻译： 一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离 层。 薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。 尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。 可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

公开(公告)号：US20110146062A1

公开(公告)日：2011-06-23

申请号：US12641242

申请日：2009-12-17

申请人： Donald G. Allen ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.

摘要翻译： 一种用于制造具有前磁屏蔽和后磁屏蔽的磁写头的方法，该方法被布置为防止向后磁屏蔽的磁写磁场的损失。 写头包括非磁性阶梯层，其在从空气轴承表面移除的区域处在后磁屏蔽和写极之间提供额外的间隔。

公开(公告)号：US20130020204A1

公开(公告)日：2013-01-24

申请号：US13187381

申请日：2011-07-20

申请人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Junsheng Yang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Liubo Hong ,  Aron Pentek ,  Thomas J. A. Roucoux ,  Junsheng Yang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/127 ,  C25D7/00 ,  C23F1/04 ,  C25D5/02

CPC分类号： C25D5/022 ,  C25D5/48 ,  G11B5/3116 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.

摘要翻译： 一种用于制造具有锥形前缘的磁写头的方法。 该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。 然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。 然后通过化学机械抛光沉积和平坦化磁性材料。 剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。

公开(公告)号：US08349197B2

公开(公告)日：2013-01-08

申请号：US12623206

申请日：2009-11-20

申请人： Liubo Hong ,  Wen-Chien D. Hsiao ,  Yimin Hsu ,  Yi Zheng

发明人： Liubo Hong ,  Wen-Chien D. Hsiao ,  Yimin Hsu ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3143 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49048

摘要： A method for manufacturing a magnetic write head having a write pole and a trailing wrap around magnetic shield, and having a non-magnetic step layer and a non-magnetic bump to provide additional spacing between the write pole and the trailing wrap around shield at a location removed from the air bearing surface. A magnetic write pole material is deposited on a substrate and a non-magnetic step layer is deposited over the write pole. A reactive ion milling can he used to pattern the non-magnetic step layer to have a front edge that is located a desired distance from an air hearing surface. A patterning and ion milling process is then performed to define a write pole, and then a layer of alumina is deposited and ion milled to from a tapered, non-magnetic bump at the front the non-magnetic step layer.

摘要翻译： 一种用于制造磁性写入头的方法，该写入磁头在磁屏蔽周围具有写入磁极和尾部缠绕，并且具有非磁性阶跃层和非磁性凸起，以在写入磁极和屏蔽之间的后续缠绕在一个 位置从空气轴承表面移除。 磁性写入极材料沉积在衬底上，非磁性步骤层沉积在写入极上。 他可以使用反应离子研磨来对非磁性步骤层进行图案化以具有位于距离空气听力表面所需距离的前边缘。 然后进行图形化和离子研磨处理以限定写入极，然后沉积氧化铝层，并从非磁性阶梯层前面的锥形非磁性凸块离子研磨。

公开(公告)号：US20110120878A1

公开(公告)日：2011-05-26

申请号：US12623206

申请日：2009-11-20

申请人： Liubo Hong ,  Wen-Chien D. Hsiao ,  Yimin Hsu ,  Yi Zheng

发明人： Liubo Hong ,  Wen-Chien D. Hsiao ,  Yimin Hsu ,  Yi Zheng

IPC分类号： C23C14/34 ,  C25D5/34

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3143 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49048

摘要： A method for manufacturing a magnetic write head having a write pole and a trailing wrap around magnetic shield, and having a non-magnetic step layer and a non-magnetic bump to provide additional spacing between the write pole and the trailing wrap around shield at a location removed from the air bearing surface. A magnetic write pole material is deposited on a substrate and a non-magnetic step layer is deposited over the write pole. A reactive ion milling can he used to pattern the non-magnetic step layer to have a front edge that is located a desired distance from an air hearing surface. A patterning and ion milling process is then performed to define a write pole, and then a layer of alumina is deposited and ion milled to from a tapered, non-magnetic bump at the front the non-magnetic step layer.

摘要翻译： 一种用于制造磁性写入头的方法，该写入磁头在磁屏蔽周围具有写入磁极和尾部缠绕，并且具有非磁性阶跃层和非磁性凸起，以在写入磁极和屏蔽之间的后续缠绕在一个 位置从空气轴承表面移除。 磁性写入极材料沉积在衬底上，非磁性步骤层沉积在写入极上。 他可以使用反应离子研磨来对非磁性阶梯层进行图案化以具有位于距离空气听力表面所需距离的前边缘。 然后进行图形化和离子研磨处理以限定写入极，然后沉积氧化铝层，并从非磁性阶梯层前面的锥形非磁性凸块离子研磨。

公开(公告)号：US20120154951A1

公开(公告)日：2012-06-21

申请号：US12975010

申请日：2010-12-21

申请人： Wen-Chien D. Hsiao ,  Fenglin Liu ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien D. Hsiao ,  Fenglin Liu ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/187 ,  G11B5/255 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a that has a write pole with a tapered trailing edge in a pole tip region, and a trailing shield that has a leading edge that tapers away from the write pole at an angle that is greater than that taper angle of the trailing edge of the write pole. The magnetic head has a step feature with a front edge that is recessed from the ABS. In one embodiment a magnetic wedge is formed over the tapered surface of the write pole. In another embodiment, a non-magnetic bump is formed over a first tapered portion of the write pole adjacent to the front edge of the step feature, and a non-magnetic wedge is formed over a second tapered portion of the write pole and extends from the non-magnetic bump to the air bearing surface.

摘要翻译： 一种用于制造具有在磁极尖端区域具有锥形后缘的写入极的磁性写入头的方法，以及具有与所述写入磁极成角度大于所述磁极尖端的角度的前缘从所述写入磁极分离的前缘的后挡板。 写极后缘的锥角。 磁头具有台阶特征，其前缘从ABS凹入。 在一个实施例中，磁楔形成在写极的锥形表面上。 在另一个实施例中，非磁性凸块形成在与步极特征的前边缘相邻的写磁极的第一锥形部分上方，并且非磁性楔形成在写极的第二锥形部分之上并且从 非磁性凸块到空气轴承表面。

公开(公告)号：US08371019B1

公开(公告)日：2013-02-12

申请号：US13187370

申请日：2011-07-20

申请人： Sue Siyang Zhang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Sue Siyang Zhang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.

摘要翻译： 一种用于制造具有非常窄的轨道宽度的写入极，直的明确定义的侧面和明确的后缘宽度（例如，轨道宽度）的磁性写入头的方法。 该方法包括使用在分开的CMP停止层处停止的两个单独的化学机械抛光工艺。 第一CMP停止层直接沉积在RIEable填充层上。 RIE掩模形成在填充层和第一CMP停止层上，RIE掩模具有开口。 然后在RIEable填充层中形成沟槽。 然后将第二CMP停止层沉积到沟槽中并在RIE掩模上方，然后电镀磁性材料。 然后执行第一和第二化学机械抛光工艺，首先在第一CMP停止时停止，在第二CMP停止时第二次停止。

公开(公告)号：US20130019467A1

公开(公告)日：2013-01-24

申请号：US13187370

申请日：2011-07-20

申请人： Sue Siyang Zhang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Sue Siyang Zhang ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B33/00

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.

摘要翻译： 一种用于制造具有非常窄的轨道宽度的写入极，直的明确定义的侧面和明确的后缘宽度（例如，轨道宽度）的磁性写入头的方法。 该方法包括使用在分开的CMP停止层处停止的两个单独的化学机械抛光工艺。 第一CMP停止层直接沉积在RIEable填充层上。 RIE掩模形成在填充层和第一CMP停止层上，RIE掩模具有开口。 然后在RIEable填充层中形成沟槽。 然后将第二CMP停止层沉积到沟槽中并在RIE掩模上方，然后电镀磁性材料。 然后执行第一和第二化学机械抛光工艺，首先在第一CMP停止时停止，在第二CMP停止时第二次停止。